JPS60142235A - Article inspecting device - Google Patents

Abstract

PURPOSE:To inspect simultaneously a surface flaw and an internal defect of an article of a columnar shape, whose inside is transparent, by providing a light source, the first photodetecting means for detecting reflected light from an article, and the second photodetecting means for detecting transmitting light from the article. CONSTITUTION:An article inspecting device is provided with a line-shaped laser beam illuminating device 7, and this irradiating device 7 generates and irradiates a line-shaped (plate-shaped) laser beam 12 having a width in the longitudinal direction. This device has photodetectors 8, 9 and 10, and also a sample 1 can be rotated by a sample rotating device 11. In case when a surface flaw exists on a surface part A or B, and in case when an internal air foam or a foreign matter exists between A and B, the intensity of transmitting light 15 which is made incident on the photodetector 10 is weakened. In this way, a surface flaw and an interval defect of an article of a columnar shape, whose inside is transparent can be inspected simultaneously.

Description

DETAILED DESCRIPTION OF THE INVENTION (1) Technical Field of the Invention The present invention relates to an article inspection device for inspecting defects on the surface and inside of articles such as LEI.

(2) Technology background 1. For defect inspection of IEDs (light emitting diodes), 1
Although surface defect inspection and internal defect inspection are performed visually, there is a strong demand for automation of these inspections.

(3) Prior art and problems The side view of LED is shown in Figure 1 (8) 1.
The sea urchin has a hemispherical top and a cylindrical side, with a glassy interior. (Note 2 is L I
This is the wiring part of E I). ) In order to detect defects on the back of such LEDs, especially transparent LIE I), in order to detect surface defects and internal defects on the side, conventionally, the first
Devices such as those shown in Figures (・1) and (bl) can be considered.

However, ta+ in Figure 1 sometimes detects surface defects, and defects are detected by aligning the focal plane 4 of the imaging device 3 with the surface of MAI'41 and outputting an image of one surface to a display. Ta. However, in the case of 7, the focal plane of the imaging device must be moved and several images must be captured in one image, which is a drawback.1. Ta. Figure 1 fbl is n1
; When detecting a defect, the inspection is performed by aligning the focal plane 4 with the inside of the sample 11 using the same device as in Figure 1 (8); There was a drawback.

In addition, in FIG. 2, light is applied to the sample 1 from an illumination light source 5.

This device detects specularly reflected light from a low-interest surface using a photodetector 6, and detects defects based on the intensity of the light.However, such a device has the disadvantage that it can only detect surface defects.

(4) An object of the present invention is to eliminate the above-mentioned drawbacks and provide a defect inspection device capable of simultaneously inspecting both surface defects and internal defects of a transparent LIE D.

(5) Structure of the Invention The present invention includes a light source, a first light detection means for detecting reflected light from an article, a second light detection means for detecting transmitted light from the article, and a light detection means for rotating the article.・U rotation means, the article is rotated by the rotation means Φ11, and the first
and a change in the output J1 of the second light detection means to detect defects on the surface and inside of the article.

(6) Examples of the invention Embodiments of the present invention will be described in detail below.

FIGS. 3(a) and 3(bl) are overall configuration diagrams of a defect inspection apparatus according to the present invention, and FIG. 3(l) is a plan view of the apparatus.

The same figure (bl is a side view of the device. Hereinafter F same figure (al and o)
: (The operation will be explained by - by Il+.

7 is a line-shaped laser beam illumination device, which generates a line-shaped (temporary) laser beam 12 with a width in the vertical direction.
This is a device that irradiates. Gono-) ~in-like-Zaheem 1
2 is irradiated in a line on the cylindrical part of the side of test *11 (the part marked with ) in the figure.

Reference numerals 8, 9 and 10 are photodetectors, and sample 1' can be rotated by a sample rotation device 11.

In the apparatus configured as above, when the linear laser beam I2 is irradiated onto the surface of the sample 1, if scratches, bubbles, or foreign matter occur inside the surface between the surface portions A, 13, and ΔB, Since the line-shaped laser beam 12 is transmitted as transmitted light 15 from 8 to B, the photodetector 8
and 9, almost no light is detected and their output layer 1 degree is weak, and the photodetector 10 detects the light from the transmitted light 15 and its output intensity is strong. On the other hand, if there is a surface scratch at A, the line-shaped laser beam 12 at 8
Therefore, the light due to the scattered light 13 or 14 is detected by the photodetector 8 or 9, and the output intensity is increased. Also, if there is a surface scratch on △ or I3, or if there is any color or foreign matter in n1 between A13.

Photodetector 10 - Since the intensity of the incident transmitted light 15 is weakened, its output intensity is weakened.

Therefore, scratches on the sample can be detected by detecting the output signals of the photodetectors 8, 9 and 10, particularly by an output signal detection circuit (not shown in FIG. 3).

Based on the above characteristics, when sample 1 is rotated by the sample rotation device 11, the 4th rib has a surface scratch on the 8th.
As shown in the figure, the output intensity 16 of the photodetector 8 or 9 increases, and the output intensity 17 of the photodetector 10 weakens. The defect position of sample H can be detected as follows. M) If there is an internal defect in the 8 13 li'd or if there is a surface scratch in B, the output intensities 16 of the photodetectors 8 and 9 will remain weak and do not change, as shown in FIG.
Since the output intensity 17 of the photodetector 10 becomes weaker, the defective position of sample I'll can be detected as the defective portion 19 from the low rotation angle at that time. If the defect at this time is only an internal defect, then when it reaches position B (when rotated 80 degrees), since there is no surface flaw at position A, it will exhibit the characteristics shown in Figure 5 and the internal It turns out to be a defect. On the other hand, B
If there is a surface scratch on , then when you come to position B, there will be a surface scratch at position 4.
The characteristics of the diagram are shown and understood.

As described above, according to this embodiment, surface defects and internal defects in the cylindrical portion of the transparent L Ii +) can be detected at the same time.

Next, FIG. 6 (al and
) is one example of this, and the part surrounded by the broken line is the part of the in-line laser beam illumination device 7 (FIG. 3). A spot-shaped laser beam 12 emitted from a laser light source 20. The cylindrical laser beam 1' is expanded into a beam having a width only in the vertical direction by the cylindrical concave lens 21, and further converted into a line-shaped laser beam 12 having a constant width only in the vertical direction by the cylindrical convex lens 22, and is irradiated with a low interest rate. . Further, FIG. 6tb) shows another embodiment, in which a cylindrical convex lens 23 is used in place of the cylindrical concave lens 21 in FIG. 6(al) to create a similar line-shaped laser beam 12.

The above is an example of the embodiment shown in Fig. 3.
2, the laser beam G irradiating the sample I,
A similar effect can be obtained by using a spot-shaped laser beam that can scan at a sufficiently high speed in the longitudinal direction compared to the rotational speed of the sample instead of a J-line beam. An example of a laser spot scanning illumination device for this purpose is shown in Figure 6 ((1)
It is. The spot-shaped laser beam emitted from the laser light source 20 rotates 1° at a sufficiently high speed compared to the rotational speed of the sample 1. How to assemble 1 above 1
i4 (, this is scanned in a line shape. This causes the 6th
It can have the same function as the diagram (·l) or (bl).

Below, we have given an example in which the present invention is implemented as an inspection device for a transparent LED. E The same 1p characteristics as D!
The present invention can also be applied to the inspection of other articles.

(7) Effects of the Invention According to the present invention, it is possible to simultaneously inspect an article having a transparent cylindrical shape inside an LJ for surface flaws and internal defects.

[Brief explanation of drawings]

Figure 1 (al is a configuration diagram of a conventional surface defect inspection device. Figure 1 (bl is a configuration diagram of a conventional internal defect inspection device,
The figures are a block diagram of another embodiment of the conventional surface defect inspection device, FIG. A characteristic diagram showing the relationship between the rotation angle of the sample and the characteristics of the photodetector,
FIG. 5 also shows the relationship between the rotation angle of sample O', -1 and the characteristics of the photodetector for other types of defects. Blasphemy (L figure,
FIG. 6 (Jl) is a specific configuration diagram of a line-shaped diheem lighting device, and FIG. figure(
C) is a specific configuration diagram of the spot scanning illumination device 9'. ■...Trial 7 3...Imaging device. 6.8, 9.10...Photodetector, 7...In-line laser beam illumination device, II...Trial;'1 rotating device, 12...Line support, 13.1
4...Scattered light. 15... Transmitted light, 20... Laser light source. 2I...Syrinth 1' recal concave lens. 22.23... Cylindrical convex lens. 24... Vibration mirror, 25... Convex lens

Claims (3)

[Claims] (1) A light beam, a first light detection means for detecting reflected light from the article, a second light detection means for detecting transmitted light from the article, and a rotating lower stage for rotating and sliding the article. and
Detecting defects on the surface and inside of the article by rotating the article by the rotating means and detecting changes in the output characteristics of the first and second light detection means. UA location for goods inspection. (2) Claim 1, item 1, characterized in that there is a J-line laser beam illumination device ゛ζ.
& article inspection equipment. (3) The article inspection device according to claim 1, wherein the light source is a laser spot scanning illumination device.