JPS60133334A - 圧力センサ - Google Patents

圧力センサ

Info

Publication number
JPS60133334A
JPS60133334A JP24272283A JP24272283A JPS60133334A JP S60133334 A JPS60133334 A JP S60133334A JP 24272283 A JP24272283 A JP 24272283A JP 24272283 A JP24272283 A JP 24272283A JP S60133334 A JPS60133334 A JP S60133334A
Authority
JP
Japan
Prior art keywords
pressure
movable plate
plate
pressure sensor
fixed plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24272283A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0365850B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Toshitsugu Ueda
敏嗣 植田
Fusao Kosaka
幸坂　扶佐夫
Yoshinobu Sugihara
吉信 杉原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp filed Critical Yokogawa Hokushin Electric Corp
Priority to JP24272283A priority Critical patent/JPS60133334A/ja
Publication of JPS60133334A publication Critical patent/JPS60133334A/ja
Publication of JPH0365850B2 publication Critical patent/JPH0365850B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0005—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP24272283A 1983-12-22 1983-12-22 圧力センサ Granted JPS60133334A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24272283A JPS60133334A (ja) 1983-12-22 1983-12-22 圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24272283A JPS60133334A (ja) 1983-12-22 1983-12-22 圧力センサ

Publications (2)

Publication Number Publication Date
JPS60133334A true JPS60133334A (ja) 1985-07-16
JPH0365850B2 JPH0365850B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-10-15

Family

ID=17093270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24272283A Granted JPS60133334A (ja) 1983-12-22 1983-12-22 圧力センサ

Country Status (1)

Country Link
JP (1) JPS60133334A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100447243B1 (ko) * 2002-07-08 2004-09-07 한국항공우주연구원 대기압차를 이용한 항공기 자세 측정 시스템

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9290067B2 (en) * 2012-08-30 2016-03-22 Freescale Semiconductor, Inc. Pressure sensor with differential capacitive output

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100447243B1 (ko) * 2002-07-08 2004-09-07 한국항공우주연구원 대기압차를 이용한 항공기 자세 측정 시스템

Also Published As

Publication number Publication date
JPH0365850B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-10-15

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