JPS60128352U - ホトマスク - Google Patents

ホトマスク

Info

Publication number
JPS60128352U
JPS60128352U JP1984014159U JP1415984U JPS60128352U JP S60128352 U JPS60128352 U JP S60128352U JP 1984014159 U JP1984014159 U JP 1984014159U JP 1415984 U JP1415984 U JP 1415984U JP S60128352 U JPS60128352 U JP S60128352U
Authority
JP
Japan
Prior art keywords
photomask
substrate
resist
pattern
photomask used
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984014159U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6323703Y2 (enrdf_load_stackoverflow
Inventor
悟 橋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1984014159U priority Critical patent/JPS60128352U/ja
Publication of JPS60128352U publication Critical patent/JPS60128352U/ja
Application granted granted Critical
Publication of JPS6323703Y2 publication Critical patent/JPS6323703Y2/ja
Granted legal-status Critical Current

Links

JP1984014159U 1984-02-06 1984-02-06 ホトマスク Granted JPS60128352U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984014159U JPS60128352U (ja) 1984-02-06 1984-02-06 ホトマスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984014159U JPS60128352U (ja) 1984-02-06 1984-02-06 ホトマスク

Publications (2)

Publication Number Publication Date
JPS60128352U true JPS60128352U (ja) 1985-08-28
JPS6323703Y2 JPS6323703Y2 (enrdf_load_stackoverflow) 1988-06-29

Family

ID=30498828

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984014159U Granted JPS60128352U (ja) 1984-02-06 1984-02-06 ホトマスク

Country Status (1)

Country Link
JP (1) JPS60128352U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6323703Y2 (enrdf_load_stackoverflow) 1988-06-29

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