JPS60128234A - Copper alloy for lead frame - Google Patents

Copper alloy for lead frame

Info

Publication number
JPS60128234A
JPS60128234A JP23765283A JP23765283A JPS60128234A JP S60128234 A JPS60128234 A JP S60128234A JP 23765283 A JP23765283 A JP 23765283A JP 23765283 A JP23765283 A JP 23765283A JP S60128234 A JPS60128234 A JP S60128234A
Authority
JP
Japan
Prior art keywords
alloy
heat resistance
poor
lead frame
strength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23765283A
Other languages
Japanese (ja)
Inventor
Hirohisa Iwai
岩井 博久
Kiichi Akasaka
赤坂 喜一
Masato Asai
真人 浅井
Shigeo Shinozaki
篠崎 重雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP23765283A priority Critical patent/JPS60128234A/en
Publication of JPS60128234A publication Critical patent/JPS60128234A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain the titled Cu alloy exceeding considerably a conventional Cu alloy in strength and heat resistance and having satisfactory adhesive strength to plating and solderability by adding prescribed amounts of Ni, Al, Si and Sn to Cu. CONSTITUTION:This Cu alloy for a lead frame consists of, by weight, 0.5-5.0% Ni, 0.5-5.0% Al, 0.05-2% Si, <=4% Sn and the balance Cu. Intermetallic compounds such as NixAly, NixSiy and NixSny are finely precipitated in Cu as the base of the Cu alloy, and Ni, Al, Si and Sn are solubilized in the base, so the Cu base is strengthened.

Description

【発明の詳細な説明】 本発明合金は半導体を要素とするICX LSI等の機
器のリードフレーム用鋼合金、特に耐熱性、曲げ加工性
およびメッギ密着性に優れた銅合金に関するものである
DETAILED DESCRIPTION OF THE INVENTION The alloy of the present invention relates to a steel alloy for lead frames of devices such as ICX LSIs that use semiconductors as an element, and particularly to a copper alloy having excellent heat resistance, bending workability, and mesh adhesion.

一般に半導体を要素とするiC,LS、T等の機器は何
れも半導体ペレット、リード、ポンティングワイヤによ
り構成されたものを・・−メチ、クソール、セラミック
シール技術により劃止しだものであり、種々の型式のも
のが使用されている。
In general, devices such as iC, LS, and T that use semiconductors as elements are all composed of semiconductor pellets, leads, and ponting wires, which are sealed using methi, kusol, and ceramic seal technologies. Various types are used.

而して従来これら機器のリードフレーム拐としては鉄−
二、ケル系月相としてコバール(Fe−29に %Ni−17チC0合金)、lI2合金、コバール≠4
金を被着したクラツド材、鉄−ニッケル合金にA9を被
着したクラツド材、銅合金としてリン青銅、C1940
○(Cu−Fe−Zn−P合金入19500 (C:u
−Fe−co−Sn−P合金)、C14410((Eu
=Sn−P合金)等が用いられている。しかしながら上
記鉄−ニッケル系材料は耐熱性、強度は優れているが、
コストが高いとともに導電性が悪く、加工性も悪いため
近時コストが安くかつ加工性、メッキ密着性および半田
付性が良好な銅系合金が主流を占めつつある。しかしな
がら上記の如き銅合金は耐熱性、電気(熱・)的特性、
曲げ加工性が劣るためリードフレーム材として充分な特
性を発揮することができないものであった。特に最近の
ように高密度、高集積度が強く要求されるところから高
い導電率、強度、曲は加工性および耐熱性を有し、メッ
キ加工され易い表面品質を有する材f−1が必要となっ
て来た。すなわち■高信頼性■経済性■サーマルパフォ
ーマンスといウモのが現在のリードフレーム拐へ要求さ
れる条件となっているのである。
Conventionally, lead frames for these devices were made of iron.
2.Kovar (Fe-29 to %Ni-17C0 alloy), lI2 alloy, Kovar≠4 as Kel system moon phase
Clad material coated with gold, Clad material coated with A9 on iron-nickel alloy, Phosphor bronze as copper alloy, C1940
○(Cu-Fe-Zn-P alloy containing 19500 (C:u
-Fe-co-Sn-P alloy), C14410 ((Eu
=Sn-P alloy) etc. are used. However, although the above iron-nickel materials have excellent heat resistance and strength,
Since they are expensive, have poor conductivity, and have poor workability, copper-based alloys that are low in cost and have good workability, plating adhesion, and solderability have recently become mainstream. However, copper alloys such as those mentioned above have heat resistance, electrical (thermal/) properties,
Because of its poor bendability, it was unable to exhibit sufficient properties as a lead frame material. Especially in recent years, where high density and high degree of integration are strongly required, there is a need for material f-1 that has high conductivity, strength, bendability, heat resistance, and surface quality that makes it easy to plate. It has become. In other words, ■High reliability ■Economic efficiency ■Thermal performance are the requirements for modern lead frame manufacturing.

メッキ加工され易い表面品質とは半導体ペレ。The surface quality that is easily plated is semiconductor Pelle.

トとリードフレームならびにボンディングワイヤとリー
ドフレームの接続性を向上し、リードフレームの耐酸化
性、耐腐食性、半田付性等を向上維持するために行なう
金、銀、ニッケル、スズ等のメッキ被着性が優れている
ことで、このようなメッキ加工はリードフレームの如き
羽村においては加工コスト中、大きな比重を占め品質信
頼性に大きく影響する。 ゛ コバール、42合金等の鉄−ニッケル系材料は導電性、
熱伝導性が劣るばかりか、メッキ加工が困難で特別の工
夫を必要とする。例えばこれ等基材の表面にニッケル層
と5n−Ni合金層とを順mるいは基材の表面に銀およ
び銅を含むシアンアルカリ性メッキ液にてメッキを施し
、その表面にメッキを行っている。一般にリードフレー
ム利用銅合金として次の6項目を満足する材料が強く要
望されている。
Plating with gold, silver, nickel, tin, etc. is performed to improve the connectivity between the lead frame and the bonding wire, as well as between the bonding wire and the lead frame, and to improve and maintain the oxidation resistance, corrosion resistance, solderability, etc. of the lead frame. Due to its excellent adhesion, this type of plating process accounts for a large proportion of the processing cost for products such as lead frames, and has a large impact on quality reliability.゛Iron-nickel materials such as Kovar and 42 alloy are conductive,
Not only does it have poor thermal conductivity, but plating is difficult and requires special ingenuity. For example, the surface of these base materials is plated with a nickel layer and a 5n-Ni alloy layer in sequence, or the surface of the base material is plated with a cyan alkaline plating solution containing silver and copper, and the surface is plated. . Generally, there is a strong demand for a material that satisfies the following six items as a copper alloy for use in lead frames.

(1)電気および熱の伝導性が良いこと。(1) Good electrical and thermal conductivity.

(2)耐熱性が良いこと。(2) Good heat resistance.

(3)曲げ加工性が良いこと。(3) Good bending workability.

(ヰ)強度が大きいこと。(ii) High strength.

(5)メッキ密着性が良いこと。(5) Good plating adhesion.

(6)半田付性が良いこと。(6) Good solderability.

本発明はこれに鑑み種々研究の結果、従来のリードフレ
ーム用銅合金よりも耐熱性、曲げ加工性に優れ充分な強
度とメッキ密着性を有する半導体機器のリードフレーム
用銅合金を開発したものでNi O05’ −5,Ow
t%(以下チと略記)AAO,5−5,0%、Si O
,05〜2%、5nl1%以下を含み残部がCuからな
る合金に係る。即ち本発明合金はGuを基材としN1、
Ag、Si、 Snを添加するものであl) N1XA
j!L) Nix 51fXNix Sn g等の金属間化合物を
微小析出物として析出させ、さらにCu基中に”% /
’J1% jslおよびSnが固溶することによシ基材
の強化を狙ったもので銅合金としての従来の常識を越え
る強度、耐熱性を有し、良好なメッキ密着性、半田付性
を有するリードフレーム用銅合金を得たものである。ま
た本発明合金はcdの原料として通常の純銅、例えば電
気銅または無酸素銅は勿論、リン脱酸銅も使用できるば
かシでなくPが少量残存してもほとんど同様の特性を有
する合金が得られる。
In view of this, as a result of various research, the present invention has developed a copper alloy for lead frames of semiconductor devices that has better heat resistance and bending workability than conventional copper alloys for lead frames, and has sufficient strength and plating adhesion. NiO05'-5,Ow
t% (hereinafter abbreviated as Chi) AAO, 5-5.0%, SiO
, 05 to 2%, 5nl1% or less, and the remainder is Cu. That is, the alloy of the present invention uses Gu as a base material, N1,
It adds Ag, Si, and Sn.l) N1XA
j! L) Intermetallic compounds such as Nix 51f
'J1% Aimed at strengthening the base material by solid solution of JSL and Sn, it has strength and heat resistance exceeding conventional wisdom as a copper alloy, and has good plating adhesion and solderability. A copper alloy for lead frames having the following properties was obtained. In addition, the alloy of the present invention can be used not only for ordinary pure copper such as electrolytic copper or oxygen-free copper, but also for phosphorus-deoxidized copper as a raw material for CD, and even if a small amount of P remains, an alloy with almost the same properties can be obtained. It will be done.

//′iNi 0.5チ、/u0.5チ、Si 0.0
5%未満では必要とする強度、耐熱性が得られず、Ni
5.0%、Ag5.0%、Si2%、Sn4%を越える
と強度、耐熱性において優れた性能が得られるが曲げ加
工性が劣化するばかシでなく、メッキ密着性、および半
田付性も劣化するからである。
//'iNi 0.5chi, /u0.5chi, Si 0.0
If it is less than 5%, the required strength and heat resistance cannot be obtained, and Ni
If it exceeds 5.0%, Ag5.0%, Si2%, Sn4%, excellent performance in strength and heat resistance can be obtained, but it does not mean that bending workability deteriorates, but also plating adhesion and solderability. This is because it deteriorates.

以下本発明合金を実施例により説明する。The alloy of the present invention will be explained below using examples.

黒鉛るつほを使用してCuを溶解し、その湯面を木炭粉
末にて覆い十分溶解した後、Ni、Sn、 Si。
After melting Cu using a graphite melt, covering the surface of the hot water with charcoal powder and thoroughly melting it, Ni, Sn, and Si are dissolved.

Agの順に添加しこれを鋳造し第1表に示す組成の幅1
50mm、長さ200mm、厚さ25間の鋳塊を得た。
Adding Ag in this order and casting it gives the composition range 1 shown in Table 1.
An ingot with a length of 50 mm, a length of 200 mm, and a thickness of 25 mm was obtained.

次にこの鋳塊の表面を一面あたり25問面削した後、熱
間圧延を行ない、巾150mm、厚さ8mmの板とし、
しかる後この板に冷間圧延と焼鈍を繰シ返し加え最終圧
延率11ozにて厚さ0.3mの冷間圧延上がり相を得
た。これらの板について曲げ加工性、導電率、引張り強
さ、耐熱性、メッキ密着性、半田付性を測定した。これ
らの結果を第1表に示す。なお比較のために従来のリー
ドフレーム用合金についても同様な測定を行ない、その
結果を第1表に併記した。
Next, the surface of this ingot was milled 25 times per side, and then hot rolled to form a plate with a width of 150 mm and a thickness of 8 mm.
Thereafter, this plate was repeatedly cold-rolled and annealed at a final rolling reduction of 11 oz to obtain a cold-rolled phase having a thickness of 0.3 m. The bending workability, electrical conductivity, tensile strength, heat resistance, plating adhesion, and solderability of these plates were measured. These results are shown in Table 1. For comparison, similar measurements were performed on conventional lead frame alloys, and the results are also listed in Table 1.

曲げ加工性は板材より幅5mm、長さ50順の短冊型試
験片を切シ出し、その中央部で1800密着曲げを行な
い、該曲げ部の表面状態を観察し、割れ、しわの発生が
なく平滑なものを曲げ加工性が良いということで○印、
割れが明らかに発生しているものを曲げ加工性不良とい
うことでX印、その中間で、割れ、しわがわずかに発生
しているものをΔ印で表わした。
For bending workability, cut strips of 5mm in width and 50mm in length from the plate material, perform 1800 degrees of tight bending at the center, and observe the surface condition of the bent part to ensure that no cracks or wrinkles occur. Marked with ○ because it has good bending properties for smooth objects.
Those with obvious cracks are marked as having poor bending workability and are marked with an X mark, while those with slight cracks or wrinkles in between are marked with a Δ mark.

導電率および引張シ強さの測定1−i JIS−HO5
05およびJIS−22241に基づいて行なった。
Measurement of electrical conductivity and tensile strength 1-i JIS-HO5
05 and JIS-22241.

メッキ密着性は上記板の鈍し材についてリードフレーム
のメッキ工程と同様にアルカリ脱脂(1分間)−20チ
硝酸エツチング(30秒)−150℃加熱(5分間)−
550℃加熱(5分間)を行い、550℃5分間加熱で
全く膨れの見られないものをO印、050℃、5分間加
熱では膨れは見られないが550℃、5分間加熱で膨れ
が発生ずるものをム印、)150℃、5分間加熱ですで
に膨れか発生したものをx印で示した。
Plating adhesion was determined using the same methods as the lead frame plating process for the dull material of the plate: alkaline degreasing (1 minute), etching with 20 nitric acid (30 seconds), heating at 150°C (5 minutes).
Heating at 550°C for 5 minutes shows no blistering at 550°C for 5 minutes, and indicates no blistering when heated at 050°C for 5 minutes, but swelling occurs when heated at 550°C for 5 minutes. The resulting product is marked with a mu, and the product that has already blistered after heating at 150°C for 5 minutes is marked with an x.

半1]」伺性f/i垂直式浸漬法により230℃の5n
−)I0%pb共晶半1−F1浴に10秒間浸漬しだも
のの表面を観察し、その結果表面が滑らかなものを○印
、表面に少し凹凸が見えるものを△印、表面に凹凸が生
じ半田が儒れていない部分を生じているものをX印で示
した。
5n at 230°C by vertical immersion method
-) Observe the surface of the object immersed in the I0%pb eutectic semi-1-F1 bath for 10 seconds. As a result, those with smooth surfaces are marked with ○, those with slight irregularities on the surface are marked with △, and the surfaces with irregularities are marked. The parts where the solder has not formed are marked with an X.

+l+iJ熱性は前記圧延制よりJIS−22201に
規定する引張り試験片を切り出し、これをアルコ゛ンガ
ス雰囲気中で1000℃、5分間加熱焼鈍した後、引張
り試験を行ない、その引張り強さを焼鈍前と比較し、強
度の低下率が30o/)以下のものを耐熱性良好として
○印、50%を越えるものを耐熱性不良として×印で表
わした。
For +l+iJ thermal properties, a tensile test piece specified in JIS-22201 was cut out from the above-mentioned rolling process, and after annealing it at 1000°C for 5 minutes in an alcohol gas atmosphere, a tensile test was conducted and the tensile strength was compared with that before annealing. Those in which the rate of decrease in strength was 30 o/) or less were deemed to have good heat resistance and were marked with a circle, and those in which the rate of decrease in strength exceeded 50% were marked as poor in heat resistance and were marked with an x.

第1表 第1表から明らかな如く本発明合金NIL L〜14は
導電率13〜63%■Acs、引張り強さ55〜? 9
 Kq f /−の特性を示し、良好な曲げ加工性と耐
熱性を有しており、Cu−Fe−Zn−P合金に匹敵す
る導電率とはるかに優れた引張り強度、耐熱性を有して
いることがわかる。他にメッキ密着性、半田U件もCu
−Fe−Zn−P合金に比べ十分優れているのがわかる
As is clear from Table 1, the alloy of the present invention, NIL L~14, has an electrical conductivity of 13~63%■Acs and a tensile strength of 55~? 9
It exhibits the characteristics of Kq f /-, has good bending workability and heat resistance, and has electrical conductivity comparable to Cu-Fe-Zn-P alloy and far superior tensile strength and heat resistance. I know that there is. In addition, plating adhesion, solder U items are also Cu
It can be seen that it is sufficiently superior to the -Fe-Zn-P alloy.

これに対してN1の少ない比較合金N115は引張り強
度および耐熱性が十分でなく、曲げ加工性も若干劣り、
Niの多い比較合金Nα16は導電率ガ低いばかりでな
く、曲は加工性も悪く、メッキ密着性、半FI]有性も
劣っている。AI!の少ない比較合金Nα17は引張り
強度および+AiJ熱性が十分でなくAeの多い比較合
金Nα18は導電率が低いばかシでなく、曲げ加工性も
悪く、メッキ密着性、半1:TI(”性も劣っている。
On the other hand, the comparative alloy N115, which has less N1, has insufficient tensile strength and heat resistance, and is slightly inferior in bending workability.
Comparative alloy Nα16, which contains a large amount of Ni, not only has low conductivity, but also has poor processability and poor plating adhesion and semi-FI properties. AI! The comparative alloy Nα17, which has a low amount of Ae, has insufficient tensile strength and +AiJ thermal properties, and the comparative alloy Nα18, which has a large amount of Ae, has low conductivity, poor bending workability, and poor plating adhesion and semi-1:TI ( ing.

Slの少ない比+liQ合金NO,19は耐熱性が十分
でなく、Slの多い比較合金Nα20は曲げ加工性が悪
いばかりでなく、メッキ密着性、龜21は、引張り強さ
および耐熱性が十分でなくN1とjVの多い比較合金N
α22は導電率が低いは力1りでなく、曲げ加工性も悪
く、メッキ密着性、半田付性も劣っている。AQと81
の少ない比較合金Nu 25は引張り強度および耐熱性
が十分でな(、AAと81の多い比較合金Nα21Iは
導電率が低いばかりでなく、曲げ加工性も悪く、メッキ
密着性、半田付性も劣っている。$1とN1の少ない比
較台ヒ025・ は耐無性が十分でなく、$1とN1の
多い比較合金NCL26は導電率が低いばかりでなく、
曲げ加工性も悪く、メッキ密着性、半田付性も劣ってい
る。
The low Sl ratio+liQ alloy No. 19 does not have sufficient heat resistance, and the comparative alloy Nα20 with a high Sl ratio not only has poor bending workability, but also has insufficient plating adhesion, tensile strength, and heat resistance. Comparative alloy N with more N1 and jV
Although α22 has low conductivity, it does not require much force, has poor bending workability, and has poor plating adhesion and solderability. AQ and 81
The comparative alloy Nu 25 with less AA and 81 has insufficient tensile strength and heat resistance (the comparative alloy Nα21I with more AA and 81 not only has low conductivity but also poor bending workability, poor plating adhesion and solderability). Comparative alloy Hi025, which has less $1 and N1, does not have sufficient resistance to resistance, and comparative alloy NCL26, which has more $1 and N1, not only has low conductivity, but also has low conductivity.
The bending workability is poor, and the plating adhesion and solderability are also poor.

Snの多い比較合金Nα27は導電率が低いばかりでな
く、曲げ加工性も悪く、メッキ密着性、半田付性も劣っ
ている。
Comparative alloy Nα27, which contains a large amount of Sn, not only has low conductivity, but also poor bending workability, and poor plating adhesion and solderability.

Claims (1)

【特許請求の範囲】[Claims] N105〜5.0 wt係、AQO5〜5.0 wt%
、Si0.05〜2wt%、Sn lIwt %以下を
含み残部がCuからなることを特徴とするリードフレー
ム用銅合金。
N105~5.0 wt%, AQO5~5.0 wt%
, 0.05 to 2 wt % of Si, and 0.05 to 2 wt % of Sn, with the balance being Cu.
JP23765283A 1983-12-16 1983-12-16 Copper alloy for lead frame Pending JPS60128234A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23765283A JPS60128234A (en) 1983-12-16 1983-12-16 Copper alloy for lead frame

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23765283A JPS60128234A (en) 1983-12-16 1983-12-16 Copper alloy for lead frame

Publications (1)

Publication Number Publication Date
JPS60128234A true JPS60128234A (en) 1985-07-09

Family

ID=17018493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23765283A Pending JPS60128234A (en) 1983-12-16 1983-12-16 Copper alloy for lead frame

Country Status (1)

Country Link
JP (1) JPS60128234A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62238343A (en) * 1986-04-10 1987-10-19 Furukawa Electric Co Ltd:The Copper alloy for electronic equipment
US5100617A (en) * 1990-01-05 1992-03-31 Midwest Thermal Spray Inc. Wires made of copper-based alloy compositions
US5236662A (en) * 1990-01-05 1993-08-17 Kiilunen David D Wires made of copper-based alloy compositions
USRE35624E (en) * 1990-01-05 1997-10-07 Kiilunen; David D. Wires made of copper-based alloy compositions
CN110863121A (en) * 2019-11-18 2020-03-06 内蒙古电力(集团)有限责任公司内蒙古电力科学研究院分公司 Oxidation-resistant copper-aluminum alloy, preparation method thereof and electrical contact prepared from alloy

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58123846A (en) * 1982-01-20 1983-07-23 Nippon Mining Co Ltd Lead material for semiconductor apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58123846A (en) * 1982-01-20 1983-07-23 Nippon Mining Co Ltd Lead material for semiconductor apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62238343A (en) * 1986-04-10 1987-10-19 Furukawa Electric Co Ltd:The Copper alloy for electronic equipment
US5100617A (en) * 1990-01-05 1992-03-31 Midwest Thermal Spray Inc. Wires made of copper-based alloy compositions
US5236662A (en) * 1990-01-05 1993-08-17 Kiilunen David D Wires made of copper-based alloy compositions
USRE35624E (en) * 1990-01-05 1997-10-07 Kiilunen; David D. Wires made of copper-based alloy compositions
CN110863121A (en) * 2019-11-18 2020-03-06 内蒙古电力(集团)有限责任公司内蒙古电力科学研究院分公司 Oxidation-resistant copper-aluminum alloy, preparation method thereof and electrical contact prepared from alloy

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