JPS60125229A - 排ガスの高度処理方法 - Google Patents

排ガスの高度処理方法

Info

Publication number
JPS60125229A
JPS60125229A JP58230586A JP23058683A JPS60125229A JP S60125229 A JPS60125229 A JP S60125229A JP 58230586 A JP58230586 A JP 58230586A JP 23058683 A JP23058683 A JP 23058683A JP S60125229 A JPS60125229 A JP S60125229A
Authority
JP
Japan
Prior art keywords
acid
gas
exhaust gas
silane
alcohol
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58230586A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0417690B2 (cs
Inventor
Jun Saito
純 斉藤
Takatoshi Mitsuishi
三ツ石 隆俊
Hiroshi Waki
脇 浩
Hiroji Miyagawa
博治 宮川
Hiroshige Amita
裕茂 網田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP58230586A priority Critical patent/JPS60125229A/ja
Publication of JPS60125229A publication Critical patent/JPS60125229A/ja
Publication of JPH0417690B2 publication Critical patent/JPH0417690B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
JP58230586A 1983-12-08 1983-12-08 排ガスの高度処理方法 Granted JPS60125229A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58230586A JPS60125229A (ja) 1983-12-08 1983-12-08 排ガスの高度処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58230586A JPS60125229A (ja) 1983-12-08 1983-12-08 排ガスの高度処理方法

Publications (2)

Publication Number Publication Date
JPS60125229A true JPS60125229A (ja) 1985-07-04
JPH0417690B2 JPH0417690B2 (cs) 1992-03-26

Family

ID=16910059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58230586A Granted JPS60125229A (ja) 1983-12-08 1983-12-08 排ガスの高度処理方法

Country Status (1)

Country Link
JP (1) JPS60125229A (cs)

Also Published As

Publication number Publication date
JPH0417690B2 (cs) 1992-03-26

Similar Documents

Publication Publication Date Title
JPWO2000009258A1 (ja) フッ素含有化合物を含む排ガスの処理方法及び装置
US11325851B2 (en) Diluted chemical liquid production apparatus capable of controlling pH and oxidation-reduction potential
JP6255471B1 (ja) シリカ粒子分散液及びその製造方法
EP3389083B1 (en) Use of wet etching composition for wet etching of semiconductor substrate having si layer and sin layer
TW200517483A (en) Cerium salt and fabricating method thereof, cerium oxide and cerium polishing agent
US11027974B2 (en) Removal of moisture from hydrazine
CA2669854A1 (en) Process for isolating n2o
JPS60125229A (ja) 排ガスの高度処理方法
JP2011121805A (ja) オゾンガスに含まれる窒素酸化物および水分の除去方法
JP2000288342A (ja) 排ガスの浄化方法及び浄化装置
JP2587860B2 (ja) オゾン発生方法
JP2013180931A (ja) オゾンガスに含まれる窒素酸化物除去用吸着剤の前処理方法と窒素酸化物除去用吸着剤および前処理装置。
JPH0417689B2 (cs)
JP2001079376A (ja) ガス溶解水の調製方法
US20070078055A1 (en) Method of stabilizing catalyst
TWI900891B (zh) 廢水的處理方法
JP2001149947A (ja) 高純度オゾン水製造装置
JPS62213822A (ja) アルシン含有ガスの処理方法
JP6941424B2 (ja) モノメチルヒドラジンガスの精製方法
KR102496171B1 (ko) 황화수소를 불순물로 포함하는 황화카르보닐 가스를 정제하는 방법
JP2018127383A (ja) アンモニア水溶液の製造装置及びアンモニア水溶液の製造方法
JPH11181493A (ja) 電子材料用洗浄水
JPS63141628A (ja) シラン類の除去方法
JP3292311B2 (ja) メタノールの精製方法
JP2025028370A (ja) オゾン含有窒素ガスおよびオゾン含有窒素ガスの製造方法