JPS60125228A - 排ガスの高度処理方法 - Google Patents

排ガスの高度処理方法

Info

Publication number
JPS60125228A
JPS60125228A JP58230585A JP23058583A JPS60125228A JP S60125228 A JPS60125228 A JP S60125228A JP 58230585 A JP58230585 A JP 58230585A JP 23058583 A JP23058583 A JP 23058583A JP S60125228 A JPS60125228 A JP S60125228A
Authority
JP
Japan
Prior art keywords
acid
gas
exhaust gas
silane
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58230585A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0417689B2 (cs
Inventor
Jun Saito
純 斉藤
Takatoshi Mitsuishi
三ツ石　隆俊
Hiroshi Waki
脇　浩
Hiroji Miyagawa
博治 宮川
Hiroshige Amita
裕茂 網田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP58230585A priority Critical patent/JPS60125228A/ja
Publication of JPS60125228A publication Critical patent/JPS60125228A/ja
Publication of JPH0417689B2 publication Critical patent/JPH0417689B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
JP58230585A 1983-12-08 1983-12-08 排ガスの高度処理方法 Granted JPS60125228A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58230585A JPS60125228A (ja) 1983-12-08 1983-12-08 排ガスの高度処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58230585A JPS60125228A (ja) 1983-12-08 1983-12-08 排ガスの高度処理方法

Publications (2)

Publication Number Publication Date
JPS60125228A true JPS60125228A (ja) 1985-07-04
JPH0417689B2 JPH0417689B2 (cs) 1992-03-26

Family

ID=16910044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58230585A Granted JPS60125228A (ja) 1983-12-08 1983-12-08 排ガスの高度処理方法

Country Status (1)

Country Link
JP (1) JPS60125228A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02102712A (ja) * 1988-08-23 1990-04-16 Huels Ag シラン含有排ガスからのシラン化合物の除去方法
KR950031187A (ko) * 1994-05-26 1995-12-18 시미즈 슘뻬이 산성 배가스의 처리방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02102712A (ja) * 1988-08-23 1990-04-16 Huels Ag シラン含有排ガスからのシラン化合物の除去方法
KR950031187A (ko) * 1994-05-26 1995-12-18 시미즈 슘뻬이 산성 배가스의 처리방법

Also Published As

Publication number Publication date
JPH0417689B2 (cs) 1992-03-26

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