JPS60124932A - 薄膜蒸着装置 - Google Patents

薄膜蒸着装置

Info

Publication number
JPS60124932A
JPS60124932A JP23558383A JP23558383A JPS60124932A JP S60124932 A JPS60124932 A JP S60124932A JP 23558383 A JP23558383 A JP 23558383A JP 23558383 A JP23558383 A JP 23558383A JP S60124932 A JPS60124932 A JP S60124932A
Authority
JP
Japan
Prior art keywords
substrate
thin film
cluster
vacuum chamber
cluster ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23558383A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0215630B2 (OSRAM
Inventor
Kenichiro Yamanishi
山西　健一郎
Akira Nushihara
主原　昭
Yoshifumi Minowa
美濃和　芳文
Tateo Motoyoshi
本吉　健郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP23558383A priority Critical patent/JPS60124932A/ja
Publication of JPS60124932A publication Critical patent/JPS60124932A/ja
Publication of JPH0215630B2 publication Critical patent/JPH0215630B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/221—Ion beam deposition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP23558383A 1983-12-12 1983-12-12 薄膜蒸着装置 Granted JPS60124932A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23558383A JPS60124932A (ja) 1983-12-12 1983-12-12 薄膜蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23558383A JPS60124932A (ja) 1983-12-12 1983-12-12 薄膜蒸着装置

Publications (2)

Publication Number Publication Date
JPS60124932A true JPS60124932A (ja) 1985-07-04
JPH0215630B2 JPH0215630B2 (OSRAM) 1990-04-12

Family

ID=16988141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23558383A Granted JPS60124932A (ja) 1983-12-12 1983-12-12 薄膜蒸着装置

Country Status (1)

Country Link
JP (1) JPS60124932A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11446714B2 (en) * 2015-03-30 2022-09-20 Tokyo Electron Limited Processing apparatus and processing method, and gas cluster generating apparatus and gas cluster generating method
US11772138B2 (en) 2015-03-30 2023-10-03 Tokyo Electron Limited Processing apparatus and processing method, and gas cluster generating apparatus and gas cluster generating method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11446714B2 (en) * 2015-03-30 2022-09-20 Tokyo Electron Limited Processing apparatus and processing method, and gas cluster generating apparatus and gas cluster generating method
US11772138B2 (en) 2015-03-30 2023-10-03 Tokyo Electron Limited Processing apparatus and processing method, and gas cluster generating apparatus and gas cluster generating method

Also Published As

Publication number Publication date
JPH0215630B2 (OSRAM) 1990-04-12

Similar Documents

Publication Publication Date Title
JPS6353259A (ja) 薄膜形成方法
JP2501828B2 (ja) 薄膜蒸着装置
JPH089774B2 (ja) 薄膜形成装置
JPS60124932A (ja) 薄膜蒸着装置
JPS60125368A (ja) 薄膜蒸着装置
JPS60124931A (ja) 薄膜蒸着装置
JPS60124915A (ja) 薄膜蒸着装置
JPS6386863A (ja) 薄膜製造装置
JPS6320820A (ja) 薄膜蒸着装置
JPH0351087B2 (OSRAM)
JPS60125367A (ja) 薄膜蒸着装置
JPS60124930A (ja) 薄膜蒸着装置
JPS60158619A (ja) 薄膜蒸着装置
JPS6215815A (ja) 薄膜蒸着装置
JPS60124913A (ja) 薄膜蒸着装置
JPS6274070A (ja) 薄膜蒸着装置
JPS6329925A (ja) 化合物薄膜形成装置
JPS60124929A (ja) 薄膜蒸着装置
JPH05339720A (ja) 薄膜形成装置
JPH0215629B2 (OSRAM)
JPS6218019A (ja) 薄膜蒸着装置
JPS63133518A (ja) 蒸着装置
JPS60124916A (ja) 薄膜蒸着装置
JPS60124923A (ja) 薄膜蒸着装置
JPS62260053A (ja) 化合物薄膜蒸着装置