JPS60124878A - 歪センサ - Google Patents

歪センサ

Info

Publication number
JPS60124878A
JPS60124878A JP58232499A JP23249983A JPS60124878A JP S60124878 A JPS60124878 A JP S60124878A JP 58232499 A JP58232499 A JP 58232499A JP 23249983 A JP23249983 A JP 23249983A JP S60124878 A JPS60124878 A JP S60124878A
Authority
JP
Japan
Prior art keywords
strain
layer
thin film
multilayer thin
film layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58232499A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0447763B2 (enrdf_load_html_response
Inventor
Masahiro Kume
昌宏 粂
Koji Takada
高田　皓司
Nobuhiko Fujita
藤田　順彦
Akira Doi
陽 土居
Akira Otsuka
昭 大塚
Hajime Ichiyanagi
一柳　肇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP58232499A priority Critical patent/JPS60124878A/ja
Publication of JPS60124878A publication Critical patent/JPS60124878A/ja
Publication of JPH0447763B2 publication Critical patent/JPH0447763B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Pressure Sensors (AREA)
JP58232499A 1983-12-08 1983-12-08 歪センサ Granted JPS60124878A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58232499A JPS60124878A (ja) 1983-12-08 1983-12-08 歪センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58232499A JPS60124878A (ja) 1983-12-08 1983-12-08 歪センサ

Publications (2)

Publication Number Publication Date
JPS60124878A true JPS60124878A (ja) 1985-07-03
JPH0447763B2 JPH0447763B2 (enrdf_load_html_response) 1992-08-04

Family

ID=16940280

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58232499A Granted JPS60124878A (ja) 1983-12-08 1983-12-08 歪センサ

Country Status (1)

Country Link
JP (1) JPS60124878A (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01242901A (ja) * 1988-03-25 1989-09-27 Ishida Scales Mfg Co Ltd 荷重検出用ひずみゲージ構造
WO2007052800A1 (ja) * 2005-11-07 2007-05-10 Rohm Co., Ltd. 半導体圧力センサ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55113381A (en) * 1979-02-23 1980-09-01 Hitachi Ltd Semiconductor displacement transducer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55113381A (en) * 1979-02-23 1980-09-01 Hitachi Ltd Semiconductor displacement transducer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01242901A (ja) * 1988-03-25 1989-09-27 Ishida Scales Mfg Co Ltd 荷重検出用ひずみゲージ構造
WO2007052800A1 (ja) * 2005-11-07 2007-05-10 Rohm Co., Ltd. 半導体圧力センサ

Also Published As

Publication number Publication date
JPH0447763B2 (enrdf_load_html_response) 1992-08-04

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