JPS60119793A - スル−ホ−ル形成方法 - Google Patents

スル−ホ−ル形成方法

Info

Publication number
JPS60119793A
JPS60119793A JP22677083A JP22677083A JPS60119793A JP S60119793 A JPS60119793 A JP S60119793A JP 22677083 A JP22677083 A JP 22677083A JP 22677083 A JP22677083 A JP 22677083A JP S60119793 A JPS60119793 A JP S60119793A
Authority
JP
Japan
Prior art keywords
hole
etching
forming
holes
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22677083A
Other languages
English (en)
Japanese (ja)
Other versions
JPH04600B2 (enExample
Inventor
恒次　秀起
章宏 高木
森屋　邦夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP22677083A priority Critical patent/JPS60119793A/ja
Publication of JPS60119793A publication Critical patent/JPS60119793A/ja
Publication of JPH04600B2 publication Critical patent/JPH04600B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
JP22677083A 1983-12-02 1983-12-02 スル−ホ−ル形成方法 Granted JPS60119793A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22677083A JPS60119793A (ja) 1983-12-02 1983-12-02 スル−ホ−ル形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22677083A JPS60119793A (ja) 1983-12-02 1983-12-02 スル−ホ−ル形成方法

Publications (2)

Publication Number Publication Date
JPS60119793A true JPS60119793A (ja) 1985-06-27
JPH04600B2 JPH04600B2 (enExample) 1992-01-08

Family

ID=16850334

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22677083A Granted JPS60119793A (ja) 1983-12-02 1983-12-02 スル−ホ−ル形成方法

Country Status (1)

Country Link
JP (1) JPS60119793A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6318697A (ja) * 1986-07-11 1988-01-26 日本電気株式会社 多層配線基板

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6318697A (ja) * 1986-07-11 1988-01-26 日本電気株式会社 多層配線基板

Also Published As

Publication number Publication date
JPH04600B2 (enExample) 1992-01-08

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