JPS60119793A - スル−ホ−ル形成方法 - Google Patents
スル−ホ−ル形成方法Info
- Publication number
- JPS60119793A JPS60119793A JP22677083A JP22677083A JPS60119793A JP S60119793 A JPS60119793 A JP S60119793A JP 22677083 A JP22677083 A JP 22677083A JP 22677083 A JP22677083 A JP 22677083A JP S60119793 A JPS60119793 A JP S60119793A
- Authority
- JP
- Japan
- Prior art keywords
- hole
- etching
- forming
- holes
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 21
- 238000005530 etching Methods 0.000 claims description 19
- 238000003486 chemical etching Methods 0.000 claims description 8
- 238000001020 plasma etching Methods 0.000 claims description 8
- 229920000620 organic polymer Polymers 0.000 claims description 3
- 210000004907 gland Anatomy 0.000 claims 1
- 229920001721 polyimide Polymers 0.000 description 11
- 239000004020 conductor Substances 0.000 description 9
- 239000009719 polyimide resin Substances 0.000 description 9
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000002120 nanofilm Substances 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 241001300059 Theba Species 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Production Of Multi-Layered Print Wiring Board (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22677083A JPS60119793A (ja) | 1983-12-02 | 1983-12-02 | スル−ホ−ル形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22677083A JPS60119793A (ja) | 1983-12-02 | 1983-12-02 | スル−ホ−ル形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60119793A true JPS60119793A (ja) | 1985-06-27 |
| JPH04600B2 JPH04600B2 (enrdf_load_html_response) | 1992-01-08 |
Family
ID=16850334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22677083A Granted JPS60119793A (ja) | 1983-12-02 | 1983-12-02 | スル−ホ−ル形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60119793A (enrdf_load_html_response) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6318697A (ja) * | 1986-07-11 | 1988-01-26 | 日本電気株式会社 | 多層配線基板 |
-
1983
- 1983-12-02 JP JP22677083A patent/JPS60119793A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6318697A (ja) * | 1986-07-11 | 1988-01-26 | 日本電気株式会社 | 多層配線基板 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04600B2 (enrdf_load_html_response) | 1992-01-08 |
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