JPS60119505A - Production of color filter - Google Patents
Production of color filterInfo
- Publication number
- JPS60119505A JPS60119505A JP58227419A JP22741983A JPS60119505A JP S60119505 A JPS60119505 A JP S60119505A JP 58227419 A JP58227419 A JP 58227419A JP 22741983 A JP22741983 A JP 22741983A JP S60119505 A JPS60119505 A JP S60119505A
- Authority
- JP
- Japan
- Prior art keywords
- film
- color
- pigment
- color filter
- base plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
- H01J9/233—Manufacture of photoelectric screens or charge-storage screens
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Optical Filters (AREA)
Abstract
Description
【発明の詳細な説明】 〔技術分野〕 本発明は、カラー・フィルターの製造方法に関する。[Detailed description of the invention] 〔Technical field〕 The present invention relates to a method of manufacturing a color filter.
従来、カラー・フィルターは、ガラスまたはプラスチッ
ク・フィルム基板上にゼラチン膜を塗布し、該ゼラチン
膜にホト・リゾグラフィー処理と染色処理とにより部分
着色を繰り返して、例えば３原色のカラー・フィルター
を製造するのが通例であった。Conventionally, color filters have been produced by coating a gelatin film on a glass or plastic film substrate, and repeating partial coloring of the gelatin film through photolithography and dyeing to produce, for example, three primary color color filters. It was customary to do so.
しかし、上記従来技術によると、吸水、酸化等によりカ
ラー・フィルターの色特性が除々に劣化するという欠点
があった。However, the above-mentioned prior art has the disadvantage that the color characteristics of the color filter gradually deteriorate due to water absorption, oxidation, and the like.
本発明は上記従来技術の欠点をなくし、色劣化のないカ
ラー・フィルターの製造方法を提供する事を目的とする
。It is an object of the present invention to eliminate the drawbacks of the above-mentioned conventional techniques and to provide a method for manufacturing a color filter without color deterioration.
上記目的を達成するための本発明の基本的な構成は、カ
ラー・フィルターの製造方法において、ガラス基板ある
いはプラスチック基板上には高周波スパッタ法により無
機化合物からなる顔料膜が形成されて成ることを特徴と
する。The basic structure of the present invention for achieving the above object is that, in a method of manufacturing a color filter, a pigment film made of an inorganic compound is formed on a glass substrate or a plastic substrate by high-frequency sputtering. shall be.
以下、実施例により本発明を詳述する。 Hereinafter, the present invention will be explained in detail with reference to Examples.
第１図乃至ム）３図は本発明によるカラー・フィルター
の製造工程を示す。すなわち、ガラス基板１の表面には
、ホトレジスト膜２を塗布し、ホト・リゾダラフィー技
術により一部分を窓開けして、顔料をターゲットにした
スパッタ法により顔料膜３を形成し、その後、ソフト−
オフ法によりホトレジスト膜２と該ホトレジスト膜２上
の顔料膜を除去するという工程を６回繰り返して、３原
色（Ｒ，Ｇ、Ｂ）の顔料膜を形成する。Figures 1 to 3 show the manufacturing process of a color filter according to the present invention. That is, a photoresist film 2 is applied to the surface of a glass substrate 1, a window is opened in a part by photolithography technology, and a pigment film 3 is formed by sputtering using a pigment as a target.
The process of removing the photoresist film 2 and the pigment film on the photoresist film 2 by the off method is repeated six times to form pigment films of the three primary colors (R, G, B).
顔料としては、ベンガラ（’Ｉ’２０３ ：赤）、酸化
クロム（Ｏｒ ２ ’０３ ：緑）、コバルト・ブルー
（ＣｏＯ，ｎＡ１□０３：青）等の無機化合物をバイン
ダーで固めて高周波スパッタ用のターゲットにしたもの
や、一般に色ガラスといわれているものをそのままター
ゲットにしても良く、更に、宝石類や陶器類の着色物や
着色剤をターゲットにしても良い。As pigments, inorganic compounds such as red iron ('I'203: red), chromium oxide (Or2'03: green), and cobalt blue (CoO, nA1□03: blue) are hardened with a binder and used for high-frequency sputtering. The target may be used as a target, or what is generally called colored glass may be used as a target. Furthermore, colored objects or colorants of jewelry or pottery may be used as a target.
本発明の如く、無機化合物による顔料等をスパッタ法に
よりカラー・フィルターを製造することにより、吸水、
酸化による色特性の劣化がなくなる効果がある。As in the present invention, water absorption,
It has the effect of eliminating deterioration of color characteristics due to oxidation.
第１図乃至第３図は本発明によるカラー・フィルターの
＠造工程を示す工程毎の図である。
１・・・・・・・・・ガラス基板
２・・・・・・・・・ホトレジスト膜
３・・・・・・・・・顔料膜
Ｒ，Ｇ、Ｂ・・・・・・３原色顔料膜
以 上
出願人 株式会社諏訪精工舎
代理人 弁理士 最上 務1 to 3 are diagrams showing each step of the manufacturing process of a color filter according to the present invention. 1...Glass substrate 2...Photoresist film 3...Pigment film R, G, B...3 primary color pigments Applicant Suwa Seikosha Co., Ltd. Agent Patent Attorney Tsutomu Mogami
Claims (1)
ッタ法により無機化合物からなる顔料膜が形成されて成
ることを特徴とするカラー・フィルターの製造方法。A method for producing a color filter, characterized in that a pigment film made of an inorganic compound is formed on a glass substrate or a plastic substrate by high-frequency sputtering.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58227419A JPS60119505A (en) | 1983-12-01 | 1983-12-01 | Production of color filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58227419A JPS60119505A (en) | 1983-12-01 | 1983-12-01 | Production of color filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60119505A true JPS60119505A (en) | 1985-06-27 |
Family
ID=16860542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58227419A Pending JPS60119505A (en) | 1983-12-01 | 1983-12-01 | Production of color filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60119505A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6433503A (en) * | 1987-07-29 | 1989-02-03 | Matsushita Electric Ind Co Ltd | Production of colored pattern |
-
1983
- 1983-12-01 JP JP58227419A patent/JPS60119505A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6433503A (en) * | 1987-07-29 | 1989-02-03 | Matsushita Electric Ind Co Ltd | Production of colored pattern |
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