JPS60116152A - Manufacture of sealed hybrid ic - Google Patents

Manufacture of sealed hybrid ic

Info

Publication number
JPS60116152A
JPS60116152A JP22530083A JP22530083A JPS60116152A JP S60116152 A JPS60116152 A JP S60116152A JP 22530083 A JP22530083 A JP 22530083A JP 22530083 A JP22530083 A JP 22530083A JP S60116152 A JPS60116152 A JP S60116152A
Authority
JP
Japan
Prior art keywords
film
resin
hybrid
sealed
curing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22530083A
Other languages
Japanese (ja)
Inventor
Shinobu Ikeno
池野 忍
Taro Fukui
太郎 福井
Tsuyoshi Imazu
今津 強
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP22530083A priority Critical patent/JPS60116152A/en
Publication of JPS60116152A publication Critical patent/JPS60116152A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3121Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3157Partial encapsulation or coating
    • H01L23/3164Partial encapsulation or coating the coating being a foil
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector

Abstract

PURPOSE:To obtain a sealed hybrid IC which has uniform film and high reliability in moisture prevention and insulation by thermally contacting photocurable resin with the IC placing an electronic part and then curing by an ultraviolet ray. CONSTITUTION:As component of resin film, for example, methyl-methacrylate- acrylonitrile-acrylated gricydylacrylate copolymer, polymethylmethacrylate, epoxy acrylate, benzylmethylmethacrylate at the prescribed rate to form a film by a T-die method. A film is cut on a portion sealed with the hybrid IC substrate 2 placing a miniature molded transistor 1, the film is thermally softened and contacted with the substrate 1. Then, ultraviolet ray is emitted to cure the film. Thus, since the resin 3 is not introduced to the gap 4 which is not emitted by the light, uncured portion does not occur, and resin is not dropped to form irregular thickness.

Description

【発明の詳細な説明】 〔技術分野〕 この発明は、防湿絶縁処理された封止ハイブリッドIC
の製法に関する。
[Detailed Description of the Invention] [Technical Field] This invention relates to a sealed hybrid IC subjected to moisture-proof insulation treatment.
Concerning the manufacturing method.

〔背景技術〕[Background technology]

アルミナセラミック、ガラスエポキシ、紙フェノールな
どの基板上に回路を構成し、これに半心体チップやトラ
ンジスタ、あるいはコンデンサなどの各種の電子部品を
塔載しだノ・イブリッドICは、樹脂被覆処理をほどこ
さずに使用した場合、苛酷な環境下では、湿気、はこり
などの影響で、回路間の絶縁不良や導体の腐食あるいは
素子の劣化など、好ましくない現象が発生し易い。これ
らを防止する目的と、塔載された電子部品の補強を目的
として、ハイブリッドICの全体あるいは一部に防湿塗
料を塗布し、保膜膜を形成することが行なわれている。
Hybrid ICs, in which the circuit is constructed on a substrate made of alumina ceramic, glass epoxy, paper phenol, etc., and various electronic components such as semicircular chips, transistors, and capacitors are mounted on this, are coated with resin. If the device is used in a harsh environment, moisture and flakes can easily cause undesirable phenomena such as poor insulation between circuits, corrosion of conductors, and deterioration of elements. In order to prevent these problems and to reinforce mounted electronic components, a moisture-proof coating is applied to the whole or a part of the hybrid IC to form a film-retaining film.

従来、このような防湿塗料として、熱硬化性か光硬化性
あるいは光、熱併用硬化性の一液性または二液性の樹脂
フェノが使用されてきだが、それぞれ以下のような欠点
を有している。
Conventionally, one-component or two-component resin phenos that are thermosetting, photocurable, or a combination of light and heat curing have been used as moisture-proof paints, but each has the following drawbacks. There is.

すなわち、熱硬化性樹脂を使用した場合、樹脂を硬化さ
せるのに室温〜180℃の温度で30分から30時間を
要し、非常に生産性が悪かった。
That is, when a thermosetting resin is used, it takes 30 minutes to 30 hours at a temperature of room temperature to 180° C. to cure the resin, resulting in very poor productivity.

この点を改良すべく、防湿塗料として光硬化性樹脂を使
用した例が、特開昭58−42241号公報などに開示
されている。光硬化性樹脂を使用した場合、紫外線を数
秒から数分照射するだけで樹脂を硬化させることができ
るため、生産性は著しく向上する。しかし、一方で、た
とえば第1図に見るように、トランジスタなどの塔載部
品lと基板2との隙間部分、すなわち、光の届かない影
の部分4に樹脂3が入り込み、その樹脂が硬化しないと
いう問題が生じている。
In order to improve this point, an example in which a photocurable resin is used as a moisture-proof coating is disclosed in JP-A-58-42241 and other publications. When a photocurable resin is used, the resin can be cured by just irradiating it with ultraviolet light for a few seconds to a few minutes, which significantly improves productivity. However, on the other hand, as shown in FIG. 1, for example, the resin 3 gets into the gap between the mounted component l such as a transistor and the board 2, that is, the shadow part 4 where light cannot reach, and the resin does not harden. This problem has arisen.

そこで、上記のような問題を解決するために、熱重合開
始剤を併用して、光硬化性に加えて熱硬化性を付与した
ワニスも使用されているが、熱硬化に長時間を要すため
、光硬化性のもつ速硬化性という利点が損なわれるうえ
、光硬化設備に加えて熱硬化設備も必要となり、不経済
である。
Therefore, in order to solve the above problems, varnishes that are made thermosetting in addition to photocuring by using a thermal polymerization initiator are also used, but it takes a long time for thermosetting. Therefore, the advantage of quick curing that photocuring properties have is lost, and heat curing equipment is required in addition to photocuring equipment, which is uneconomical.

また、液状の熱硬化性および光硬化性樹脂には、共通し
て次のような欠点がある。す々わち、■液状上ツマーは
異臭があるうえ、人体に悪影響を与えるものが多く、作
業環境が良くない、■ワニスは引火爆発の危険性があり
、取扱いに注意を要する、といつだ作業上、公害上の問
題点の他に、■ワニスの垂れなどにより塗)戻の偏肉が
大きくなり、均一な塗1漢が望めないのである。
Furthermore, liquid thermosetting and photocuring resins have the following drawbacks in common. First of all, ■Liquid paints have a strange odor and often have a negative impact on the human body, making them a bad work environment.■Varnishes have the risk of flammability and explosion, so care must be taken when handling them. In addition to problems in terms of work and pollution, (1) varnish dripping causes unevenness in the thickness of the coating, making it impossible to achieve uniform coating.

〔発明の目的) この発りJは、上記の欠点を解消し、硬化速度が速く、
均一な塗I漢の得られる防湿絶縁処理された封止ハイブ
リッドICの製法を提供することを目的とする。
[Object of the invention] This starting material J eliminates the above-mentioned drawbacks, has a fast curing speed,
The purpose of the present invention is to provide a method for manufacturing a sealed hybrid IC that is moisture-proof and insulated and has a uniform coating.

〔発明の開示〕[Disclosure of the invention]

上記の目的を達成するために、この発明にかかる防湿絶
縁処理された封止ハイブリッドICの製法は、光硬化性
樹脂フィルムをハイブリッドICに加熱密着させて被膜
を形成し、紫外線照射により硬化させることを特徴とし
、このように、液状樹脂に代え熱軟化性の光硬化性樹脂
フィルムを用いることによって、無公害で作業環境の良
い工程のもとで、部分封止や片面封止をも容易に行なえ
るようにするとともに、絶縁処理の所要時間を大幅に短
縮しようとするものである。以下にこれを詳しく説明す
る。
In order to achieve the above object, the method for manufacturing a sealed hybrid IC subjected to moisture-proof insulation according to the present invention includes heating and adhering a photocurable resin film to a hybrid IC to form a film, and curing the film by irradiating ultraviolet rays. By using a heat-softening photocurable resin film instead of liquid resin, partial sealing and single-sided sealing can be easily performed in a pollution-free process with a good working environment. The aim is to significantly shorten the time required for insulation treatment. This will be explained in detail below.

この発明において用いられる熱軟化性の光硬化樹脂フィ
ルムは、紫外線を照射することによって重合硬化する(
対脂の中で、熱軟化温度が50°〜150°Cのもので
あればよく、その厚みを0.1問〜3厘程度とすること
が好ましい。以下に、か刀・る樹脂フィルムの成分と各
種原材料例を示す。
The heat-softening photocurable resin film used in this invention is polymerized and cured by irradiation with ultraviolet light (
Among the anti-fat materials, it is sufficient that the heat softening temperature is 50° to 150°C, and the thickness thereof is preferably about 0.1 to 3 cm. The components and various raw material examples of Kato-Ru resin film are shown below.

0元重合可能な樹脂; 分子末端もしくは側鎖に官能基まだは不飽和基をもつ分
子量が500〜10000位のもので、たとえば、エポ
キシアクリレート、ウレタンアクリレート、ブタジェン
アタリレート、ポリエステルアクリレート、不飽和ポリ
エステル樹脂などっ■上記■の樹脂と相溶性を有する線
状高分子化合物。
Resins capable of zero-component polymerization; those with a molecular weight of 500 to 10,000 that have a functional group or unsaturated group at the molecular end or side chain, such as epoxy acrylate, urethane acrylate, butadiene acrylate, polyester acrylate, unsaturated Polyester resin etc. ■ Linear polymer compound that is compatible with the resin described in ■ above.

メタクリル樹脂、メタクリル−スチレン共重合体、 ホ
IJスチレン、エチルセルロース、ホリヵーボネート、
炭化水素樹脂など。
Methacrylic resin, methacrylic-styrene copolymer, HoIJ styrene, ethyl cellulose, polycarbonate,
Hydrocarbon resin etc.

■光重合可能な七ツマ−; 単官能から4官能をもつ各種メタアクIJ l、/−ト
モノマーテ、)こトエば、トリメチロールプロパントリ
アクリレ−1−21,6−ヘキサンジオールジアタリレ
ートなど。
(2) Photopolymerizable monomers: Various monofunctional to tetrafunctional methacrylic monomers, such as trimethylolpropane triacrylate-1-21,6-hexanediol dialylate.

■光重合開始剤; ベンツイン゛rルギルエーテル、ベンジルジメチルケタ
ール、ベンゾフェノンなど。
■Photopolymerization initiator; benzyl dimethyl ether, benzyl dimethyl ketal, benzophenone, etc.

■熱重合禁止剤; ハイドロキノン、′カテコール、ベンゾキノンなど。■Thermal polymerization inhibitor; Hydroquinone, 'catechol, benzoquinone, etc.

上記の5成分のほかに、必要とあれば、顔料。In addition to the five ingredients listed above, add pigments if necessary.

染料または充てん剤などを含むことができる。It may contain dyes or fillers, etc.

以上のような各種の原材料を、混和機に−ダ)やミキサ
ーなどを用いてあらかじめ混合したのち、公知のフィル
ム化もしくはシート化の方法、たとえば、Tダイ法、イ
ンフレーション法、カレンダー法、キャヌティング法な
どによって、フィルムもしくはシートとする。フィルム
の厚みは、0. Inη未満だと封止能力および部品保
持能力が低く、厚い方は特に限定する必要はないが、む
やみに厚くすることは、コヌトおよび硬化性の点で不利
となるため、一応上限として3膜種度が望ましい。
The various raw materials mentioned above are mixed in advance using a mixer or a mixer, and then formed into a film or sheet by a known method such as T-die method, inflation method, calendar method, canuting method, etc. It is made into a film or sheet by such methods. The thickness of the film is 0. If it is less than Inη, the sealing ability and component holding ability will be low, and there is no need to specifically limit the thickness. degree is desirable.

次に、上記のようにして得られた軟化温度が50°〜1
50℃の光硬化性樹脂フィルムを用いて防湿絶縁孕れた
封止ハイブリッドICを製造する方法について説9Jす
る。
Next, the softening temperature obtained as described above is 50° to 1
A method for manufacturing a sealed hybrid IC containing moisture-proof insulation using a 50° C. photocurable resin film will be described in 9J.

まず、電子部品を塔載したハイブリッドICの封止した
い部分[上記のフィルムを切り取って置き、加熱してフ
ィルムを軟化浴融させ、部品および基板にフィルムを密
着させて均一な被膜を形成する。こののら、紫外線を照
射して被膜を硬化させる。
First, the part of the hybrid IC carrying electronic components that is to be sealed is cut out and placed, heated to melt the film in a softening bath, and adhered to the parts and substrate to form a uniform coating. After this, the film is cured by irradiation with ultraviolet light.

紫外線の光源としては、超高圧水銀灯、高圧水銀灯、低
圧水銀灯、カーボンアークランプ、キセノンアークラン
プ、メタルハライドランプなトラ使用することができる
。紫外線の強1Wは、特に限定されないが、硬化の作業
上:30〜160W/σのものが好ましい。1酎脂に対
して10〜20crnの距離から紫外線を照射すれば、
硬化は通常数秒内に完了する。しだがって、熱硬化性の
困脂を用いた従来法に比較して、d−るかに速い硬化が
達成されることになる。
As the ultraviolet light source, an ultra-high pressure mercury lamp, a high pressure mercury lamp, a low pressure mercury lamp, a carbon arc lamp, a xenon arc lamp, a metal halide lamp can be used. The strength of the ultraviolet rays (1 W) is not particularly limited, but from the standpoint of curing work: 30 to 160 W/σ is preferable. If you irradiate ultraviolet rays from a distance of 10 to 20 crn per 1 piece of fat,
Curing is usually complete within a few seconds. Therefore, much faster curing is achieved compared to conventional methods using thermosetting hardeners.

この発明にか〃・る樹脂封止では、高粘IWの10を詣
フィルムを用いているので、第2図に見るように、光の
当たらない1泉間部分4に樹1指3が浸入しないので、
未硬化部分の発生する恐れがない。まだ、l′il脂が
垂れて塗膜の厚みが不均一になる恐れもない。
In the resin sealing according to this invention, a highly viscous IW film is used, so as shown in FIG. Because I don't
There is no risk of uncured parts occurring. There is also no risk of l'il fat dripping and resulting in uneven coating film thickness.

ところで、基板2として、たとえば金属ペース基板が用
いられているような場合、金属面は放熱性を良くするた
めに、(V脂封止しない方が好ましい。しかし、液状樹
脂を使用した場合、通常用いら)しるディッピング法で
は、片面のみにm詣を塗布することは困難である。これ
に対し、この発明にかかる樹脂封止では、上でg明した
ように、フィルムを封止する部分の形状に合わせて切り
取って使用することができるので、部分封止や片面封止
に適しており、容易にこれを行なうことができる。
By the way, when a metal paste board is used as the substrate 2, it is preferable that the metal surface is not sealed with V resin (V resin) in order to improve heat dissipation. However, when liquid resin is used, In the Shishiru dipping method used, it is difficult to apply the mulch on only one side. On the other hand, in the resin sealing according to the present invention, as explained above, the film can be cut out according to the shape of the part to be sealed, so it is suitable for partial sealing or single-sided sealing. This can be done easily.

(実施例1) メチルメタクリレート−アクリロニトリル−アクリル化
グリシジルアクリV−ト共)!合体(モル比 65:1
0:25)・・・50部(重量部、以下同じ) ポリメチルメタクリレート・・・30部エポキシアクリ
レート・・・20部 ベンノルジメチルケタールH+ + 214(5以上の
組成からなる厚み200μmのフィルムをTダイ法によ
って作製し、軟化温度が80’Cのフィルムを得た。こ
のフィルムをハイブリッドICの片面上、つまり電子部
品搭載面に置き、130℃に加熱して部品および基板に
フィルムを密着させたのち、80 W/c*の高圧水銀
灯で15(至)の距離から20秒紫外線を照射し、被膜
を硬化させた。
(Example 1) Methyl methacrylate-acrylonitrile-acrylated glycidyl acrylate)! Coalescence (molar ratio 65:1
0:25)...50 parts (parts by weight, same below) Polymethyl methacrylate...30 parts Epoxy acrylate...20 parts Bennoldimethyl ketal H+ + 214 (A 200 μm thick film with a composition of 5 or more A film was produced using the T-die method and had a softening temperature of 80'C.This film was placed on one side of the hybrid IC, that is, the electronic component mounting surface, and heated to 130°C to adhere the film to the components and board. Thereafter, the coating was cured by irradiating ultraviolet rays for 20 seconds from a distance of 15 minutes using an 80 W/c* high-pressure mercury lamp.

硬化完了後−ハイブリッドIC上に塔載された部品を取
り外したところ、部品と基板の約0.25調の隙間には
樹脂が浸入しておらず、液状樹脂の場合と異なり、(樹
脂の未硬化部分は存在しなかった。
After curing is completed - When the parts mounted on the hybrid IC are removed, the resin has not penetrated into the gap of about 0.25 between the parts and the board, and unlike in the case of liquid resin, (there is no residual resin). There were no hardened areas.

(実施例2) メチルメタクリレート−n−ブチルアクリレート共重合
体(モル比 90:l(H・・・60部エポキシアクリ
レート ・・・40部 ベンジルジメチルケタール・・・261鷺以上の組成か
らなるj!メみ500μmのフィルムをTターイ法によ
って作製し、軟化温度が70℃のフィルム1c得た。こ
のフィルム奮、実施例1と同様に、ハイブリッドICの
片IFJi上、つ°まり電子部品の塔載面に置き、13
0℃に加熱して部品および基板にフィルムを密着させた
のち、80W/cInの高圧水銀灯で15σの距離から
20秒紫外線を照射し、被膜を硬化させた。
(Example 2) Methyl methacrylate-n-butyl acrylate copolymer (mole ratio 90:l (H...60 parts Epoxy acrylate...40 parts Benzyl dimethyl ketal...261 or more) j! A film with a thickness of 500 μm was produced by the T-Tai method to obtain a film 1c with a softening temperature of 70°C.Similarly to Example 1, this film was applied on the IFJi piece of the hybrid IC, that is, on the mounting plate of the electronic component. Place it on the surface, 13
After heating the film to 0° C. to bring it into close contact with the parts and substrate, the film was cured by irradiating ultraviolet rays for 20 seconds from a distance of 15σ using an 80 W/cIn high-pressure mercury lamp.

硬化完了後、ハイブリッドICに塔載された部品を取り
外したところ、実施例1の結果と同様に、部品と基板と
の約0.25 amの隙間には樹脂が浸入しておらず、
液状樹脂の場合と異なり、樹脂の未硬化部分は存在しな
かった。
When the components mounted on the hybrid IC were removed after curing was completed, it was found that, similar to the results of Example 1, no resin had penetrated into the gap of about 0.25 am between the components and the board.
Unlike in the case of liquid resins, there were no uncured portions of resin.

C発明の効果〕 上に今だように、この発明の防湿絶縁処理された」!■
止ノ・イブリッドICの製法では、樹脂が光の当たらな
い隙間に浸入したり、塗布後に樹脂が垂れて塗1漠の厚
みを不均一にするようなことがないので、膜厚の均一な
信頼性の高い防湿絶縁を行なうことができる。また、こ
の製法では、部分封止や片面封止を容易に行なうことが
でき、硬化時間も大幅に短縮できるので、著しく生産性
を高めることができる。
C Effects of the Invention] The moisture-proof insulation treatment of this invention was applied to the top as it is now! ■
The manufacturing method for Stopno Hybrid IC prevents the resin from penetrating into gaps where light does not shine, or causing the resin to drip after application, resulting in uneven coating thickness, ensuring uniform film thickness. It is possible to provide highly moisture-proof insulation. Furthermore, with this manufacturing method, partial sealing and single-sided sealing can be easily performed, and the curing time can be significantly shortened, so that productivity can be significantly increased.

【図面の簡単な説明】[Brief explanation of drawings]

類1図は、従来例の断面図、第2図は、この発明にがが
る一実施を示し、フ・fルムを用いて防湿絶縁処理され
た回正ハイブリッドICの所面図である。 1・・・ミニモールドトランジヌタ 2・・・バーrノ
°リッドIC基板 3・・・被1漢愼脂 4・・・隙間
代理人 弁理士 松 木 武 彦 第2図 平糸ダ5省11韮I三−W4:(自発)1、事件の表示 昭和58年特R′噌S口S225300号2、発明の名
称 封止ハイブリッドICのm 3、?ili正をする者 事件との関1系 特許出願人 件 所 大阪府門真市犬字門Ω1048番地名 称(5
83)松下電工株式会社 代表1 代表叫帝役 小 林 郁 4、代理人 6、補正の対象 明♀111招 7、補正の内容 (1) 明細書第5頁第12行しこ「メタアク1Jレー
ト]とあるを、「(メタ)”?りIJレート」と−正す
る。
Fig. 1 is a cross-sectional view of a conventional example, and Fig. 2 is a top view of a regenerative hybrid IC which has been subjected to moisture-proof insulation treatment using a film, showing one embodiment of the present invention. 1...Mini mold transistor 2...Bar r no lid IC board 3...1 kanshin fat 4...Gap agent Patent attorney Takehiko Matsuki I3-W4: (Spontaneous) 1. Indication of the case 1983 Special R'S mouth S225300 No. 2. Name of invention sealed hybrid IC m3,? Seki 1 related to the case of a person who commits illicit righteousness Patent applicant Address: 1048 Inujimon Ω, Kadoma City, Osaka Prefecture Name (5)
83) Matsushita Electric Works Co., Ltd. Representative 1 Representative Screaming Emperor Iku Kobayashi 4 Agent 6 Subject of amendment Mei♀111 Invitation 7 Contents of amendment (1) Specification page 5 line 12 Shiko “Metaac 1J rate ] Is it "(meta)"? Correct, "IJ rate".

Claims (1)

【特許請求の範囲】[Claims] (1)光硬化性樹脂フィルムをノ・イブリッドICに加
熱密着させて破1漢を形成し、紫外線照射により硬化さ
せることを特徴とする防湿絶縁処理されたn止ハイブリ
ッドICの製法。
(1) A method for producing a hybrid IC treated with moisture-proof insulation, which is characterized by heat-adhering a photocurable resin film to a non-hybrid IC to form a crack, and curing it by irradiation with ultraviolet rays.
JP22530083A 1983-11-28 1983-11-28 Manufacture of sealed hybrid ic Pending JPS60116152A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22530083A JPS60116152A (en) 1983-11-28 1983-11-28 Manufacture of sealed hybrid ic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22530083A JPS60116152A (en) 1983-11-28 1983-11-28 Manufacture of sealed hybrid ic

Publications (1)

Publication Number Publication Date
JPS60116152A true JPS60116152A (en) 1985-06-22

Family

ID=16827174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22530083A Pending JPS60116152A (en) 1983-11-28 1983-11-28 Manufacture of sealed hybrid ic

Country Status (1)

Country Link
JP (1) JPS60116152A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002003460A2 (en) * 2000-07-03 2002-01-10 Infineon Technologies Ag Semiconductor chip module with a protective film
EP1970953A1 (en) * 2007-03-10 2008-09-17 Klaus-Peter Bergmann Encapsulated electronic device and method for encapsulating an electronic device containing at least one electronic component

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002003460A2 (en) * 2000-07-03 2002-01-10 Infineon Technologies Ag Semiconductor chip module with a protective film
WO2002003460A3 (en) * 2000-07-03 2002-07-18 Infineon Technologies Ag Semiconductor chip module with a protective film
EP1970953A1 (en) * 2007-03-10 2008-09-17 Klaus-Peter Bergmann Encapsulated electronic device and method for encapsulating an electronic device containing at least one electronic component

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