JPS60114710A - 光ビ−ム面基準器 - Google Patents

光ビ−ム面基準器

Info

Publication number
JPS60114710A
JPS60114710A JP22295983A JP22295983A JPS60114710A JP S60114710 A JPS60114710 A JP S60114710A JP 22295983 A JP22295983 A JP 22295983A JP 22295983 A JP22295983 A JP 22295983A JP S60114710 A JPS60114710 A JP S60114710A
Authority
JP
Japan
Prior art keywords
light beam
plane
light
measured
reflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22295983A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0127366B2 (enExample
Inventor
Hiroyuki Uchida
宏之 内田
Hiroshi Sekiguchi
博司 関口
Kyoichi Miyashita
恭一 宮下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AASUNIKUSU KK
Earthnix Corp
Original Assignee
AASUNIKUSU KK
Earthnix Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AASUNIKUSU KK, Earthnix Corp filed Critical AASUNIKUSU KK
Priority to JP22295983A priority Critical patent/JPS60114710A/ja
Publication of JPS60114710A publication Critical patent/JPS60114710A/ja
Publication of JPH0127366B2 publication Critical patent/JPH0127366B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP22295983A 1983-11-25 1983-11-25 光ビ−ム面基準器 Granted JPS60114710A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22295983A JPS60114710A (ja) 1983-11-25 1983-11-25 光ビ−ム面基準器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22295983A JPS60114710A (ja) 1983-11-25 1983-11-25 光ビ−ム面基準器

Publications (2)

Publication Number Publication Date
JPS60114710A true JPS60114710A (ja) 1985-06-21
JPH0127366B2 JPH0127366B2 (enExample) 1989-05-29

Family

ID=16790559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22295983A Granted JPS60114710A (ja) 1983-11-25 1983-11-25 光ビ−ム面基準器

Country Status (1)

Country Link
JP (1) JPS60114710A (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5272747U (enExample) * 1975-11-26 1977-05-31

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5272747U (enExample) * 1975-11-26 1977-05-31

Also Published As

Publication number Publication date
JPH0127366B2 (enExample) 1989-05-29

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