JPH0127366B2 - - Google Patents
Info
- Publication number
- JPH0127366B2 JPH0127366B2 JP58222959A JP22295983A JPH0127366B2 JP H0127366 B2 JPH0127366 B2 JP H0127366B2 JP 58222959 A JP58222959 A JP 58222959A JP 22295983 A JP22295983 A JP 22295983A JP H0127366 B2 JPH0127366 B2 JP H0127366B2
- Authority
- JP
- Japan
- Prior art keywords
- light beam
- light
- reflector
- housing
- offset
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22295983A JPS60114710A (ja) | 1983-11-25 | 1983-11-25 | 光ビ−ム面基準器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22295983A JPS60114710A (ja) | 1983-11-25 | 1983-11-25 | 光ビ−ム面基準器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60114710A JPS60114710A (ja) | 1985-06-21 |
| JPH0127366B2 true JPH0127366B2 (enExample) | 1989-05-29 |
Family
ID=16790559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22295983A Granted JPS60114710A (ja) | 1983-11-25 | 1983-11-25 | 光ビ−ム面基準器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60114710A (enExample) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5272747U (enExample) * | 1975-11-26 | 1977-05-31 |
-
1983
- 1983-11-25 JP JP22295983A patent/JPS60114710A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60114710A (ja) | 1985-06-21 |
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