JPS60113370U - 化学気相蒸着装置 - Google Patents

化学気相蒸着装置

Info

Publication number
JPS60113370U
JPS60113370U JP119984U JP119984U JPS60113370U JP S60113370 U JPS60113370 U JP S60113370U JP 119984 U JP119984 U JP 119984U JP 119984 U JP119984 U JP 119984U JP S60113370 U JPS60113370 U JP S60113370U
Authority
JP
Japan
Prior art keywords
support
hole
holder
chemical vapor
support tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP119984U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6324121Y2 (en:Method
Inventor
梅森　道弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP119984U priority Critical patent/JPS60113370U/ja
Publication of JPS60113370U publication Critical patent/JPS60113370U/ja
Application granted granted Critical
Publication of JPS6324121Y2 publication Critical patent/JPS6324121Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP119984U 1984-01-09 1984-01-09 化学気相蒸着装置 Granted JPS60113370U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP119984U JPS60113370U (ja) 1984-01-09 1984-01-09 化学気相蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP119984U JPS60113370U (ja) 1984-01-09 1984-01-09 化学気相蒸着装置

Publications (2)

Publication Number Publication Date
JPS60113370U true JPS60113370U (ja) 1985-07-31
JPS6324121Y2 JPS6324121Y2 (en:Method) 1988-07-01

Family

ID=30473727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP119984U Granted JPS60113370U (ja) 1984-01-09 1984-01-09 化学気相蒸着装置

Country Status (1)

Country Link
JP (1) JPS60113370U (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014067983A (ja) * 2012-09-27 2014-04-17 Tokyo Electron Ltd 熱処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014067983A (ja) * 2012-09-27 2014-04-17 Tokyo Electron Ltd 熱処理装置
US9750087B2 (en) 2012-09-27 2017-08-29 Tokyo Electron Limited Heat treatment apparatus

Also Published As

Publication number Publication date
JPS6324121Y2 (en:Method) 1988-07-01

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