JPS60112266U - ホログラフイによる回折格子製作用露光装置 - Google Patents

ホログラフイによる回折格子製作用露光装置

Info

Publication number
JPS60112266U
JPS60112266U JP20226383U JP20226383U JPS60112266U JP S60112266 U JPS60112266 U JP S60112266U JP 20226383 U JP20226383 U JP 20226383U JP 20226383 U JP20226383 U JP 20226383U JP S60112266 U JPS60112266 U JP S60112266U
Authority
JP
Japan
Prior art keywords
point light
holography
light source
diffraction gratings
exposure equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20226383U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0317282Y2 (enrdf_load_stackoverflow
Inventor
岩橋　賢治
佐野　一雄
雅人 小池
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP20226383U priority Critical patent/JPS60112266U/ja
Publication of JPS60112266U publication Critical patent/JPS60112266U/ja
Application granted granted Critical
Publication of JPH0317282Y2 publication Critical patent/JPH0317282Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Holo Graphy (AREA)
JP20226383U 1983-12-30 1983-12-30 ホログラフイによる回折格子製作用露光装置 Granted JPS60112266U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20226383U JPS60112266U (ja) 1983-12-30 1983-12-30 ホログラフイによる回折格子製作用露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20226383U JPS60112266U (ja) 1983-12-30 1983-12-30 ホログラフイによる回折格子製作用露光装置

Publications (2)

Publication Number Publication Date
JPS60112266U true JPS60112266U (ja) 1985-07-30
JPH0317282Y2 JPH0317282Y2 (enrdf_load_stackoverflow) 1991-04-12

Family

ID=30764711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20226383U Granted JPS60112266U (ja) 1983-12-30 1983-12-30 ホログラフイによる回折格子製作用露光装置

Country Status (1)

Country Link
JP (1) JPS60112266U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0317282Y2 (enrdf_load_stackoverflow) 1991-04-12

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