JPS60102262U - 製造皿 - Google Patents
製造皿Info
- Publication number
- JPS60102262U JPS60102262U JP19261583U JP19261583U JPS60102262U JP S60102262 U JPS60102262 U JP S60102262U JP 19261583 U JP19261583 U JP 19261583U JP 19261583 U JP19261583 U JP 19261583U JP S60102262 U JPS60102262 U JP S60102262U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- manufacturing
- dish
- melt
- injection part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 238000000465 moulding Methods 0.000 claims description 4
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 3
- 239000000155 melt Substances 0.000 claims 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19261583U JPS60102262U (ja) | 1983-12-14 | 1983-12-14 | 製造皿 |
| DE8484302211T DE3466901D1 (en) | 1983-03-30 | 1984-03-30 | Method of fabricating polycrystalline silicon wafer and fabrication tray used therefor |
| EP84302211A EP0124284B1 (en) | 1983-03-30 | 1984-03-30 | Method of fabricating polycrystalline silicon wafer and fabrication tray used therefor |
| US06/926,131 US4820145A (en) | 1983-03-30 | 1986-11-03 | Polycrystalline silicon wafer tray |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19261583U JPS60102262U (ja) | 1983-12-14 | 1983-12-14 | 製造皿 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60102262U true JPS60102262U (ja) | 1985-07-12 |
| JPH0311214Y2 JPH0311214Y2 (enExample) | 1991-03-19 |
Family
ID=30414478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19261583U Granted JPS60102262U (ja) | 1983-03-30 | 1983-12-14 | 製造皿 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60102262U (enExample) |
-
1983
- 1983-12-14 JP JP19261583U patent/JPS60102262U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0311214Y2 (enExample) | 1991-03-19 |
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