JPS62186423U - - Google Patents
Info
- Publication number
- JPS62186423U JPS62186423U JP7541586U JP7541586U JPS62186423U JP S62186423 U JPS62186423 U JP S62186423U JP 7541586 U JP7541586 U JP 7541586U JP 7541586 U JP7541586 U JP 7541586U JP S62186423 U JPS62186423 U JP S62186423U
- Authority
- JP
- Japan
- Prior art keywords
- melt
- spacer
- substrate holder
- pitch
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 125000006850 spacer group Chemical group 0.000 claims description 6
- 239000007791 liquid phase Substances 0.000 claims description 5
- 239000000155 melt Substances 0.000 claims 6
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7541586U JPS62186423U (enExample) | 1986-05-20 | 1986-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7541586U JPS62186423U (enExample) | 1986-05-20 | 1986-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186423U true JPS62186423U (enExample) | 1987-11-27 |
Family
ID=30921531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7541586U Pending JPS62186423U (enExample) | 1986-05-20 | 1986-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186423U (enExample) |
-
1986
- 1986-05-20 JP JP7541586U patent/JPS62186423U/ja active Pending