JPS5997532A - 電気光学薄膜材料の製造方法 - Google Patents
電気光学薄膜材料の製造方法Info
- Publication number
- JPS5997532A JPS5997532A JP20455082A JP20455082A JPS5997532A JP S5997532 A JPS5997532 A JP S5997532A JP 20455082 A JP20455082 A JP 20455082A JP 20455082 A JP20455082 A JP 20455082A JP S5997532 A JPS5997532 A JP S5997532A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- electro
- optic
- target
- lanthanum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 239000000463 material Substances 0.000 title description 11
- 229910052746 lanthanum Inorganic materials 0.000 claims abstract description 13
- 239000002131 composite material Substances 0.000 claims abstract description 10
- 238000004544 sputter deposition Methods 0.000 claims abstract description 9
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 17
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 10
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 6
- 239000010936 titanium Substances 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 4
- 238000010849 ion bombardment Methods 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 3
- 238000000427 thin-film deposition Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 6
- 238000007740 vapor deposition Methods 0.000 abstract description 5
- 150000001875 compounds Chemical class 0.000 abstract 2
- 230000002349 favourable effect Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 8
- 239000000203 mixture Substances 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 5
- 239000013078 crystal Substances 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 229910003327 LiNbO3 Inorganic materials 0.000 description 1
- 240000002834 Paulownia tomentosa Species 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20455082A JPS5997532A (ja) | 1982-11-24 | 1982-11-24 | 電気光学薄膜材料の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20455082A JPS5997532A (ja) | 1982-11-24 | 1982-11-24 | 電気光学薄膜材料の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5997532A true JPS5997532A (ja) | 1984-06-05 |
| JPH0335247B2 JPH0335247B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-05-27 |
Family
ID=16492354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20455082A Granted JPS5997532A (ja) | 1982-11-24 | 1982-11-24 | 電気光学薄膜材料の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5997532A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53116499A (en) * | 1977-03-23 | 1978-10-11 | Sharp Corp | Preparing high dielectric thin film |
-
1982
- 1982-11-24 JP JP20455082A patent/JPS5997532A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53116499A (en) * | 1977-03-23 | 1978-10-11 | Sharp Corp | Preparing high dielectric thin film |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0335247B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-05-27 |
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