JPS5996264A - 連続真空蒸着装置 - Google Patents

連続真空蒸着装置

Info

Publication number
JPS5996264A
JPS5996264A JP20455382A JP20455382A JPS5996264A JP S5996264 A JPS5996264 A JP S5996264A JP 20455382 A JP20455382 A JP 20455382A JP 20455382 A JP20455382 A JP 20455382A JP S5996264 A JPS5996264 A JP S5996264A
Authority
JP
Japan
Prior art keywords
strip
plating
deposition
steel strip
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20455382A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0151544B2 (enExample
Inventor
Kenichi Yanagi
謙一 柳
Toshio Taguchi
田口 俊夫
Tetsuyoshi Wada
哲義 和田
Yoshimitsu Nakamura
中村 義満
Heizaburo Furukawa
古川 平三郎
Kanji Wake
和気 完治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP20455382A priority Critical patent/JPS5996264A/ja
Publication of JPS5996264A publication Critical patent/JPS5996264A/ja
Publication of JPH0151544B2 publication Critical patent/JPH0151544B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP20455382A 1982-11-24 1982-11-24 連続真空蒸着装置 Granted JPS5996264A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20455382A JPS5996264A (ja) 1982-11-24 1982-11-24 連続真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20455382A JPS5996264A (ja) 1982-11-24 1982-11-24 連続真空蒸着装置

Publications (2)

Publication Number Publication Date
JPS5996264A true JPS5996264A (ja) 1984-06-02
JPH0151544B2 JPH0151544B2 (enExample) 1989-11-06

Family

ID=16492393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20455382A Granted JPS5996264A (ja) 1982-11-24 1982-11-24 連続真空蒸着装置

Country Status (1)

Country Link
JP (1) JPS5996264A (enExample)

Also Published As

Publication number Publication date
JPH0151544B2 (enExample) 1989-11-06

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