JPS5995028U - 搬送装置 - Google Patents

搬送装置

Info

Publication number
JPS5995028U
JPS5995028U JP19004482U JP19004482U JPS5995028U JP S5995028 U JPS5995028 U JP S5995028U JP 19004482 U JP19004482 U JP 19004482U JP 19004482 U JP19004482 U JP 19004482U JP S5995028 U JPS5995028 U JP S5995028U
Authority
JP
Japan
Prior art keywords
conveyance
air duct
pressure air
conveyance device
platform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19004482U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6326343Y2 (enrdf_load_stackoverflow
Inventor
一郎 福渡
渡辺　清樹
Original Assignee
日立機電工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立機電工業株式会社 filed Critical 日立機電工業株式会社
Priority to JP19004482U priority Critical patent/JPS5995028U/ja
Publication of JPS5995028U publication Critical patent/JPS5995028U/ja
Application granted granted Critical
Publication of JPS6326343Y2 publication Critical patent/JPS6326343Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)
JP19004482U 1982-12-15 1982-12-15 搬送装置 Granted JPS5995028U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19004482U JPS5995028U (ja) 1982-12-15 1982-12-15 搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19004482U JPS5995028U (ja) 1982-12-15 1982-12-15 搬送装置

Publications (2)

Publication Number Publication Date
JPS5995028U true JPS5995028U (ja) 1984-06-28
JPS6326343Y2 JPS6326343Y2 (enrdf_load_stackoverflow) 1988-07-18

Family

ID=30409575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19004482U Granted JPS5995028U (ja) 1982-12-15 1982-12-15 搬送装置

Country Status (1)

Country Link
JP (1) JPS5995028U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006264939A (ja) * 2005-03-25 2006-10-05 Tokyo Electron Ltd 基板の搬送システムおよび基板の搬送方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5223831U (enrdf_load_stackoverflow) * 1975-08-06 1977-02-19
JPS5375683A (en) * 1976-12-17 1978-07-05 Hitachi Ltd Wafer transporting apparatus
JPS5748520A (en) * 1980-09-03 1982-03-19 Shinko Electric Co Ltd Stop method for carrier in conveyor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5223831U (enrdf_load_stackoverflow) * 1975-08-06 1977-02-19
JPS5375683A (en) * 1976-12-17 1978-07-05 Hitachi Ltd Wafer transporting apparatus
JPS5748520A (en) * 1980-09-03 1982-03-19 Shinko Electric Co Ltd Stop method for carrier in conveyor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006264939A (ja) * 2005-03-25 2006-10-05 Tokyo Electron Ltd 基板の搬送システムおよび基板の搬送方法

Also Published As

Publication number Publication date
JPS6326343Y2 (enrdf_load_stackoverflow) 1988-07-18

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