JPS5992517A - Method of producing aluminum electrode foil for electrolyticcondenser - Google Patents

Method of producing aluminum electrode foil for electrolyticcondenser

Info

Publication number
JPS5992517A
JPS5992517A JP20297482A JP20297482A JPS5992517A JP S5992517 A JPS5992517 A JP S5992517A JP 20297482 A JP20297482 A JP 20297482A JP 20297482 A JP20297482 A JP 20297482A JP S5992517 A JPS5992517 A JP S5992517A
Authority
JP
Japan
Prior art keywords
aluminum
etching
foil
surface area
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20297482A
Other languages
Japanese (ja)
Other versions
JPH0336289B2 (en
Inventor
本城 克彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP20297482A priority Critical patent/JPS5992517A/en
Publication of JPS5992517A publication Critical patent/JPS5992517A/en
Publication of JPH0336289B2 publication Critical patent/JPH0336289B2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は電解コンデンサ用アルミニウム電極箔の製造方
法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method for manufacturing aluminum electrode foil for electrolytic capacitors.

従来例の構成とその問題点 一般に、電解コンデンサ用アルミニウム電極箔は、圧延
加工した硬質アルミニウム箔や焼鈍処理した軟質アルミ
ニウム箔を塩化ナトリウムや塩酸などの塩素イオンを含
む水溶液中で、化学的また2ベーン は電気化学的なエツチングを行い、アルミニウム箔の表
面積拡大をはかった後化成処理を施こし、表面に誘電体
酸化皮膜を形成し製造される。
Structures of conventional examples and their problems In general, aluminum electrode foils for electrolytic capacitors are manufactured by subjecting rolled hard aluminum foils or annealed soft aluminum foils to chemical or chloride-containing aqueous solutions containing chlorine ions, such as sodium chloride or hydrochloric acid. Vanes are manufactured by electrochemically etching the aluminum foil to enlarge its surface area, and then applying a chemical conversion treatment to form a dielectric oxide film on the surface.

電解コンデンサ用アルミニウム電極箔の静電容量は、は
ぼアルミニウム箔の表面積に比例しているので、この表
面積拡大率が大きい程望ましい。
Since the capacitance of an aluminum electrode foil for an electrolytic capacitor is approximately proportional to the surface area of the aluminum foil, the larger the surface area expansion rate, the more desirable.

このエツチングによるアルミニウム箔の表面積拡大率は
エツチング量に比例して増大するが、ある限度を越える
と増加が鈍化し、やがて逆に減少の傾向を示す。また、
このエツチング量とともにアルミニウム箔の機械的強度
が低下するので、アルミニウム箔を過度にエツチングし
た場合にはエツチング、化成2組立などの電解コンデン
サ製造工程で切断などの事態が起る危険性がある。この
ようなことから、アルミニウム箔が電解コンデンサ製造
工程で切断などの事態の起らない程度の機械的強度を持
ち、できるだけ大きな表面積拡大率を持つように最適エ
ツチング量が決められている。
The surface area expansion rate of the aluminum foil due to this etching increases in proportion to the amount of etching, but beyond a certain limit, the increase slows down and eventually shows a tendency to decrease. Also,
The mechanical strength of the aluminum foil decreases with the amount of etching, so if the aluminum foil is excessively etched, there is a risk that it will break during electrolytic capacitor manufacturing processes such as etching and chemical 2 assembly. For these reasons, the optimum amount of etching is determined so that the aluminum foil has enough mechanical strength to prevent breakage during the manufacturing process of electrolytic capacitors and has as large a surface area expansion ratio as possible.

一方、アルミニウム電解コンデンサに対して、より小型
化、大容量化が望まれておシ、充分な機3ベーン 械的強度を持つ一定のエツチング量で現在よジさらに大
きな表面積拡大率を有するアルミニウム電極箔が切望さ
れ、多くの研究が行なわれている。
On the other hand, it is desired that aluminum electrolytic capacitors be made smaller and have a larger capacity.Currently, aluminum electrodes with sufficient mechanical strength and a certain amount of etching have a larger surface area expansion ratio. Foil is highly sought after and much research is being conducted.

発明の目的 本発明はこのような状況に鑑みて成されたもので、従来
よシ高い表面積大率を有する電解コンデンサ用アルミニ
ウム箔の製造方法を提供しようとするものである。
OBJECTS OF THE INVENTION The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a method for manufacturing aluminum foil for electrolytic capacitors having a higher surface area ratio than the conventional method.

発明の構成 本発明の電解コンデンサ用アルミニウム箔の製法方法は
、エツチング前のアルミニウム箔に酸素イオンを6×1
011〜5 X 10”’ケ/ crl イオン注入し
た後、200’C以下の温度範囲で熱処理し、その後、
塩素イオンを含む水溶液中で化学的あるいは電気化学的
にエツチングするものである。すなわち、上記のエツチ
ングを施こした後、さらに化成処理によって誘電体化成
皮膜を形成することにより、充分な機械的強度を有し、
単位面積当シの静電容量が従来より大きな電解コンデン
サ用アルミニウム電極箔を製造することができる。
Structure of the Invention The method for producing aluminum foil for electrolytic capacitors of the present invention is to apply oxygen ions to aluminum foil at 6×1 level before etching.
011~5 X 10'''/crl After ion implantation, heat treatment is performed in a temperature range of 200'C or less, and then,
Etching is carried out chemically or electrochemically in an aqueous solution containing chlorine ions. That is, after performing the above etching, a dielectric conversion film is further formed by chemical conversion treatment, so that it has sufficient mechanical strength.
It is possible to manufacture an aluminum electrode foil for an electrolytic capacitor that has a larger capacitance per unit area than conventional ones.

上述したように電解コンデンサ陽極用のアルミニウム箔
は、塩素イオンを含むと溶液中で化学的あるいは電気化
学的にエツチングすることによって表面積拡大をはかり
、化成して使用に供されるが、この表面積拡大率はアル
ミニウム箔の圧延加工、焼鈍、アルミニウム箔中の不純
物量、エツチング液組成、電解条件など多くの要因によ
って左右される。
As mentioned above, when aluminum foil for electrolytic capacitor anodes contains chlorine ions, it is chemically or electrochemically etched in a solution to increase its surface area and is chemically converted before use. The rate depends on many factors such as the rolling process of the aluminum foil, annealing, the amount of impurities in the aluminum foil, the composition of the etching solution, and the electrolytic conditions.

アルミニウムの塩素イオンを含む水溶液中でのエツチン
グは塩素イオンが表面吸着したエッチピット核に始まり
、エツチングの進行とともにアルミニウム箔の腐食は内
部へ孔食の形で行なわれ、次第に表面積が拡大していく
。この塩素イオンは、不純物あるいは圧延加工などによ
って生じた転位による表面酸化皮膜の弱点部分に優先的
に吸着し、エッチピット核となり、さらにエツチングは
転位にそって進行し、表面積の拡大が行われる。したが
って、より大きな表面積拡大にはこの転位がより多く、
均一に分散していることが必要である。
Etching of aluminum in an aqueous solution containing chlorine ions begins with etch pit nuclei where chlorine ions are adsorbed on the surface, and as etching progresses, corrosion of the aluminum foil occurs internally in the form of pitting corrosion, and the surface area gradually expands. . These chlorine ions preferentially adsorb to weak points in the surface oxide film due to impurities or dislocations caused by rolling, etc., forming etch pit nuclei, and further etching progresses along the dislocations, expanding the surface area. Therefore, a larger surface area expansion has more of this dislocation;
It is necessary that it is uniformly dispersed.

アルミニウム箔に酸素原子をイオン注入するこ5  l
(−ジ とは、結晶格子にひずみを与え、転位の増大と均一化を
はかるとともにアルミニウムの酸化皮膜を表面均一に形
成する効果を有する。一般に、電解コンデンサ用アルミ
ニウム箔は、アルミニウムに少量の数種の不純物を混入
し、溶解鋳造、圧延。
Ion implantation of oxygen atoms into aluminum foil
(-Di) has the effect of straining the crystal lattice, increasing and uniformizing dislocations, and forming an aluminum oxide film uniformly on the surface.In general, aluminum foil for electrolytic capacitors is made of aluminum with a small number of Mixed with seed impurities, melted, cast and rolled.

焼鈍などの工程によって製造される。含有された不純物
は主に表面近傍に析出してくるが、偏析が起り易く、均
一な分散は得られにくい。このため転位も不均一な分散
となっている。このことはエツチングによるエッチピッ
トの過密過疎部分の存在で判る。
Manufactured through processes such as annealing. The contained impurities mainly precipitate near the surface, but segregation is likely to occur and uniform dispersion is difficult to obtain. For this reason, dislocations are also non-uniformly distributed. This can be seen from the presence of overcrowded and depopulated areas in the etch pit due to etching.

本発明のイオン注入によって、アルミニウム箔中の転位
がより多く、均一に分散し、しかも、注入した酸素イオ
ンによりアルミニウム表面に酸化皮膜層が均一に形成さ
れることにより、エッチピットをよシ均一に発生させ、
表面積の拡大が計れる。イオン注入量はエツチングによ
る表面積拡大の効果の認められる最小量がその下限であ
り、上限はエッチピットの集中化による表面積拡大効果
への悪影響により限定される最大量である。すな6ペー
ジ わち、本発明はイオン注入量が5X10”〜6×101
3ケ/Caの範囲で表面積拡大の効果を示すもので、イ
オン注入量が下限未満の場合にはエツチングに対する影
響が認められず、上限を越えた場合には表面積拡大率は
減少する。
The ion implantation of the present invention allows more dislocations in the aluminum foil to be dispersed uniformly, and the implanted oxygen ions form an oxide film layer uniformly on the aluminum surface, making etch pits more uniform. generate,
Expansion of surface area can be measured. The lower limit of the ion implantation amount is the minimum amount at which the effect of enlarging the surface area by etching is recognized, and the upper limit is the maximum amount limited by the adverse effect on the effect of enlarging the surface area due to the concentration of etch pits. In other words, the present invention has an ion implantation amount of 5×10” to 6×101
The effect of increasing the surface area is shown within the range of 3 ions/Ca, and when the ion implantation amount is less than the lower limit, no effect on etching is observed, and when it exceeds the upper limit, the surface area expansion rate decreases.

イオン注入後は2oo℃以下の温度で熱処理するが、こ
の熱処理温度が200℃を越えると表面積拡大率は低下
し好ましくない。
After ion implantation, heat treatment is performed at a temperature of 200° C. or less, but if the heat treatment temperature exceeds 200° C., the surface area expansion rate decreases, which is not preferable.

その後のエツチングは従来と同様、塩素イオンを含む水
溶液中で行なわれ、通常は塩酸2食塩などの水溶液中で
0.1〜1A /ct/Iの電流密度60〜90℃の温
度で所定量エツチングされる。また、化成処理も従来と
同様な方法で行なわれる。なお、上記の熱処理とその後
のエツチングの間に箔の種類、箔の状態に応じて、圧延
、引張り等の機械的加工処理を行なうことがある。
The subsequent etching is carried out in an aqueous solution containing chlorine ions, as in the past, and is usually etched by a predetermined amount in an aqueous solution such as di-salt hydrochloric acid at a current density of 0.1 to 1 A/ct/I at a temperature of 60 to 90°C. be done. Further, the chemical conversion treatment is also performed in the same manner as in the conventional method. Note that, depending on the type of foil and the condition of the foil, mechanical processing such as rolling or stretching may be performed between the above heat treatment and the subsequent etching.

本発明によって得られた電解コンデンサ用アルミニウム
電極箔は、機械的強度、 tanδは従来のものに比へ
そん色なく、単位面積当りの静電容量は大きく、もれ電
流は小さいものであシ、アルミ7 ページ ニウム電解コンデンサの小型、大容量化が可能になる。
The aluminum electrode foil for electrolytic capacitors obtained by the present invention has mechanical strength and tan δ comparable to those of conventional ones, a large capacitance per unit area, and a small leakage current. Enables smaller size and larger capacity aluminum 7 page nium electrolytic capacitors.

実施例の説明 以下本発明を実施例にもとづき説明する。Description of examples The present invention will be explained below based on examples.

純度99.99 %、厚さ100μの高純度アルミニウ
ム箔試料の両面に酸素を1o10〜1016ケ/Caイ
オン注入した。次にこの試料を常温〜550℃の温度範
囲で60分間熱処理した後、20重量%の食塩水溶液中
で温度90℃、電流密度o、 a 5A /crtlで
4分間エツチングしくエツチング部分1 cm X 1
crn)、さらに硼酸1重量係の水溶液中で温度80℃
、化成電圧23Vの条件で化成した。得られた化成箔に
ついて、静電容量、 tanδ 、もれ電流を測定した
Oxygen ions were implanted at 1010 to 1016/Ca ions onto both sides of a high purity aluminum foil sample with a purity of 99.99% and a thickness of 100μ. Next, this sample was heat-treated for 60 minutes at a temperature range of room temperature to 550°C, and then etched in a 20% by weight saline solution at a temperature of 90°C, a current density of o, and a5A/crtl for 4 minutes to form an etched area of 1 cm x 1.
crn), and further at a temperature of 80°C in an aqueous solution containing 1 part by weight of boric acid.
, the chemical formation was carried out under the conditions of a formation voltage of 23V. The capacitance, tanδ, and leakage current of the obtained chemically formed foil were measured.

次表にエツチング時のエツチング量、化成後の静電容量
tanδ 、もれ電流を示した。なお、測定は6wt%
の硼酸アンモニウム水溶液中でSn箔を陰極とし、30
℃の温度で交流ブリッジにより120Hzで行なった。
The following table shows the amount of etching during etching, the capacitance tan δ after chemical formation, and the leakage current. In addition, the measurement is 6wt%
Sn foil was used as a cathode in an ammonium borate aqueous solution of 30
It was carried out at 120 Hz with an AC bridge at a temperature of .degree.

また、エツチング量は表面積拡大率2機械的強度と密接
な相関があるので、一定のエツチング量での比較をする
ための参考データとして示した。
Furthermore, since the amount of etching has a close correlation with the surface area expansion ratio 2 mechanical strength, it is shown as reference data for comparison at a constant amount of etching.

(以下余白) 9ベーン゛ 】 ] コ つ 寸 刀 〕 】 述 〕 刀 10ページ 上記表から明らかなように、アルミニウム箔に酸素イオ
ン注入することによって、エツチング時の有効表面積拡
大率が向上し、単位面積当りの静電容量が大きく、もれ
電流も小さく、しかもアルミニウム箔の機械的強度も従
来と同等の電解コンデンサ用アルミニウム電極箔が得ら
れる。
(blank space below) 9 vanes゛] ] Kotsusunto] ] Description] As is clear from the table above on page 10, by implanting oxygen ions into aluminum foil, the effective surface area expansion rate during etching is improved, and the unit An aluminum electrode foil for an electrolytic capacitor having a large capacitance per area, a small leakage current, and the same mechanical strength as conventional aluminum foils can be obtained.

発明の効果 以上のように、本発明による電解コンデンサ用アルミニ
ウム電極箔の製造方法は、エツチング前のアルミニウム
箔に酸素をイオン注入し、その後、塩素イオンを含む水
溶液中で化学的あるいは電気化学的にエツチングするこ
とを特徴とするものであり、この方法によって得た電解
コンデンサ用アルミニウム電極箔は、機械的強度は従来
のものに比べそん色なく、単位面積当りの静電容量を従
来のものより大きく、シかも、もれ電流を小さくするこ
とができるため、アルミニウム電解コンデンサの小型大
容量化が可能になり、実用上きわめて有効なものである
Effects of the Invention As described above, the method of manufacturing aluminum electrode foil for electrolytic capacitors according to the present invention involves implanting oxygen ions into the aluminum foil before etching, and then chemically or electrochemically implanting the aluminum foil in an aqueous solution containing chlorine ions. The aluminum electrode foil for electrolytic capacitors obtained by this method has the same mechanical strength as conventional foils, and has a higher capacitance per unit area than conventional foils. Moreover, since leakage current can be reduced, aluminum electrolytic capacitors can be made smaller and have larger capacities, which is extremely effective in practice.

Claims (1)

【特許請求の範囲】[Claims] アルミニウム箔に酸素イオンを6×1011〜6×10
13ケ/clイオン注入した後、200’C以下の温度
範囲で熱処理し、その後、塩素イオンを含む水溶液中で
化学的あるいは電気化学的にエツチングすることを特徴
とする電解コンデンサ用アルミニウム電極箔の製造方法
Oxygen ions on aluminum foil from 6 x 1011 to 6 x 10
An aluminum electrode foil for an electrolytic capacitor, which is characterized in that after implanting 13 ions/cl ions, it is heat treated in a temperature range of 200'C or less, and then chemically or electrochemically etched in an aqueous solution containing chloride ions. Production method.
JP20297482A 1982-11-18 1982-11-18 Method of producing aluminum electrode foil for electrolyticcondenser Granted JPS5992517A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20297482A JPS5992517A (en) 1982-11-18 1982-11-18 Method of producing aluminum electrode foil for electrolyticcondenser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20297482A JPS5992517A (en) 1982-11-18 1982-11-18 Method of producing aluminum electrode foil for electrolyticcondenser

Publications (2)

Publication Number Publication Date
JPS5992517A true JPS5992517A (en) 1984-05-28
JPH0336289B2 JPH0336289B2 (en) 1991-05-31

Family

ID=16466235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20297482A Granted JPS5992517A (en) 1982-11-18 1982-11-18 Method of producing aluminum electrode foil for electrolyticcondenser

Country Status (1)

Country Link
JP (1) JPS5992517A (en)

Also Published As

Publication number Publication date
JPH0336289B2 (en) 1991-05-31

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