JPS5987327A - Detector for infrared rays - Google Patents
Detector for infrared raysInfo
- Publication number
- JPS5987327A JPS5987327A JP57198198A JP19819882A JPS5987327A JP S5987327 A JPS5987327 A JP S5987327A JP 57198198 A JP57198198 A JP 57198198A JP 19819882 A JP19819882 A JP 19819882A JP S5987327 A JPS5987327 A JP S5987327A
- Authority
- JP
- Japan
- Prior art keywords
- window material
- shell
- glass
- sealing
- infrared detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims abstract description 27
- 239000011521 glass Substances 0.000 claims abstract description 13
- 238000007789 sealing Methods 0.000 claims abstract description 12
- 229910052783 alkali metal Inorganic materials 0.000 claims description 8
- 150000001340 alkali metals Chemical class 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 229910052681 coesite Inorganic materials 0.000 claims 1
- 229910052906 cristobalite Inorganic materials 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- 235000012239 silicon dioxide Nutrition 0.000 claims 1
- 229910052682 stishovite Inorganic materials 0.000 claims 1
- 229910052905 tridymite Inorganic materials 0.000 claims 1
- 239000000853 adhesive Substances 0.000 abstract description 4
- 230000001070 adhesive effect Effects 0.000 abstract description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 abstract description 2
- 238000005530 etching Methods 0.000 abstract description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- 229910052799 carbon Inorganic materials 0.000 abstract 1
- 239000003795 chemical substances by application Substances 0.000 abstract 1
- 238000001816 cooling Methods 0.000 abstract 1
- 229920001296 polysiloxane Polymers 0.000 abstract 1
- 239000011257 shell material Substances 0.000 description 14
- 239000005394 sealing glass Substances 0.000 description 5
- 238000001514 detection method Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000565 sealant Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000010583 slow cooling Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0831—Masks; Aperture plates; Spatial light modulators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
- G01J5/041—Mountings in enclosures or in a particular environment
- G01J5/045—Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
- G01J5/046—Materials; Selection of thermal materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0875—Windows; Arrangements for fastening thereof
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は焦電型赤外線検出素子をメタルキャン／？ ツ
ケージに封入してなる赤外線検出器に関する。[Detailed Description of the Invention] [Technical Field of the Invention] The present invention provides a pyroelectric infrared detection element using a metal can/? This invention relates to an infrared detector enclosed in a cage.
従来のこの種の赤外線検出器は第１図のように構成され
ている。１は例えばＴＯ−５メタルキヤンノ４ツケージ
であり、ステム１１とシェル１２とからなり、このパッ
クー・ゾ１内に焦電型赤外線検出素子２が気密に収容さ
れる。フェル１□の検出素子２の受光面に対向する位置
には受光窓３が設けられ、ここにはシリコン等の窓材４
が固着されている。A conventional infrared detector of this type is constructed as shown in FIG. Reference numeral 1 denotes, for example, a TO-5 metal can cage, which is composed of a stem 11 and a shell 12, and a pyroelectric infrared detecting element 2 is hermetically housed within this package 1. A light-receiving window 3 is provided at a position facing the light-receiving surface of the detection element 2 of the felt 1□, and a window material 4 made of silicon or the like is provided here.
is fixed.
ところで従来は窓材４とシェル１２０間が有機接着剤を
用いて封止されており、封止部の信頼性が十分でないと
いう問題があった。例えば、ＪＩＳ −Ｃ５０３０の温
度サイクルテスト（−２５℃←＋１２５℃）を行うとし
ばしば不良が発生する。これは、有機接着剤の疲労によ
り封止部の気密性が破れるという不良である。By the way, in the past, the window material 4 and the shell 120 were sealed using an organic adhesive, and there was a problem that the reliability of the sealing part was not sufficient. For example, when a JIS-C5030 temperature cycle test (-25°C←+125°C) is performed, defects often occur. This is a defect in which the airtightness of the sealing part is broken due to fatigue of the organic adhesive.
本発明は上記の点に鑑み、気密封止部の信頼性に優れた
赤外線検出器を提供することを目的とする。In view of the above points, an object of the present invention is to provide an infrared detector with excellent reliability of the hermetically sealed portion.
本発明は、第１図に示す基本構造の赤外線検出器におい
て、窓材４とシェル１２との間の封止を、有機接着剤に
代ってガラスで行ったことを特徴とする。The present invention is characterized in that, in the infrared detector having the basic structure shown in FIG. 1, the sealing between the window material 4 and the shell 12 is performed using glass instead of an organic adhesive.
封止用ガラスとしては、５ＩＯ２とＢ２０．を主成分と
し、かつアルカリ金属の含有量ｆ ２００ｐｐｍ以下に
抑えたものが望ましい。これは、窓材としてシリコンを
用いた場合、封止用ガラスからアルカリ金属が窓材に拡
散され、窓材中にアルカリ金属が一足竜以上含まれるよ
うになると、窓材の赤外線透過特性が劣化するためであ
る。As the sealing glass, 5IO2 and B20. It is desirable that the alkali metal content f be 200 ppm or less. This is because when silicon is used as a window material, alkali metals are diffused from the sealing glass into the window material, and if the window material contains more than one alkali metal, the infrared transmission properties of the window material deteriorate. This is to do so.
本発明によれば、窓材の封止部の信頼性が優れた赤外線
検出器を得ることができる。According to the present invention, it is possible to obtain an infrared detector with excellent reliability in the sealing portion of the window material.
本発明の一実施例における窓材とシェルの封止工程を第
２図（、）〜（ｄ）を参照して説明する。第２図（ａ）
ｋｌ例えばコノ々−ルを成形して受光窓１２を設けたシ
ェル１１を示している。このシェル１１を４００℃で１
０分加熱して第２図（ｂ）に示すように表面に酸化膜１
３を形成する。この後、第２図（ｃ）に示すように、シ
ェル１１の受光窓１２の周囲に封止剤としてのリング状
ガラス１４をおいてこの上にシリコンからなる窓材１５
を積ね、カーデンお先り１６を載せる。ガラス１４は５
ＩＯ２：Ｂ２０３＝５０：５０の成形品であり、内径が
受光窓１２の径と同じ６調、外径が６．８■、厚みが０
．２ ｍのリング体である。The process of sealing the window material and the shell in one embodiment of the present invention will be described with reference to FIGS. 2(a) to 2(d). Figure 2(a)
For example, a shell 11 is shown in which a light receiving window 12 is provided by molding a cone hole. This shell 11 was heated to 400°C.
After heating for 0 minutes, an oxide film 1 is formed on the surface as shown in Figure 2(b).
form 3. After that, as shown in FIG. 2(c), a ring-shaped glass 14 as a sealant is placed around the light-receiving window 12 of the shell 11, and a window material 15 made of silicon is placed on top of the ring-shaped glass 14 as a sealant.
Stack it and put 16 cards on it. Glass 14 is 5
It is a molded product with IO2:B203=50:50, the inner diameter is the same as the diameter of the light receiving window 12, 6 scales, the outer diameter is 6.8cm, and the thickness is 0.
．． It is a 2m ring.
またこのガラス１４のアルカリ金属含有量は３０ ｐｐ
ｍ以下である。この状態でＮ２ガス雰囲気中、７００℃
、３０分の加熱を行い、窓材１５をシェル１１に固着さ
せる。そして徐冷後、表面の酸化膜１３を希塩酸でエツ
チング除去し、第２図（ｄ）のようにシェル１１に窓材
１５を一体化した構造を得る。Furthermore, the alkali metal content of this glass 14 is 30 pp.
m or less. In this state, the temperature was 700°C in a N2 gas atmosphere.
The window material 15 is fixed to the shell 11 by heating for 30 minutes. After slow cooling, the oxide film 13 on the surface is removed by etching with dilute hydrochloric acid to obtain a structure in which the window material 15 is integrated with the shell 11 as shown in FIG. 2(d).
このようにして窓材１５を取付けたシェル１１とステム
を用い、第１図に示したように焦電型赤外線検出素子を
、４１ツケージングして完成する。パッケージ内にはＮ
２がスを気密に封入する。Using the shell 11 and the stem to which the window material 15 is attached in this way, a pyroelectric infrared detecting element is completed by 41 casing as shown in FIG. Inside the package is N.
2. Airtightly encapsulate the gas.
試作した赤外線検出器１００個について。About 100 prototype infrared detectors.
ＪＩＳ −Ｃ５０３０の温度サイクルテストを行ったれ
なかった。これは、封止用ガラスとしてアルカリ金属含
有量の低いものを用いたため窓材がアルカリ金属で汚染
されず、従って窓材の赤外線透過率低下がないことを意
味する。JIS-C5030 temperature cycle test was not conducted. This means that the window material is not contaminated with alkali metals because a glass with a low alkali metal content is used as the sealing glass, and therefore there is no decrease in the infrared transmittance of the window material.
なお本発明は上記実施例に限られるものではない。例え
ば封止用ガラスとしてＢ Ｓ ｉ０２とＢ２Ｏ５を主成
分とするものであれば、Ｂ２Ｏ３が４０〜９５％の範囲
で組成が変っても同様の効果が得られる。またガラス中
のアルカリ金属含有量ｎ ２ Ｑ Ｏｐｐｍ以下にすれ
ば、窓材の赤外線透過率低下を実用上支障のない範囲に
抑えることができる。また封止用ガラスの幅は実施例の
場合０、４ ｍとしたが、受光窓の内径が６ｆｉ程度の
ものでおれば０．２ ｍ以上の幅があれば十分でおる。Note that the present invention is not limited to the above embodiments. For example, if the sealing glass is mainly composed of BSi02 and B2O5, the same effect can be obtained even if the composition changes within the range of 40 to 95% B2O3. Furthermore, if the alkali metal content in the glass is n 2 Q Oppm or less, the decrease in the infrared transmittance of the window material can be suppressed to a range that does not cause any practical problems. Further, the width of the sealing glass was set to 0.4 m in the example, but if the inner diameter of the light receiving window is about 6 fi, a width of 0.2 m or more is sufficient.
更にがラス封止の工程は、Ｎ２ガスの他Ａｒガスや他の
中性もしくは酸性のガス雰囲気で行うこ５−
とができ、その温度条件も４００〜９００℃の範囲で選
択することができる。また、シェル材料として鉄−ニッ
ケル合金等、他の金属材料を用いた場合にも本発明は有
用である。Furthermore, the lath sealing process can be performed in an atmosphere of Ar gas or other neutral or acidic gas in addition to N2 gas, and the temperature conditions can be selected within the range of 400 to 900°C. . The present invention is also useful when other metal materials such as iron-nickel alloys are used as the shell material.
第１図は焦電型赤外線検出器の基本構造を示す図、第２
図（、）〜（ｄ）は本発明の一実施例におけるシェルと
窓材の封止工程を説明するための図である。
１・・・メタルキャンｉ＋ッケージ、１１・・・ステム
、１２・・・シェル、２・・・焦電型赤外線検出素子。
３・・・受光窓、４・・・窓材、１１・・・シェル、１
２・・・受光窓、１３・・・酸化膜、１４・・・ガラス
、１５・・・窓材、１６・・・カーデンおもり。Figure 1 shows the basic structure of a pyroelectric infrared detector, Figure 2 shows the basic structure of a pyroelectric infrared detector.
Figures (,) to (d) are diagrams for explaining the sealing process of the shell and window material in one embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Metal can i+ package, 11... Stem, 12... Shell, 2... Pyroelectric infrared detection element. 3... Light receiving window, 4... Window material, 11... Shell, 1
2...Light receiving window, 13...Oxide film, 14...Glass, 15...Window material, 16...Carden weight.
Claims (2)
位置に窓材を封止してなるメタルキャン／ぐヅケージに
気密に封入して構成された赤外線検出器において、前記
メタルキャンＡ？ッケージと窓材の間をガラスで封止し
たことを特徴とする赤外線検出器。(1) In an infrared detector configured by airtightly enclosing a pyroelectric infrared detecting element in a metal can/guzu cage formed by sealing a window material at a position opposite to its light receiving surface, the metal can A ? An infrared detector characterized by a glass seal between the package and the window material.
た、アルカリ金属含有量が２００ ｐｐｍ以下のもので
ある特許請求の範囲第１項記載の赤外線検出器。(2) The infrared detector according to claim 1, wherein the glass is mainly composed of SiO2 and B2O3 and has an alkali metal content of 200 ppm or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57198198A JPS5987327A (en) | 1982-11-11 | 1982-11-11 | Detector for infrared rays |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57198198A JPS5987327A (en) | 1982-11-11 | 1982-11-11 | Detector for infrared rays |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5987327A true JPS5987327A (en) | 1984-05-19 |
| JPH0129414B2 JPH0129414B2 (en) | 1989-06-09 |
Family
ID=16387099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57198198A Granted JPS5987327A (en) | 1982-11-11 | 1982-11-11 | Detector for infrared rays |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5987327A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993006444A1 (en) * | 1991-09-24 | 1993-04-01 | Nohmi Bosai Ltd. | Pyroelectric element |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4847390A (en) * | 1971-10-15 | 1973-07-05 |
-
1982
- 1982-11-11 JP JP57198198A patent/JPS5987327A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4847390A (en) * | 1971-10-15 | 1973-07-05 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993006444A1 (en) * | 1991-09-24 | 1993-04-01 | Nohmi Bosai Ltd. | Pyroelectric element |
| US5420426A (en) * | 1991-09-24 | 1995-05-30 | Nohmi Boasai Ltd. | Pyroelectric device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0129414B2 (en) | 1989-06-09 |
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