JPS598609A - 微結晶を含有するシリコン薄膜及びその製造方法 - Google Patents

微結晶を含有するシリコン薄膜及びその製造方法

Info

Publication number
JPS598609A
JPS598609A JP11478682A JP11478682A JPS598609A JP S598609 A JPS598609 A JP S598609A JP 11478682 A JP11478682 A JP 11478682A JP 11478682 A JP11478682 A JP 11478682A JP S598609 A JPS598609 A JP S598609A
Authority
JP
Japan
Prior art keywords
thin film
grid
silicon thin
amorphous
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11478682A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6367553B2 (enExample
Inventor
Kazunobu Tanaka
田中　一宜
Akihisa Matsuda
彰久 松田
Keiji Kumagai
熊谷　啓二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tonen General Sekiyu KK
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Toa Nenryo Kogyyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Toa Nenryo Kogyyo KK filed Critical Agency of Industrial Science and Technology
Priority to JP11478682A priority Critical patent/JPS598609A/ja
Publication of JPS598609A publication Critical patent/JPS598609A/ja
Publication of JPS6367553B2 publication Critical patent/JPS6367553B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
JP11478682A 1982-07-03 1982-07-03 微結晶を含有するシリコン薄膜及びその製造方法 Granted JPS598609A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11478682A JPS598609A (ja) 1982-07-03 1982-07-03 微結晶を含有するシリコン薄膜及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11478682A JPS598609A (ja) 1982-07-03 1982-07-03 微結晶を含有するシリコン薄膜及びその製造方法

Publications (2)

Publication Number Publication Date
JPS598609A true JPS598609A (ja) 1984-01-17
JPS6367553B2 JPS6367553B2 (enExample) 1988-12-26

Family

ID=14646643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11478682A Granted JPS598609A (ja) 1982-07-03 1982-07-03 微結晶を含有するシリコン薄膜及びその製造方法

Country Status (1)

Country Link
JP (1) JPS598609A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61119195U (enExample) * 1985-01-14 1986-07-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61119195U (enExample) * 1985-01-14 1986-07-28

Also Published As

Publication number Publication date
JPS6367553B2 (enExample) 1988-12-26

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