JPS598333A - 電子線描画装置 - Google Patents

電子線描画装置

Info

Publication number
JPS598333A
JPS598333A JP57116801A JP11680182A JPS598333A JP S598333 A JPS598333 A JP S598333A JP 57116801 A JP57116801 A JP 57116801A JP 11680182 A JP11680182 A JP 11680182A JP S598333 A JPS598333 A JP S598333A
Authority
JP
Japan
Prior art keywords
electron beam
electron rays
cross wire
reference mark
deflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57116801A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0328812B2 (enrdf_load_stackoverflow
Inventor
Teruo Iwasaki
照雄 岩崎
Akira Yanagisawa
柳沢　章
Fujio Komata
富士夫 小俣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Hitachi Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Nippon Telegraph and Telephone Corp filed Critical Hitachi Ltd
Priority to JP57116801A priority Critical patent/JPS598333A/ja
Publication of JPS598333A publication Critical patent/JPS598333A/ja
Publication of JPH0328812B2 publication Critical patent/JPH0328812B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP57116801A 1982-07-07 1982-07-07 電子線描画装置 Granted JPS598333A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57116801A JPS598333A (ja) 1982-07-07 1982-07-07 電子線描画装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57116801A JPS598333A (ja) 1982-07-07 1982-07-07 電子線描画装置

Publications (2)

Publication Number Publication Date
JPS598333A true JPS598333A (ja) 1984-01-17
JPH0328812B2 JPH0328812B2 (enrdf_load_stackoverflow) 1991-04-22

Family

ID=14695999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57116801A Granted JPS598333A (ja) 1982-07-07 1982-07-07 電子線描画装置

Country Status (1)

Country Link
JP (1) JPS598333A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54122978A (en) * 1978-03-16 1979-09-22 Jeol Ltd Detecting method and its apparatus for electron ray information in electron ray exposure unit
JPS5541736A (en) * 1978-09-20 1980-03-24 Hitachi Ltd Detection of mark location

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54122978A (en) * 1978-03-16 1979-09-22 Jeol Ltd Detecting method and its apparatus for electron ray information in electron ray exposure unit
JPS5541736A (en) * 1978-09-20 1980-03-24 Hitachi Ltd Detection of mark location

Also Published As

Publication number Publication date
JPH0328812B2 (enrdf_load_stackoverflow) 1991-04-22

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