JPS5981627A - 光書込型液晶ライトバルブ素子 - Google Patents
光書込型液晶ライトバルブ素子Info
- Publication number
- JPS5981627A JPS5981627A JP57192145A JP19214582A JPS5981627A JP S5981627 A JPS5981627 A JP S5981627A JP 57192145 A JP57192145 A JP 57192145A JP 19214582 A JP19214582 A JP 19214582A JP S5981627 A JPS5981627 A JP S5981627A
- Authority
- JP
- Japan
- Prior art keywords
- film
- liquid crystal
- amorphous silicon
- photoconductor
- conductivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 35
- 230000003287 optical effect Effects 0.000 title claims abstract description 15
- 229910021417 amorphous silicon Inorganic materials 0.000 claims abstract description 24
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 10
- 239000001257 hydrogen Substances 0.000 claims abstract description 10
- 239000011521 glass Substances 0.000 claims abstract description 9
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 8
- 239000011737 fluorine Substances 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 claims 1
- 239000007789 gas Substances 0.000 abstract description 4
- 239000002994 raw material Substances 0.000 abstract description 2
- 229910004014 SiF4 Inorganic materials 0.000 abstract 2
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 abstract 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 abstract 1
- 239000010408 film Substances 0.000 description 61
- 238000010521 absorption reaction Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229910004613 CdTe Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 210000000078 claw Anatomy 0.000 description 2
- 230000036211 photosensitivity Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- YJTKZCDBKVTVBY-UHFFFAOYSA-N 1,3-Diphenylbenzene Chemical group C1=CC=CC=C1C1=CC=CC(C=2C=CC=CC=2)=C1 YJTKZCDBKVTVBY-UHFFFAOYSA-N 0.000 description 1
- ZGOWXOZNUNZPAV-UHFFFAOYSA-N 4-(4-heptylphenyl)benzonitrile Chemical group C1=CC(CCCCCCC)=CC=C1C1=CC=C(C#N)C=C1 ZGOWXOZNUNZPAV-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000004298 light response Effects 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 231100000989 no adverse effect Toxicity 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 102220098555 rs878853237 Human genes 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/135—Liquid crystal cells structurally associated with a photoconducting or a ferro-electric layer, the properties of which can be optically or electrically varied
- G02F1/1354—Liquid crystal cells structurally associated with a photoconducting or a ferro-electric layer, the properties of which can be optically or electrically varied having a particular photoconducting structure or material
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/135—Liquid crystal cells structurally associated with a photoconducting or a ferro-electric layer, the properties of which can be optically or electrically varied
- G02F1/1352—Light-reflecting layers
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57192145A JPS5981627A (ja) | 1982-11-01 | 1982-11-01 | 光書込型液晶ライトバルブ素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57192145A JPS5981627A (ja) | 1982-11-01 | 1982-11-01 | 光書込型液晶ライトバルブ素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5981627A true JPS5981627A (ja) | 1984-05-11 |
| JPH0367247B2 JPH0367247B2 (enrdf_load_stackoverflow) | 1991-10-22 |
Family
ID=16286438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57192145A Granted JPS5981627A (ja) | 1982-11-01 | 1982-11-01 | 光書込型液晶ライトバルブ素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5981627A (enrdf_load_stackoverflow) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4693561A (en) * | 1985-12-23 | 1987-09-15 | The United States Of America As Represented By The Secretary Of The Army | Amorphous silicon spatial light modulator |
| US4925276A (en) * | 1987-05-01 | 1990-05-15 | Electrohome Limited | Liquid crystal light valve utilizing hydrogenated amorphous silicon photodiode |
| JPH05165050A (ja) * | 1991-12-18 | 1993-06-29 | Sharp Corp | 光導電型液晶ライト・バルブ |
| US5235437A (en) * | 1989-12-18 | 1993-08-10 | Sharp Kabushiki Kaisha | Analog/digital image processor apparatus with liquid crystal light modulator |
| JPH05216060A (ja) * | 1992-02-04 | 1993-08-27 | Nippon Hoso Kyokai <Nhk> | 空間光変調素子及びその製造方法 |
| US5245453A (en) * | 1989-08-11 | 1993-09-14 | Sharp Kabushiki Kaisha | Liquid crystal modulator having a photoconductor and/or a dielectric mirror composed of hydrogenated amorphous silicon carbide |
-
1982
- 1982-11-01 JP JP57192145A patent/JPS5981627A/ja active Granted
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4693561A (en) * | 1985-12-23 | 1987-09-15 | The United States Of America As Represented By The Secretary Of The Army | Amorphous silicon spatial light modulator |
| US4925276A (en) * | 1987-05-01 | 1990-05-15 | Electrohome Limited | Liquid crystal light valve utilizing hydrogenated amorphous silicon photodiode |
| US5245453A (en) * | 1989-08-11 | 1993-09-14 | Sharp Kabushiki Kaisha | Liquid crystal modulator having a photoconductor and/or a dielectric mirror composed of hydrogenated amorphous silicon carbide |
| US5235437A (en) * | 1989-12-18 | 1993-08-10 | Sharp Kabushiki Kaisha | Analog/digital image processor apparatus with liquid crystal light modulator |
| US5327263A (en) * | 1989-12-18 | 1994-07-05 | Sharp Kabushiki Kaisha | Image processing apparatus employing a spatial light modulator |
| JPH05165050A (ja) * | 1991-12-18 | 1993-06-29 | Sharp Corp | 光導電型液晶ライト・バルブ |
| US5324549A (en) * | 1991-12-18 | 1994-06-28 | Sharp Kabushiki Kaisha | Method of fabricating photoconductor coupled liquid crystal light valve |
| JPH05216060A (ja) * | 1992-02-04 | 1993-08-27 | Nippon Hoso Kyokai <Nhk> | 空間光変調素子及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0367247B2 (enrdf_load_stackoverflow) | 1991-10-22 |
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