JPS5981516A - マイクロフロ−センサ− - Google Patents
マイクロフロ−センサ−Info
- Publication number
- JPS5981516A JPS5981516A JP57191701A JP19170182A JPS5981516A JP S5981516 A JPS5981516 A JP S5981516A JP 57191701 A JP57191701 A JP 57191701A JP 19170182 A JP19170182 A JP 19170182A JP S5981516 A JPS5981516 A JP S5981516A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- junctions
- measured
- temperature
- flow rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 27
- 238000010438 heat treatment Methods 0.000 abstract description 2
- 238000011144 upstream manufacturing Methods 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000002485 combustion reaction Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57191701A JPS5981516A (ja) | 1982-10-30 | 1982-10-30 | マイクロフロ−センサ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57191701A JPS5981516A (ja) | 1982-10-30 | 1982-10-30 | マイクロフロ−センサ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5981516A true JPS5981516A (ja) | 1984-05-11 |
| JPH0146010B2 JPH0146010B2 (enrdf_load_stackoverflow) | 1989-10-05 |
Family
ID=16279034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57191701A Granted JPS5981516A (ja) | 1982-10-30 | 1982-10-30 | マイクロフロ−センサ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5981516A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0147831A3 (en) * | 1983-12-27 | 1985-12-04 | Honeywell Inc. | Flow sensor |
| JPS61138168A (ja) * | 1984-12-10 | 1986-06-25 | Tokyo Keiso Kk | 熱電式流速計 |
| US4744246A (en) * | 1986-05-01 | 1988-05-17 | Busta Heinz H | Flow sensor on insulator |
| JP2003121226A (ja) * | 2001-10-19 | 2003-04-23 | Yamatake Corp | フローセンサ |
-
1982
- 1982-10-30 JP JP57191701A patent/JPS5981516A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0147831A3 (en) * | 1983-12-27 | 1985-12-04 | Honeywell Inc. | Flow sensor |
| JPS61138168A (ja) * | 1984-12-10 | 1986-06-25 | Tokyo Keiso Kk | 熱電式流速計 |
| US4744246A (en) * | 1986-05-01 | 1988-05-17 | Busta Heinz H | Flow sensor on insulator |
| JP2003121226A (ja) * | 2001-10-19 | 2003-04-23 | Yamatake Corp | フローセンサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0146010B2 (enrdf_load_stackoverflow) | 1989-10-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6508585B2 (en) | Differential scanning calorimeter | |
| US4733559A (en) | Thermal fluid flow sensing method and apparatus for sensing flow over a wide range of flow rates | |
| US5827960A (en) | Bi-directional mass air flow sensor having mutually-heated sensor elements | |
| KR940000140B1 (ko) | 열식 유량계 | |
| JPH05508915A (ja) | 温度バイアス形抵抗エレメントを用いた薄膜空気流センサ | |
| CN104482971B (zh) | 一种基于mems技术的热式流量传感器 | |
| Huijsing et al. | Monolithic integrated direction-sensitive flow sensor | |
| US5142907A (en) | Constant temperature gradient fluid mass flow transducer | |
| JPS62211513A (ja) | 質量媒体流を測定するための測定ゾンデ | |
| JPS59230166A (ja) | 周囲温度補償装置 | |
| US4561303A (en) | Mass airflow sensor with backflow detection | |
| JPS5981516A (ja) | マイクロフロ−センサ− | |
| JPS61274222A (ja) | 流量センサ | |
| JPS59147221A (ja) | 半導体式流量検出装置 | |
| US6250150B1 (en) | Sensor employing heating element with low density at the center and high density at the end thereof | |
| JPH0399230A (ja) | 質量流量センサ | |
| JPH0472523A (ja) | フローセンサ | |
| JP2531968B2 (ja) | 流速センサ及びそれを用いた流速測定装置 | |
| US5351537A (en) | Heat-sensitive flow rate sensor having a longitudinal wiring pattern for uniform temperature distribution | |
| JP2619735B2 (ja) | 熱流量センサ | |
| JP2002310762A (ja) | フローセンサ | |
| US11802784B1 (en) | Single heater MEMS-CMOS based flow sensor | |
| JP3367827B2 (ja) | 真空用微小流量計 | |
| JPS6159252A (ja) | 湿度測定方法 | |
| US5361634A (en) | Heat-sensitive flow rate sensor |