JPS5975551A - 質量分析装置 - Google Patents

質量分析装置

Info

Publication number
JPS5975551A
JPS5975551A JP57184611A JP18461182A JPS5975551A JP S5975551 A JPS5975551 A JP S5975551A JP 57184611 A JP57184611 A JP 57184611A JP 18461182 A JP18461182 A JP 18461182A JP S5975551 A JPS5975551 A JP S5975551A
Authority
JP
Japan
Prior art keywords
sample
samples
hold section
ions
neutral particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57184611A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354428B2 (enrdf_load_stackoverflow
Inventor
Sadao Takahashi
高橋　貞夫
Hideki Kanbara
秀記 神原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57184611A priority Critical patent/JPS5975551A/ja
Publication of JPS5975551A publication Critical patent/JPS5975551A/ja
Publication of JPH0354428B2 publication Critical patent/JPH0354428B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP57184611A 1982-10-22 1982-10-22 質量分析装置 Granted JPS5975551A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57184611A JPS5975551A (ja) 1982-10-22 1982-10-22 質量分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57184611A JPS5975551A (ja) 1982-10-22 1982-10-22 質量分析装置

Publications (2)

Publication Number Publication Date
JPS5975551A true JPS5975551A (ja) 1984-04-28
JPH0354428B2 JPH0354428B2 (enrdf_load_stackoverflow) 1991-08-20

Family

ID=16156243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57184611A Granted JPS5975551A (ja) 1982-10-22 1982-10-22 質量分析装置

Country Status (1)

Country Link
JP (1) JPS5975551A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6251144A (ja) * 1985-08-29 1987-03-05 Hitachi Ltd 質量分析計

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53135260A (en) * 1977-04-30 1978-11-25 Hitachi Ltd Sample stage of e lectron microscope or the like

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53135260A (en) * 1977-04-30 1978-11-25 Hitachi Ltd Sample stage of e lectron microscope or the like

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6251144A (ja) * 1985-08-29 1987-03-05 Hitachi Ltd 質量分析計

Also Published As

Publication number Publication date
JPH0354428B2 (enrdf_load_stackoverflow) 1991-08-20

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