JPS5974729U - 試料測定装置 - Google Patents

試料測定装置

Info

Publication number
JPS5974729U
JPS5974729U JP17078582U JP17078582U JPS5974729U JP S5974729 U JPS5974729 U JP S5974729U JP 17078582 U JP17078582 U JP 17078582U JP 17078582 U JP17078582 U JP 17078582U JP S5974729 U JPS5974729 U JP S5974729U
Authority
JP
Japan
Prior art keywords
sample
sample stage
measuring device
gas
sample measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17078582U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6246265Y2 (enrdf_load_stackoverflow
Inventor
元宏 河野
坂井　高正
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Faurecia Clarion Electronics Co Ltd
Original Assignee
Clarion Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Clarion Co Ltd filed Critical Clarion Co Ltd
Priority to JP17078582U priority Critical patent/JPS5974729U/ja
Publication of JPS5974729U publication Critical patent/JPS5974729U/ja
Application granted granted Critical
Publication of JPS6246265Y2 publication Critical patent/JPS6246265Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP17078582U 1982-11-10 1982-11-10 試料測定装置 Granted JPS5974729U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17078582U JPS5974729U (ja) 1982-11-10 1982-11-10 試料測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17078582U JPS5974729U (ja) 1982-11-10 1982-11-10 試料測定装置

Publications (2)

Publication Number Publication Date
JPS5974729U true JPS5974729U (ja) 1984-05-21
JPS6246265Y2 JPS6246265Y2 (enrdf_load_stackoverflow) 1987-12-12

Family

ID=30372737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17078582U Granted JPS5974729U (ja) 1982-11-10 1982-11-10 試料測定装置

Country Status (1)

Country Link
JP (1) JPS5974729U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62293629A (ja) * 1986-06-12 1987-12-21 Nec Corp 半導体装置の加速寿命試験方法
JPH07209373A (ja) * 1993-11-30 1995-08-11 Nec Corp 冷却試験装置
WO2002046781A1 (fr) * 2000-12-07 2002-06-13 Advantest Corporation Douille d'essai pour composants electroniques, et appareil d'essai pour composants electroniques utilisant cette douille

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5452640B2 (ja) * 2012-02-07 2014-03-26 シャープ株式会社 半導体試験装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5350982A (en) * 1976-10-20 1978-05-09 Mitsubishi Electric Corp Low-high temperature testing station
JPS5473578A (en) * 1977-11-24 1979-06-12 Toshiba Corp Pattern exposure method of semiconductor substrate and pattern exposure apparatus
JPS5788344A (en) * 1980-11-21 1982-06-02 Fujitsu Ltd Cryostat

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5350982A (en) * 1976-10-20 1978-05-09 Mitsubishi Electric Corp Low-high temperature testing station
JPS5473578A (en) * 1977-11-24 1979-06-12 Toshiba Corp Pattern exposure method of semiconductor substrate and pattern exposure apparatus
JPS5788344A (en) * 1980-11-21 1982-06-02 Fujitsu Ltd Cryostat

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62293629A (ja) * 1986-06-12 1987-12-21 Nec Corp 半導体装置の加速寿命試験方法
JPH07209373A (ja) * 1993-11-30 1995-08-11 Nec Corp 冷却試験装置
WO2002046781A1 (fr) * 2000-12-07 2002-06-13 Advantest Corporation Douille d'essai pour composants electroniques, et appareil d'essai pour composants electroniques utilisant cette douille
US6932635B2 (en) 2000-12-07 2005-08-23 Advantest Corporation Electronic component testing socket and electronic component testing apparatus using the same

Also Published As

Publication number Publication date
JPS6246265Y2 (enrdf_load_stackoverflow) 1987-12-12

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