JPS597225A - 偏光解析モニタの調整方法 - Google Patents

偏光解析モニタの調整方法

Info

Publication number
JPS597225A
JPS597225A JP11534882A JP11534882A JPS597225A JP S597225 A JPS597225 A JP S597225A JP 11534882 A JP11534882 A JP 11534882A JP 11534882 A JP11534882 A JP 11534882A JP S597225 A JPS597225 A JP S597225A
Authority
JP
Japan
Prior art keywords
mirror
light source
light
monitor
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11534882A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6224730B2 (enExample
Inventor
Yasuaki Hayashi
林　康明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP11534882A priority Critical patent/JPS597225A/ja
Publication of JPS597225A publication Critical patent/JPS597225A/ja
Publication of JPS6224730B2 publication Critical patent/JPS6224730B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP11534882A 1982-07-05 1982-07-05 偏光解析モニタの調整方法 Granted JPS597225A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11534882A JPS597225A (ja) 1982-07-05 1982-07-05 偏光解析モニタの調整方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11534882A JPS597225A (ja) 1982-07-05 1982-07-05 偏光解析モニタの調整方法

Publications (2)

Publication Number Publication Date
JPS597225A true JPS597225A (ja) 1984-01-14
JPS6224730B2 JPS6224730B2 (enExample) 1987-05-29

Family

ID=14660296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11534882A Granted JPS597225A (ja) 1982-07-05 1982-07-05 偏光解析モニタの調整方法

Country Status (1)

Country Link
JP (1) JPS597225A (enExample)

Also Published As

Publication number Publication date
JPS6224730B2 (enExample) 1987-05-29

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