JPS5967932U - Semiconductor device manufacturing equipment - Google Patents
Semiconductor device manufacturing equipmentInfo
- Publication number
- JPS5967932U JPS5967932U JP16378982U JP16378982U JPS5967932U JP S5967932 U JPS5967932 U JP S5967932U JP 16378982 U JP16378982 U JP 16378982U JP 16378982 U JP16378982 U JP 16378982U JP S5967932 U JPS5967932 U JP S5967932U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- device manufacturing
- solder tape
- manufacturing equipment
- tape feeding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/741—Apparatus for manufacturing means for bonding, e.g. connectors
- H01L24/743—Apparatus for manufacturing layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/741—Apparatus for manufacturing means for bonding, e.g. connectors
- H01L2224/743—Apparatus for manufacturing layer connectors
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Die Bonding (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来の半導体製造装置の一例を示す側面図、第
2図乃至第4図は第1図の一部の動作状態を説明するた
めの部分側面図、第5図及び第6図は本考案の一実施例
を示す各反転状態での側面図である。
2・・・・・・金属基板、9・・・・・・半田テープ、
12・・・・・・半導体ペレット、13・・・・・・半
田テープ送り部、14・・・・・・反転駆動部。FIG. 1 is a side view showing an example of a conventional semiconductor manufacturing apparatus, FIGS. 2 to 4 are partial side views for explaining the operating state of a part of FIG. 1, and FIGS. 5 and 6 are FIG. 3 is a side view of an embodiment of the present invention in each inverted state; 2...Metal board, 9...Solder tape,
12... Semiconductor pellet, 13... Solder tape feeding section, 14... Reversing drive section.
Claims (1)
方向より半田テープを定寸ずつ間歇供給する半田テープ
送り部と、半田テープ送り部を前記半田テープの送り方
向を回転中心として適宜180°反転させる反転駆動部
とを具備したことを特徴とする半導体装置製造装置。A solder tape feeding section that intermittently supplies solder tape by a fixed size from a fixed direction to a semiconductor pellet mounting position of a heated metal substrate, and an inversion that appropriately turns the solder tape feeding section 180 degrees around the solder tape feeding direction as a rotation center. A semiconductor device manufacturing apparatus comprising: a driving section.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16378982U JPS5967932U (en) | 1982-10-27 | 1982-10-27 | Semiconductor device manufacturing equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16378982U JPS5967932U (en) | 1982-10-27 | 1982-10-27 | Semiconductor device manufacturing equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5967932U true JPS5967932U (en) | 1984-05-08 |
Family
ID=30359274
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16378982U Pending JPS5967932U (en) | 1982-10-27 | 1982-10-27 | Semiconductor device manufacturing equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5967932U (en) |
-
1982
- 1982-10-27 JP JP16378982U patent/JPS5967932U/en active Pending
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