JPS596750U - 漏れ検査装置 - Google Patents

漏れ検査装置

Info

Publication number
JPS596750U
JPS596750U JP10238082U JP10238082U JPS596750U JP S596750 U JPS596750 U JP S596750U JP 10238082 U JP10238082 U JP 10238082U JP 10238082 U JP10238082 U JP 10238082U JP S596750 U JPS596750 U JP S596750U
Authority
JP
Japan
Prior art keywords
pipes
chambers
detector
helium
midpoint
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10238082U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6349707Y2 (enExample
Inventor
高宮　博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP10238082U priority Critical patent/JPS596750U/ja
Publication of JPS596750U publication Critical patent/JPS596750U/ja
Application granted granted Critical
Publication of JPS6349707Y2 publication Critical patent/JPS6349707Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP10238082U 1982-07-05 1982-07-05 漏れ検査装置 Granted JPS596750U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10238082U JPS596750U (ja) 1982-07-05 1982-07-05 漏れ検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10238082U JPS596750U (ja) 1982-07-05 1982-07-05 漏れ検査装置

Publications (2)

Publication Number Publication Date
JPS596750U true JPS596750U (ja) 1984-01-17
JPS6349707Y2 JPS6349707Y2 (enExample) 1988-12-21

Family

ID=30241354

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10238082U Granted JPS596750U (ja) 1982-07-05 1982-07-05 漏れ検査装置

Country Status (1)

Country Link
JP (1) JPS596750U (enExample)

Also Published As

Publication number Publication date
JPS6349707Y2 (enExample) 1988-12-21

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