JPS596749U - 漏れ検査体に対するヘリウムガス封入装置 - Google Patents

漏れ検査体に対するヘリウムガス封入装置

Info

Publication number
JPS596749U
JPS596749U JP10237982U JP10237982U JPS596749U JP S596749 U JPS596749 U JP S596749U JP 10237982 U JP10237982 U JP 10237982U JP 10237982 U JP10237982 U JP 10237982U JP S596749 U JPS596749 U JP S596749U
Authority
JP
Japan
Prior art keywords
vacuum
leakage
test object
helium gas
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10237982U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6349706Y2 (enExample
Inventor
高宮　博
一秀 足立
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP10237982U priority Critical patent/JPS596749U/ja
Publication of JPS596749U publication Critical patent/JPS596749U/ja
Application granted granted Critical
Publication of JPS6349706Y2 publication Critical patent/JPS6349706Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP10237982U 1982-07-05 1982-07-05 漏れ検査体に対するヘリウムガス封入装置 Granted JPS596749U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10237982U JPS596749U (ja) 1982-07-05 1982-07-05 漏れ検査体に対するヘリウムガス封入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10237982U JPS596749U (ja) 1982-07-05 1982-07-05 漏れ検査体に対するヘリウムガス封入装置

Publications (2)

Publication Number Publication Date
JPS596749U true JPS596749U (ja) 1984-01-17
JPS6349706Y2 JPS6349706Y2 (enExample) 1988-12-21

Family

ID=30241352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10237982U Granted JPS596749U (ja) 1982-07-05 1982-07-05 漏れ検査体に対するヘリウムガス封入装置

Country Status (1)

Country Link
JP (1) JPS596749U (enExample)

Also Published As

Publication number Publication date
JPS6349706Y2 (enExample) 1988-12-21

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