JPS6349706Y2 - - Google Patents
Info
- Publication number
- JPS6349706Y2 JPS6349706Y2 JP10237982U JP10237982U JPS6349706Y2 JP S6349706 Y2 JPS6349706 Y2 JP S6349706Y2 JP 10237982 U JP10237982 U JP 10237982U JP 10237982 U JP10237982 U JP 10237982U JP S6349706 Y2 JPS6349706 Y2 JP S6349706Y2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- helium
- test
- leakage
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000001307 helium Substances 0.000 claims description 37
- 229910052734 helium Inorganic materials 0.000 claims description 37
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 37
- 239000007789 gas Substances 0.000 claims description 17
- 238000012360 testing method Methods 0.000 claims description 16
- 238000007689 inspection Methods 0.000 claims description 12
- 238000002347 injection Methods 0.000 claims description 10
- 239000007924 injection Substances 0.000 claims description 10
- 230000007246 mechanism Effects 0.000 claims description 7
- 238000007789 sealing Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 4
- 238000012790 confirmation Methods 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000004378 air conditioning Methods 0.000 description 2
- 238000005429 filling process Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10237982U JPS596749U (ja) | 1982-07-05 | 1982-07-05 | 漏れ検査体に対するヘリウムガス封入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10237982U JPS596749U (ja) | 1982-07-05 | 1982-07-05 | 漏れ検査体に対するヘリウムガス封入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS596749U JPS596749U (ja) | 1984-01-17 |
| JPS6349706Y2 true JPS6349706Y2 (enExample) | 1988-12-21 |
Family
ID=30241352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10237982U Granted JPS596749U (ja) | 1982-07-05 | 1982-07-05 | 漏れ検査体に対するヘリウムガス封入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS596749U (enExample) |
-
1982
- 1982-07-05 JP JP10237982U patent/JPS596749U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS596749U (ja) | 1984-01-17 |
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