JPS5966044A - 電子線偏向器 - Google Patents

電子線偏向器

Info

Publication number
JPS5966044A
JPS5966044A JP57174628A JP17462882A JPS5966044A JP S5966044 A JPS5966044 A JP S5966044A JP 57174628 A JP57174628 A JP 57174628A JP 17462882 A JP17462882 A JP 17462882A JP S5966044 A JPS5966044 A JP S5966044A
Authority
JP
Japan
Prior art keywords
electron beam
coils
deflector
deflection
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57174628A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0418667B2 (enExample
Inventor
Hiroyuki Kobayashi
弘幸 小林
Toshiyuki Ohashi
利幸 大橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57174628A priority Critical patent/JPS5966044A/ja
Publication of JPS5966044A publication Critical patent/JPS5966044A/ja
Publication of JPH0418667B2 publication Critical patent/JPH0418667B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57174628A 1982-10-06 1982-10-06 電子線偏向器 Granted JPS5966044A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57174628A JPS5966044A (ja) 1982-10-06 1982-10-06 電子線偏向器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57174628A JPS5966044A (ja) 1982-10-06 1982-10-06 電子線偏向器

Publications (2)

Publication Number Publication Date
JPS5966044A true JPS5966044A (ja) 1984-04-14
JPH0418667B2 JPH0418667B2 (enExample) 1992-03-27

Family

ID=15981913

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57174628A Granted JPS5966044A (ja) 1982-10-06 1982-10-06 電子線偏向器

Country Status (1)

Country Link
JP (1) JPS5966044A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62112845U (enExample) * 1986-01-08 1987-07-18
US8485326B2 (en) 2007-05-14 2013-07-16 Smc Corporation Hydraulic shock absorber

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5620663A (en) * 1979-05-09 1981-02-26 Brueckner Apparatebau Gmbh Moisturing treatment apparatus of twisted wire like fabric material

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5620663A (en) * 1979-05-09 1981-02-26 Brueckner Apparatebau Gmbh Moisturing treatment apparatus of twisted wire like fabric material

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62112845U (enExample) * 1986-01-08 1987-07-18
US8485326B2 (en) 2007-05-14 2013-07-16 Smc Corporation Hydraulic shock absorber

Also Published As

Publication number Publication date
JPH0418667B2 (enExample) 1992-03-27

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