JPS5966031A - 高輝度表面電離型イオン源およびその製造法 - Google Patents

高輝度表面電離型イオン源およびその製造法

Info

Publication number
JPS5966031A
JPS5966031A JP57175390A JP17539082A JPS5966031A JP S5966031 A JPS5966031 A JP S5966031A JP 57175390 A JP57175390 A JP 57175390A JP 17539082 A JP17539082 A JP 17539082A JP S5966031 A JPS5966031 A JP S5966031A
Authority
JP
Japan
Prior art keywords
ion
tungsten
ion source
melting point
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57175390A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0145699B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Osamu Tsukagoshi
修 塚越
Kiyoshi Komatsu
小松　清
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP57175390A priority Critical patent/JPS5966031A/ja
Publication of JPS5966031A publication Critical patent/JPS5966031A/ja
Publication of JPH0145699B2 publication Critical patent/JPH0145699B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP57175390A 1982-10-07 1982-10-07 高輝度表面電離型イオン源およびその製造法 Granted JPS5966031A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57175390A JPS5966031A (ja) 1982-10-07 1982-10-07 高輝度表面電離型イオン源およびその製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57175390A JPS5966031A (ja) 1982-10-07 1982-10-07 高輝度表面電離型イオン源およびその製造法

Publications (2)

Publication Number Publication Date
JPS5966031A true JPS5966031A (ja) 1984-04-14
JPH0145699B2 JPH0145699B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-10-04

Family

ID=15995260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57175390A Granted JPS5966031A (ja) 1982-10-07 1982-10-07 高輝度表面電離型イオン源およびその製造法

Country Status (1)

Country Link
JP (1) JPS5966031A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6269453A (ja) * 1985-09-24 1987-03-30 Hitachi Ltd イオン源装置
CN107210749A (zh) * 2014-10-13 2017-09-26 亚利桑那州立大学董事会代表亚利桑那州立大学法人团体利益 用于二次离子质谱仪的一次铯离子源
US10672602B2 (en) 2014-10-13 2020-06-02 Arizona Board Of Regents On Behalf Of Arizona State University Cesium primary ion source for secondary ion mass spectrometer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6269453A (ja) * 1985-09-24 1987-03-30 Hitachi Ltd イオン源装置
CN107210749A (zh) * 2014-10-13 2017-09-26 亚利桑那州立大学董事会代表亚利桑那州立大学法人团体利益 用于二次离子质谱仪的一次铯离子源
EP3207636A4 (en) * 2014-10-13 2018-10-31 Arizona Board of Regents, a Body Corporate of the State of Arizona acting for and on behalf of Arizona State University Cesium primary ion source for secondary ion mass spectrometer
US10672602B2 (en) 2014-10-13 2020-06-02 Arizona Board Of Regents On Behalf Of Arizona State University Cesium primary ion source for secondary ion mass spectrometer
CN107210749B (zh) * 2014-10-13 2021-03-19 亚利桑那州立大学董事会代表亚利桑那州立大学法人团体利益 用于二次离子质谱仪的一次铯离子源

Also Published As

Publication number Publication date
JPH0145699B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-10-04

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