JPS5963692A - 薄膜ｅｌパネルの製造方法 - Google Patents
薄膜ｅｌパネルの製造方法Info
- Publication number
- JPS5963692A JPS5963692A JP57173166A JP17316682A JPS5963692A JP S5963692 A JPS5963692 A JP S5963692A JP 57173166 A JP57173166 A JP 57173166A JP 17316682 A JP17316682 A JP 17316682A JP S5963692 A JPS5963692 A JP S5963692A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- electrode layer
- insulating
- back electrode
- panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 21
- 239000010408 film Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 7
- 239000011810 insulating material Substances 0.000 claims description 6
- 239000007769 metal material Substances 0.000 claims description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 14
- 150000004706 metal oxides Chemical class 0.000 description 14
- 230000007547 defect Effects 0.000 description 12
- 238000000034 method Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 239000011521 glass Substances 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 230000002950 deficient Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 229910052593 corundum Inorganic materials 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000011295 pitch Substances 0.000 description 2
- 229910001845 yogo sapphire Inorganic materials 0.000 description 2
- BLBNEWYCYZMDEK-UHFFFAOYSA-N $l^{1}-indiganyloxyindium Chemical compound [In]O[In] BLBNEWYCYZMDEK-UHFFFAOYSA-N 0.000 description 1
- 241001385733 Aesculus indica Species 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57173166A JPS5963692A (ja) | 1982-10-04 | 1982-10-04 | 薄膜ｅｌパネルの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57173166A JPS5963692A (ja) | 1982-10-04 | 1982-10-04 | 薄膜ｅｌパネルの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5963692A true JPS5963692A (ja) | 1984-04-11 |
| JPH0155558B2 JPH0155558B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-11-24 |
Family
ID=15955317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57173166A Granted JPS5963692A (ja) | 1982-10-04 | 1982-10-04 | 薄膜ｅｌパネルの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5963692A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52129296A (en) * | 1977-03-11 | 1977-10-29 | Sharp Corp | Thin film light emitting element |
| JPS5743392A (en) * | 1980-08-28 | 1982-03-11 | Matsushita Electric Ind Co Ltd | Electric field light emitting element |
| JPS58216391A (ja) * | 1982-06-10 | 1983-12-16 | 株式会社リコー | 薄膜ｅｌ素子 |
-
1982
- 1982-10-04 JP JP57173166A patent/JPS5963692A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52129296A (en) * | 1977-03-11 | 1977-10-29 | Sharp Corp | Thin film light emitting element |
| JPS5743392A (en) * | 1980-08-28 | 1982-03-11 | Matsushita Electric Ind Co Ltd | Electric field light emitting element |
| JPS58216391A (ja) * | 1982-06-10 | 1983-12-16 | 株式会社リコー | 薄膜ｅｌ素子 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0155558B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-11-24 |
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