JPS5954159A - 走査電子顕微鏡における自動焦点合わせ装置 - Google Patents
走査電子顕微鏡における自動焦点合わせ装置Info
- Publication number
- JPS5954159A JPS5954159A JP57165369A JP16536982A JPS5954159A JP S5954159 A JPS5954159 A JP S5954159A JP 57165369 A JP57165369 A JP 57165369A JP 16536982 A JP16536982 A JP 16536982A JP S5954159 A JPS5954159 A JP S5954159A
- Authority
- JP
- Japan
- Prior art keywords
- automatic focusing
- electron beam
- scanning
- sample
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims abstract description 24
- 230000005284 excitation Effects 0.000 claims description 10
- 230000007423 decrease Effects 0.000 abstract description 6
- 238000001514 detection method Methods 0.000 description 7
- 201000009310 astigmatism Diseases 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000004069 differentiation Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/21—Means for adjusting the focus
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57165369A JPS5954159A (ja) | 1982-09-22 | 1982-09-22 | 走査電子顕微鏡における自動焦点合わせ装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57165369A JPS5954159A (ja) | 1982-09-22 | 1982-09-22 | 走査電子顕微鏡における自動焦点合わせ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5954159A true JPS5954159A (ja) | 1984-03-28 |
JPH0255900B2 JPH0255900B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-11-28 |
Family
ID=15811058
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57165369A Granted JPS5954159A (ja) | 1982-09-22 | 1982-09-22 | 走査電子顕微鏡における自動焦点合わせ装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5954159A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1982
- 1982-09-22 JP JP57165369A patent/JPS5954159A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH0255900B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-11-28 |
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