JPS5954159A - 走査電子顕微鏡における自動焦点合わせ装置 - Google Patents

走査電子顕微鏡における自動焦点合わせ装置

Info

Publication number
JPS5954159A
JPS5954159A JP57165369A JP16536982A JPS5954159A JP S5954159 A JPS5954159 A JP S5954159A JP 57165369 A JP57165369 A JP 57165369A JP 16536982 A JP16536982 A JP 16536982A JP S5954159 A JPS5954159 A JP S5954159A
Authority
JP
Japan
Prior art keywords
automatic focusing
electron beam
scanning
sample
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57165369A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0255900B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Hironobu Moriwaki
森脇 弘暢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NICHIDENSHI TECHNICS KK
Original Assignee
NICHIDENSHI TECHNICS KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NICHIDENSHI TECHNICS KK filed Critical NICHIDENSHI TECHNICS KK
Priority to JP57165369A priority Critical patent/JPS5954159A/ja
Publication of JPS5954159A publication Critical patent/JPS5954159A/ja
Publication of JPH0255900B2 publication Critical patent/JPH0255900B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/21Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57165369A 1982-09-22 1982-09-22 走査電子顕微鏡における自動焦点合わせ装置 Granted JPS5954159A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57165369A JPS5954159A (ja) 1982-09-22 1982-09-22 走査電子顕微鏡における自動焦点合わせ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57165369A JPS5954159A (ja) 1982-09-22 1982-09-22 走査電子顕微鏡における自動焦点合わせ装置

Publications (2)

Publication Number Publication Date
JPS5954159A true JPS5954159A (ja) 1984-03-28
JPH0255900B2 JPH0255900B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-11-28

Family

ID=15811058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57165369A Granted JPS5954159A (ja) 1982-09-22 1982-09-22 走査電子顕微鏡における自動焦点合わせ装置

Country Status (1)

Country Link
JP (1) JPS5954159A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0255900B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-11-28

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