JPS5952561A - Atomizer - Google Patents
AtomizerInfo
- Publication number
- JPS5952561A JPS5952561A JP16462882A JP16462882A JPS5952561A JP S5952561 A JPS5952561 A JP S5952561A JP 16462882 A JP16462882 A JP 16462882A JP 16462882 A JP16462882 A JP 16462882A JP S5952561 A JPS5952561 A JP S5952561A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle plate
- electric vibrator
- soft wax
- metal thin
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0638—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
- B05B17/0646—Vibrating plates, i.e. plates being directly subjected to the vibrations, e.g. having a piezoelectric transducer attached thereto
Landscapes
- Special Spraying Apparatus (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、灯油などの液体燃料、水、薬液などの液体の
霧化器に関するものであり、さらに詳しくは、圧電振動
子などの電気振動子を利用した霧化器に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an atomizer for liquid fuels such as kerosene, water, and liquids such as chemical solutions. This is related to the atomizer used.
従来例の構成とその問題点
従来この種の霧化ポンプは、第１図に示すように構成さ
れている。すなわち電気振動子１の相対向する平滑面に
は、電極膜２ａ、２ｂが形成され、電極膜２ｂとノズル
板３とは軟鑞４ａを介して接合がされていた。さらにノ
ズル板３の他方の面と、ボディーｉは軟鑞４ｂを介して
接合されていた。Conventional structure and its problems A conventional atomizing pump of this type has a structure as shown in FIG. That is, electrode films 2a and 2b were formed on opposing smooth surfaces of the electric vibrator 1, and the electrode film 2b and the nozzle plate 3 were joined via a soft solder 4a. Furthermore, the other surface of the nozzle plate 3 and the body i were joined via soft solder 4b.
電気振動子１′は主成分がＰｂＯ９Ｔｌｏ２．ｚＴ○２
゜ＮｂＯ，ＭｇＯからなるセラミック体で、円形中央部
に開口部を設けたリング形状を有し、電極膜２ａ、２ｂ
は、銀系の厚膜用導電性ペーストの焼結体などが用いら
れ、ノズル板３は厚さ約６０μｍ程度のディスク状に加
工された金属板が用いられ、その中央部にはノズル孔６
（孔径約７０〜１００μｍ）が複数個設けられていた。The main component of the electric vibrator 1' is PbO9Tlo2. zT○2
゜It is a ceramic body made of NbO and MgO, and has a ring shape with an opening in the circular center, and has electrode films 2a and 2b.
A sintered body of silver-based conductive paste for thick films is used, and the nozzle plate 3 is a metal plate processed into a disk shape with a thickness of about 60 μm, with a nozzle hole 6 in the center.
(pore diameter approximately 70 to 100 μm).
尚、ノズル板３は、各構成部材を軟鑞で接合するため、
軟鑞に不活性な金属を用いた場合、第２図に示す様にノ
ズル板３表面を予じめ軟鑞に活性な金属薄膜層３１で形
成してあった。この金属薄膜層３１とノズル板３表面と
の付着強度を高めるために、クロム、チタン等の金属薄
膜による中間薄膜層３２を設ける方法もおこなわれてい
た。In addition, since the nozzle plate 3 joins each component with soft solder,
When an inert metal is used for the soft solder, the surface of the nozzle plate 3 is previously formed with a metal thin film layer 31 that is active for the soft solder, as shown in FIG. In order to increase the adhesion strength between the metal thin film layer 31 and the surface of the nozzle plate 3, a method of providing an intermediate thin film layer 32 made of a metal thin film of chromium, titanium, or the like has been used.
次に、電極膜２ａは外部リード線接続用電極であり、ボ
ディー６には液体通路７および液体室８が設けられ、こ
の様にして霧化ポングユニットは構成されていた。Next, the electrode film 2a is an electrode for connecting an external lead wire, and the body 6 is provided with a liquid passage 7 and a liquid chamber 8, and thus the atomizing pong unit is constructed.
この構成では、ノズル板３と電気振動子１（電極膜２ｂ
）ならびに、ノズル板３とボディー６を軟鑞４ａで接合
するため、軟鑞溶融時の軟鑞流れが生じ易く接合界面以
上に軟鑞４ａ、４ｂが拡大し、軟鑞４ａ、＋ｂの位置規
正ができなかった。In this configuration, the nozzle plate 3 and the electric vibrator 1 (electrode film 2b
) In addition, since the nozzle plate 3 and the body 6 are joined with the soft solder 4a, soft solder flows easily when the soft solder melts, and the soft solder 4a, 4b expands beyond the joining interface, making it difficult to adjust the position of the soft solder 4a, +b. I couldn't do it.
従って、電気振動子１からの振動伝播が異なって、霧化
特性の安定化が得られないという欠点を有していた。ま
だ、半田レジスト膜により軟鑞接合部を規正することも
おこなわれていたが、ノズル孔６を汚染したり、目詰り
させる問題や、軟鑞４ｂ側の接合では、レジスト膜が除
去できないという欠点を有していた。Therefore, the vibration propagation from the electric vibrator 1 is different, and the atomization characteristics cannot be stabilized. Although it was still possible to use a solder resist film to regulate the soft solder joint, there were problems such as contaminating or clogging the nozzle hole 6, and the drawback that the resist film could not be removed when joining the soft solder 4b side. It had
発明の目的
本発明はかかる従来の欠点を除去するもので、霧化器の
電気振動子とノズル板ならびにノズル板とボディーを軟
鑞接合するうえで、実用上信頼性の高い該ユニットを提
供することを目的とする。OBJECTS OF THE INVENTION The present invention eliminates such conventional drawbacks, and provides a unit that is highly reliable in practice when soft soldering joins an electric vibrator and a nozzle plate of an atomizer, as well as a nozzle plate and a body. The purpose is to
発明の構成
この目的を達成するために本発明は、リング形状を有し
た電気振動子と、１ないし１以上のノズル孔を設けたノ
ズル板とボディーからなり、前記のノズル板表面の一部
に軟鑞に活性な金属薄膜層を形成し、その後、軟鑞を介
して前記電気振動子と前記ノズル板ならびに前記ノズル
板と前記ボディーとを接合したものである。Structure of the Invention In order to achieve this object, the present invention comprises an electric vibrator having a ring shape, a nozzle plate provided with one or more nozzle holes, and a body, and a part of the surface of the nozzle plate is An active metal thin film layer is formed on soft solder, and then the electric vibrator and the nozzle plate, as well as the nozzle plate and the body are joined via the soft solder.
この構成によって、軟鑞層の位置規正が精度よくでき、
霧化特性の安定した霧化ポンプユニットが得られる。With this configuration, the position of the soft solder layer can be adjusted with high precision.
An atomizing pump unit with stable atomizing characteristics can be obtained.
実施例の説明
以下、本発明の一実施例を、第３図、第４図を用いて説
明する。尚、これらの図において第１図と同じものにつ
いては、同一番号を付している。DESCRIPTION OF EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 3 and 4. Components in these figures that are the same as those in FIG. 1 are designated by the same numbers.
第３図において、電気振動子１は外径１０ｍ。In FIG. 3, the electric vibrator 1 has an outer diameter of 10 m.
開口径３．６ｍ＋ｎ、厚さ約１．０（転）のリング状で
従来例と同じものであり、電極膜２ａ、２ｂが形成され
ている。ノズル板３は、軟鑞に不活性なステンレス、チ
タン等の金属薄板で、従来と同じ材質を選んだ。ノズル
板３の両面の一部には、軟鑞に活性な銅、金、銀、真鍮
、コパール等の金属薄膜層９が、真空蒸着法、スパッタ
法、メッキ法、溶射法などにより形成される。この金属
薄膜層９の形成は、ノズル板３面上で電気振動子１なら
びにボディーとの接合を要す部分のみにパターン形成が
なされている。It has a ring shape with an opening diameter of 3.6 m+n and a thickness of about 1.0 mm, which is the same as the conventional example, and electrode films 2a and 2b are formed thereon. The nozzle plate 3 is a thin metal plate made of stainless steel, titanium, etc. that is inert to soft solder, and is made of the same material as the conventional one. A metal thin film layer 9 made of copper, gold, silver, brass, copal, etc., which is active in soft soldering, is formed on a part of both sides of the nozzle plate 3 by a vacuum evaporation method, a sputtering method, a plating method, a thermal spraying method, or the like. . This metal thin film layer 9 is formed by patterning only the portions on the surface of the nozzle plate 3 that require bonding with the electric vibrator 1 and the body.
ついで、電気振動子１（電極膜２ｂ）とノズル板３なら
びにノズル板３とボディー６は、軟鑞層４ａおよび軟鑞
層４ｂを介して接合される。また、液体通路７．液体室
８は従来と同じ形態である。Then, the electric vibrator 1 (electrode film 2b) and the nozzle plate 3 as well as the nozzle plate 3 and the body 6 are joined via the soft solder layer 4a and the soft solder layer 4b. Also, the liquid passage 7. The liquid chamber 8 has the same form as the conventional one.
上記構成において、電気振動子１（電極膜２ｂ）とノズ
ル板３ならびにノズル板３とボディー６間の軟鑞接合の
場合、ノズル板３面上には軟鑞に活性な金属薄膜層９を
パターン形成しているため、各軟鑞層４ａ、４ｂは接合
界面が規正され、従って形状的に安定した接合部が得ら
れる。In the above configuration, in the case of soft solder joints between the electric vibrator 1 (electrode film 2b) and the nozzle plate 3 and between the nozzle plate 3 and the body 6, a metal thin film layer 9 active in soft solder is patterned on the surface of the nozzle plate 3. Because of this, the bonding interface of each soft solder layer 4a, 4b is regulated, and a geometrically stable bonded portion can therefore be obtained.
また、上記構成によれば、レジスト膜を用いたときのよ
うな、ノズル孔６を汚染したり、目詰りさせるなどの問
題は全くない。Further, according to the above configuration, there is no problem such as contamination or clogging of the nozzle hole 6, which occurs when a resist film is used.
尚、上記実施例ではノズル板３面上に、金属薄膜層９を
直接的に形成する方法で述べてきたが、ノズル板３と金
属薄膜層９の付着力を高めるだめに、第４図に示す如く
、ノズル板３両面の全表面上あるいは、第６図に示す如
くノズル板３両面の一部分に金属薄膜層９と同一パター
ンで、付着力の高いクロム、チタンなどの中間薄膜層３
２を形成する方法でも、上記実施例と同様の効果が得ら
れる。In the above embodiment, a method was described in which the metal thin film layer 9 was directly formed on the surface of the nozzle plate 3, but in order to increase the adhesion between the nozzle plate 3 and the metal thin film layer 9, the method shown in FIG. As shown in FIG. 6, an intermediate thin film layer 3 made of chromium, titanium, etc. with high adhesion is formed on the entire surface of both sides of the nozzle plate 3, or on a portion of both sides of the nozzle plate 3 in the same pattern as the metal thin film layer 9.
The same effect as in the above embodiment can also be obtained by the method of forming No. 2.
尚、本実施例で用いられる軟鑞は、Ｐｂ−８ｎ共高合金
を始めとした４５０℃より低い融点をもつ、鑞付用金属
溶加材である。The soft solder used in this example is a metal filler material for brazing having a melting point lower than 450° C., including a Pb-8n high alloy.
発明の効果
以上のように、本発明の霧化器によれば、次の効果が得
られる。Effects of the Invention As described above, the atomizer of the present invention provides the following effects.
（１）金属薄膜層をパターン形成するため、接合部の接
合界面が形状的に安定化できる。従って、電気振動子か
らの振動伝播が安定し、霧化特性の安定化が得られる。(1) Since the metal thin film layer is patterned, the bonding interface of the bonding portion can be stabilized in shape. Therefore, vibration propagation from the electric vibrator is stabilized, and atomization characteristics are stabilized.
（２）半田レジスト膜を用いた場合のような、目詰りや
ノズル孔の汚染などの問題がない。(2) There are no problems such as clogging or contamination of nozzle holes, which occur when a solder resist film is used.
第１図は従来の霧化器の構成を示す断面図、第２図は従
来の要部の拡大断面図、第３図は本発明の霧化器の一実
施例を示す断面図、第４図ならびに第６図は本発明の他
の実施例を示す断面図である。
１・・・・・・電気振動子、２ａ・・・・・・電極膜、
２ｂ・・・・・・電極膜、３・・・・・・ノズル板、３
２・・・・・・中間薄膜層、４ａ・・・・・・軟鑞、４
ｂ・・・・・・軟鑞、６・・・・・・支持容器、６・・
・・・・ノズル孔、７・・川・液体通路、８・・・・・
・液体室、９・・・・・・金属薄膜層。
代理人の氏名 弁理士 中 尾 敏 男 はが１名！、
５１図
第３図
？ａFIG. 1 is a sectional view showing the configuration of a conventional atomizer, FIG. 2 is an enlarged sectional view of the main parts of the conventional atomizer, FIG. 3 is a sectional view showing an embodiment of the atomizer of the present invention, This figure and FIG. 6 are cross-sectional views showing other embodiments of the present invention. 1... Electric vibrator, 2a... Electrode film,
2b... Electrode film, 3... Nozzle plate, 3
2...Intermediate thin film layer, 4a...Soft solder, 4
b...Soft solder, 6...Support container, 6...
... Nozzle hole, 7... River/liquid passage, 8...
-Liquid chamber, 9...Metal thin film layer. Name of agent: Patent attorney Toshio Nakao 1 person! ,
Figure 51 Figure 3? a
Claims (4)
けた電気振動子と、この電気振動子で加振される１ない
し１以上のノズル孔を設けたノズル板電気振動子と前記
ノズル板ならびに前記ノズル板と前記ボディーとを接合
した霧化器。(1) An electric vibrator having a ring shape and having electrode films on opposing smooth surfaces, a nozzle plate electric vibrator having one or more nozzle holes that is excited by this electric vibrator, and the above-described electric vibrator. A nozzle plate and an atomizer in which the nozzle plate and the body are joined.
どの金属薄板とした特許請求の範囲第′１項記載の霧化
器。(2) The atomizer according to claim 1, wherein the nozzle plate is a thin metal plate made of stainless steel, titanium, or the like that is inert to soft solder.
コバールなどの金属とした特許請求の範囲第１項記載の
霧化器。(3) The metal thin film layer active in soft solder is copper, gold, silver, brass,
The atomizer according to claim 1, which is made of metal such as Kovar.
振動子ならびにボディーを接合するに必要な範囲に形成
した特許請求の範囲第１項記載の霧化器。(4) The atomizer according to claim 1, wherein the soft solder-active metal thin film layer is formed on the surface of the nozzle plate in an area necessary for joining the electric vibrator and the body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16462882A JPS5952561A (en) | 1982-09-20 | 1982-09-20 | Atomizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16462882A JPS5952561A (en) | 1982-09-20 | 1982-09-20 | Atomizer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5952561A true JPS5952561A (en) | 1984-03-27 |
| JPS632222B2 JPS632222B2 (en) | 1988-01-18 |
Family
ID=15796810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16462882A Granted JPS5952561A (en) | 1982-09-20 | 1982-09-20 | Atomizer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5952561A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20220161291A1 (en) * | 2020-11-23 | 2022-05-26 | Specialist Health Solutions Limited | Injection head for excitation of fluid |
-
1982
- 1982-09-20 JP JP16462882A patent/JPS5952561A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20220161291A1 (en) * | 2020-11-23 | 2022-05-26 | Specialist Health Solutions Limited | Injection head for excitation of fluid |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS632222B2 (en) | 1988-01-18 |
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