JPS6352546B2 - - Google Patents
Info
- Publication number
- JPS6352546B2 JPS6352546B2 JP631783A JP631783A JPS6352546B2 JP S6352546 B2 JPS6352546 B2 JP S6352546B2 JP 631783 A JP631783 A JP 631783A JP 631783 A JP631783 A JP 631783A JP S6352546 B2 JPS6352546 B2 JP S6352546B2
- Authority
- JP
- Japan
- Prior art keywords
- nozzle plate
- electric vibrator
- hole
- nozzle
- bonding interface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000126 substance Substances 0.000 claims description 4
- 238000000889 atomisation Methods 0.000 claims description 2
- 239000011148 porous material Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 10
- 239000010410 layer Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000003350 kerosene Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0638—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
- B05B17/0646—Vibrating plates, i.e. plates being directly subjected to the vibrations, e.g. having a piezoelectric transducer attached thereto
Landscapes
- Special Spraying Apparatus (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、灯油などの液体燃料、水、薬液など
の液体の霧化ポンプに関するものであり、さらに
詳しくは、圧電振動子などの電気振動子を利用し
た霧化ポンプに関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an atomizing pump for liquid fuels such as kerosene, water, and liquids such as chemical solutions. This relates to the atomization pump used.
従来例の構成とその問題点
従来のこの種の霧化ポンプは、第1図に示すよ
うに構成されている。すなわち電気振動子1の相
対向する平滑面には、電極膜2a,2bが形成さ
れ、電極膜2bとノズル板3とは、有機系あるい
は無機系の接着剤、または軟鑞などの固着層4a
を介して接合されていた。また、ノズル板3の他
方(裏面)の面とボデイー5は、上述の接着剤あ
るいは軟鑞などと同じ固着層4bを介して接合が
されていた。Structure of a conventional example and its problems A conventional atomizing pump of this type has a structure as shown in FIG. That is, electrode films 2a and 2b are formed on opposing smooth surfaces of the electric vibrator 1, and the electrode film 2b and the nozzle plate 3 are bonded with a fixing layer 4a such as an organic or inorganic adhesive or soft solder.
were connected through. Further, the other (back) surface of the nozzle plate 3 and the body 5 were bonded via a fixing layer 4b, which is the same as the above-mentioned adhesive or soft solder.
電気振動子1は主成分がPbO、TiO2、ZrO2な
どからなるセラミツク体で、円形中央部に開口部
を設けたリング形状を有し、電極膜2a,2bは
銀系などの厚膜用導電性ペーストの焼結体、ある
いは金属蒸着膜、金属鍍金膜などが用いられてい
た。ノズル板3は、厚さ約50μm程度でデイスク
状に加工された金属板が用いられ、その中央部に
はノズル孔6の貫通孔(孔径約70〜100μm)が、
複数個設けられていた。ボデイー5は金属の円柱
体で上部には、ノズル3を接合するための支持部
7、その外周部には組立時にノズル板3を位置決
め等するためループ状の側壁8、また支持部7の
中央には凹状の液体室9が設けられ、液体室9か
らは左右方向に液体通路10が一対設けられてい
た。 The electric vibrator 1 is a ceramic body whose main components are PbO, TiO 2 , ZrO 2 , etc., and has a ring shape with an opening in the center of the circle, and the electrode films 2 a and 2 b are made of thick films such as silver. A sintered body of conductive paste, a metal vapor deposition film, a metal plating film, etc. were used. The nozzle plate 3 is a metal plate processed into a disk shape with a thickness of about 50 μm, and a through hole (hole diameter of about 70 to 100 μm) for the nozzle hole 6 is formed in the center of the nozzle plate 3.
There were multiple locations. The body 5 is a cylindrical metal body with a support part 7 on the top for joining the nozzle 3, a loop-shaped side wall 8 on the outer periphery for positioning the nozzle plate 3 during assembly, and a center part of the support part 7. A concave liquid chamber 9 was provided, and a pair of liquid passages 10 were provided from the liquid chamber 9 in the left and right direction.
電極膜2aは、外部リード線接続用電極であ
る。 The electrode film 2a is an electrode for connecting an external lead wire.
従来の霧化ポンプは、以上の様にして構成がな
されていた。 Conventional atomizing pumps have been configured as described above.
この構成では、ノズル板3とボデイー5間の接
合界面が広いため、接合時に接着剤や軟鑞付の際
のフラツクスなどからのガスが固着層4bやその
界面付近に残留しやすく、気泡部41を形成する
という問題があつた。接合界面ならびに固着層4
bの気泡は、動作時に電気振動子1からの振動伝
播を不安定にする原因となり、ノズル板3の共振
動作を不安定にするという欠点を有していた。 In this configuration, since the bonding interface between the nozzle plate 3 and the body 5 is wide, gas from the adhesive during bonding and flux during soft brazing tends to remain in the fixed layer 4b and near the interface, causing air bubbles 41 There was a problem of forming a Bonding interface and fixed layer 4
The bubbles b cause the vibration propagation from the electric vibrator 1 to become unstable during operation, and have the drawback of making the resonant operation of the nozzle plate 3 unstable.
発明の目的
本発明は、かかる従来の欠点を解消するもの
で、ノズル板の共振動作を安定化した実用性の高
い霧化ポンプを提供することを目的とする。OBJECTS OF THE INVENTION The present invention aims to eliminate such conventional drawbacks and to provide a highly practical atomizing pump in which the resonance operation of the nozzle plate is stabilized.
発明の構成
この目的を達成するために本発明は、ノズル板
の電気振動子との接合面に相当する部分に、複数
個の貫通穴を放射線上に対角になる様に設けたも
のである。この構成によつて、接合界面のガス状
物質が、貫通穴あるいは切断溝を介し、接合界面
より排出される。従つて、その接合界面は、気泡
部が少なく緻密となり、電気振動子からの振動伝
播を安定にする作用を有する。Structure of the Invention In order to achieve this object, the present invention provides a portion of the nozzle plate corresponding to the joint surface with the electric vibrator, in which a plurality of through holes are provided diagonally on a radial line. . With this configuration, gaseous substances at the bonding interface are discharged from the bonding interface via the through holes or cutting grooves. Therefore, the bonding interface is dense with fewer bubbles and has the effect of stabilizing the propagation of vibrations from the electric vibrator.
実施例の説明
以下、本発明の一実施例を第2図、第3図を用
いて説明する。尚、第1図と同一部材について
は、同一番号を付している。DESCRIPTION OF EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 2 and 3. Note that the same members as in FIG. 1 are given the same numbers.
第2図において、電気振動子1リング形状(寸
法:外径約10mmと内径約4mm、厚さ約1mm)の圧
電素子で、その平滑な両面上には、電極膜2a,
2bを形成した従来と同じものを選んだ。ノズル
板3はデイスク状で、従来と同様であるが、電気
振動子1との接合部に相当する部分には、第3図
に示したように対角状に複数個の細い(約0.5mm)
貫通穴11が設けられている。前記の電気振動子
1(電極膜2bを含む)とノズル板3ならびにノ
ズル板3とボデイー5は、従来と同じ接着剤や軟
鑞などによる固着層(前者は4a、後者は4b)
を介して接合がなされている。 In Fig. 2, an electric vibrator is a ring-shaped piezoelectric element (dimensions: outer diameter of about 10 mm, inner diameter of about 4 mm, thickness of about 1 mm), with electrode films 2a,
I chose the same one as the conventional one that formed 2b. The nozzle plate 3 is disk-shaped and is similar to the conventional one, but the part corresponding to the joint with the electric vibrator 1 has a plurality of thin diagonal plates (approximately 0.5 mm) as shown in FIG. )
A through hole 11 is provided. The electric vibrator 1 (including the electrode film 2b) and the nozzle plate 3 as well as the nozzle plate 3 and the body 5 are fixed by adhesive layers (4a for the former and 4b for the latter) using the same adhesive or soft solder as in the past.
The connection is made through.
次にボデイー5は金属の円柱体で上部には、ノ
ズル板3を接合するための支持部7、その外周部
には組立時にノズル板3を位置決めするためのル
ープ状の側壁8が、ノズル板3の直径とほぼ同寸
の内径で設けられている。また支持部7の中央に
は、円形凹状の液体室9が設けられ、液体室9か
らは左右方向に液体通路10が一対設けられてい
る。電極膜2aは外部リード線接続用電極であ
る。 Next, the body 5 is a cylindrical metal body with a supporting part 7 on the upper part for joining the nozzle plate 3, and a loop-shaped side wall 8 on the outer periphery for positioning the nozzle plate 3 during assembly. It is provided with an inner diameter that is approximately the same as the diameter of No. 3. Further, a circular concave liquid chamber 9 is provided at the center of the support portion 7, and a pair of liquid passages 10 are provided from the liquid chamber 9 in the left and right direction. The electrode film 2a is an electrode for connecting an external lead wire.
上記構成において、ノズル板3の電気振動子1
との接合部に相当する部分に、貫通穴11を設け
ているため、接合時のガス状物質は、貫通穴11
を介して接合界面より排出される。従つて、接合
界面を気泡などの少ない緻密な層にすることが出
来た。 In the above configuration, the electric vibrator 1 of the nozzle plate 3
Since the through hole 11 is provided in the part corresponding to the joint with the
is discharged from the bonding interface via. Therefore, it was possible to form the bonding interface into a dense layer with few bubbles.
その結果、動作時には電気振動子1からの振動
伝播を安定にすることが出来、ノズル板3の共振
動作を安定にするという効果がある。 As a result, during operation, vibration propagation from the electric vibrator 1 can be stabilized, and the resonance operation of the nozzle plate 3 can be stabilized.
また、気泡が少なくなることで、接合部の機械
的強度など、信頼性を向上させる利点もある。 Furthermore, the reduction in air bubbles has the advantage of improving reliability, such as the mechanical strength of the joint.
尚、上記説明においては、霧化ポンプの構成
を、円形にしたもので示したが、円形以外の形状
を有するものであつても、同様の効果が得られる
ことは容易に類推できる。 In the above description, the configuration of the atomizing pump is shown as being circular, but it can be easily inferred that similar effects can be obtained even if the atomizing pump has a shape other than circular.
発明の効果
以上のように本発明の霧化ポンプによれば、次
の効果が得られる。Effects of the Invention As described above, according to the atomizing pump of the present invention, the following effects can be obtained.
(1) ノズル板の電気振動子との接合部に、貫通穴
を設けているため、接合時に発生するガス状物
質などは、それらを介し排出することができ
る。従つて、接合界面は緻密な層となるため、
その動作時には、電気振動子からの振動伝播が
安定となり、ノズル板の共振動作が安定すると
いう効果が得られる。(1) A through hole is provided at the joint between the nozzle plate and the electric vibrator, so gaseous substances generated during the joint can be discharged through the hole. Therefore, since the bonding interface becomes a dense layer,
During this operation, the vibration propagation from the electric vibrator becomes stable, and the effect of stabilizing the resonant operation of the nozzle plate is obtained.
第1図は従来の構成による霧化ポンプを示す断
面図、第2図は本発明の一実施例を示す断面図、
第3図は本発明の一実施例を詳しく説明するため
の構成部材の平面図である。
1……電気振動子、2a……電極膜、2b……
電極膜、3……ノズル板、4a……固着層、4b
……固着層、5……ボデイー、6……ノズル孔、
7……支持部、8……側壁、9……液体室、10
……液体通路、11……貫通穴。
FIG. 1 is a sectional view showing an atomizing pump with a conventional configuration, and FIG. 2 is a sectional view showing an embodiment of the present invention.
FIG. 3 is a plan view of constituent members for explaining in detail one embodiment of the present invention. 1... Electric vibrator, 2a... Electrode film, 2b...
Electrode film, 3... Nozzle plate, 4a... Fixed layer, 4b
... fixed layer, 5 ... body, 6 ... nozzle hole,
7...Support part, 8...Side wall, 9...Liquid chamber, 10
...Liquid passage, 11...Through hole.
Claims (1)
上のノズル孔を設けたノズル板と、これらを支持
するボデイーとからなり、前記ノズル板の電気振
動子との接合面に相当する部分に、複数個の貫通
穴を放射線上に設けた霧化ポンプ。 2 貫通穴は、ガス状物質が通過できる細孔から
なる特許請求の範囲第1項記載の霧化ポンプ。[Claims] 1. Consisting of a nozzle plate provided with one or more nozzle holes that is excited by an electric vibrator, and a body that supports these, the nozzle plate being joined to the electric vibrator. An atomizing pump with multiple through holes radially arranged in the area corresponding to the surface. 2. The atomization pump according to claim 1, wherein the through hole is a pore through which a gaseous substance can pass.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP631783A JPS59132960A (en) | 1983-01-18 | 1983-01-18 | Atomizing pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP631783A JPS59132960A (en) | 1983-01-18 | 1983-01-18 | Atomizing pump |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59132960A JPS59132960A (en) | 1984-07-31 |
JPS6352546B2 true JPS6352546B2 (en) | 1988-10-19 |
Family
ID=11634990
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP631783A Granted JPS59132960A (en) | 1983-01-18 | 1983-01-18 | Atomizing pump |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59132960A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7888844B2 (en) | 2009-06-30 | 2011-02-15 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Temperature control of micromachined transducers |
-
1983
- 1983-01-18 JP JP631783A patent/JPS59132960A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS59132960A (en) | 1984-07-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6340592B2 (en) | ||
JPS6352546B2 (en) | ||
EP0878905A2 (en) | Surface acoustic wave element having a bump electrode and surface acoustic wave device comprising the same | |
JPS6352547B2 (en) | ||
JPS6351065B2 (en) | ||
JPS6258785B2 (en) | ||
JPH0210709B2 (en) | ||
JPS6068071A (en) | Atomizing pump | |
JPS632224B2 (en) | ||
JPH0223226B2 (en) | ||
JPS60153962A (en) | Atomizing pump | |
JPS6366270B2 (en) | ||
JPS5987064A (en) | Atomizing pump unit | |
JPH0126749B2 (en) | ||
JPS6138654A (en) | Atomizing pump | |
JPS632222B2 (en) | ||
JPS6351066B2 (en) | ||
JPH0373339B2 (en) | ||
JPS59148419A (en) | Thickness shear piezoelectric oscillator | |
JPS5922673A (en) | Atomizing pump | |
JPH0156275B2 (en) | ||
JPS60166061A (en) | Spraying device | |
JPS6022958A (en) | Atomizing pump | |
JPS648584B2 (en) | ||
JPS60132671A (en) | Atomizing pump |