JPS5946800A - 中性粒子入射装置 - Google Patents

中性粒子入射装置

Info

Publication number
JPS5946800A
JPS5946800A JP57156567A JP15656782A JPS5946800A JP S5946800 A JPS5946800 A JP S5946800A JP 57156567 A JP57156567 A JP 57156567A JP 15656782 A JP15656782 A JP 15656782A JP S5946800 A JPS5946800 A JP S5946800A
Authority
JP
Japan
Prior art keywords
magnetic shield
neutralization cell
ion source
outer layer
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57156567A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6355759B2 (enExample
Inventor
靖 石川
成田　章司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57156567A priority Critical patent/JPS5946800A/ja
Publication of JPS5946800A publication Critical patent/JPS5946800A/ja
Publication of JPS6355759B2 publication Critical patent/JPS6355759B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
JP57156567A 1982-09-10 1982-09-10 中性粒子入射装置 Granted JPS5946800A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57156567A JPS5946800A (ja) 1982-09-10 1982-09-10 中性粒子入射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57156567A JPS5946800A (ja) 1982-09-10 1982-09-10 中性粒子入射装置

Publications (2)

Publication Number Publication Date
JPS5946800A true JPS5946800A (ja) 1984-03-16
JPS6355759B2 JPS6355759B2 (enExample) 1988-11-04

Family

ID=15630600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57156567A Granted JPS5946800A (ja) 1982-09-10 1982-09-10 中性粒子入射装置

Country Status (1)

Country Link
JP (1) JPS5946800A (enExample)

Also Published As

Publication number Publication date
JPS6355759B2 (enExample) 1988-11-04

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