JPS5946448U - 粒子線光学系に於ける分散能可変装置 - Google Patents

粒子線光学系に於ける分散能可変装置

Info

Publication number
JPS5946448U
JPS5946448U JP11314283U JP11314283U JPS5946448U JP S5946448 U JPS5946448 U JP S5946448U JP 11314283 U JP11314283 U JP 11314283U JP 11314283 U JP11314283 U JP 11314283U JP S5946448 U JPS5946448 U JP S5946448U
Authority
JP
Japan
Prior art keywords
particle beam
beam optical
optical system
dispersion power
power device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11314283U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6118612Y2 (OSRAM
Inventor
栄胤 池上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP11314283U priority Critical patent/JPS5946448U/ja
Publication of JPS5946448U publication Critical patent/JPS5946448U/ja
Application granted granted Critical
Publication of JPS6118612Y2 publication Critical patent/JPS6118612Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP11314283U 1983-07-22 1983-07-22 粒子線光学系に於ける分散能可変装置 Granted JPS5946448U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11314283U JPS5946448U (ja) 1983-07-22 1983-07-22 粒子線光学系に於ける分散能可変装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11314283U JPS5946448U (ja) 1983-07-22 1983-07-22 粒子線光学系に於ける分散能可変装置

Publications (2)

Publication Number Publication Date
JPS5946448U true JPS5946448U (ja) 1984-03-28
JPS6118612Y2 JPS6118612Y2 (OSRAM) 1986-06-05

Family

ID=30262023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11314283U Granted JPS5946448U (ja) 1983-07-22 1983-07-22 粒子線光学系に於ける分散能可変装置

Country Status (1)

Country Link
JP (1) JPS5946448U (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0660840A (ja) * 1992-08-10 1994-03-04 Hitachi Ltd 磁気四重極レンズ、これを用いたイオンビーム加速装置並びにイオンビーム減速装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0660840A (ja) * 1992-08-10 1994-03-04 Hitachi Ltd 磁気四重極レンズ、これを用いたイオンビーム加速装置並びにイオンビーム減速装置

Also Published As

Publication number Publication date
JPS6118612Y2 (OSRAM) 1986-06-05

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