JPS5946394A - タ−ボ分子ポンプ - Google Patents

タ−ボ分子ポンプ

Info

Publication number
JPS5946394A
JPS5946394A JP58126028A JP12602883A JPS5946394A JP S5946394 A JPS5946394 A JP S5946394A JP 58126028 A JP58126028 A JP 58126028A JP 12602883 A JP12602883 A JP 12602883A JP S5946394 A JPS5946394 A JP S5946394A
Authority
JP
Japan
Prior art keywords
rotor
permanent magnet
bearing
vacuum side
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58126028A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0251079B2 (enrdf_load_stackoverflow
Inventor
Nobuo Tsumaki
妻木　伸夫
Shinjiro Ueda
上田　新次郎
Kosuke Noda
野田　耕介
Hideki Izumi
泉　英樹
Osami Matsushita
修己 松下
Takeshi Okawada
岡和田　剛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58126028A priority Critical patent/JPS5946394A/ja
Publication of JPS5946394A publication Critical patent/JPS5946394A/ja
Publication of JPH0251079B2 publication Critical patent/JPH0251079B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2300/00—Application independent of particular apparatuses
    • F16C2300/40—Application independent of particular apparatuses related to environment, i.e. operating conditions
    • F16C2300/62—Application independent of particular apparatuses related to environment, i.e. operating conditions low pressure, e.g. elements operating under vacuum conditions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP58126028A 1983-07-13 1983-07-13 タ−ボ分子ポンプ Granted JPS5946394A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58126028A JPS5946394A (ja) 1983-07-13 1983-07-13 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58126028A JPS5946394A (ja) 1983-07-13 1983-07-13 タ−ボ分子ポンプ

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57065313 Division 1982-04-21 1982-04-21

Publications (2)

Publication Number Publication Date
JPS5946394A true JPS5946394A (ja) 1984-03-15
JPH0251079B2 JPH0251079B2 (enrdf_load_stackoverflow) 1990-11-06

Family

ID=14924900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58126028A Granted JPS5946394A (ja) 1983-07-13 1983-07-13 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPS5946394A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63306300A (ja) * 1987-06-04 1988-12-14 フォ−チュナ・ヴェルケ・マシネンファブリ−ク・ゲ−エムベ−ハ− 大量ガス循環用ブロ−ワ−
JPH01247794A (ja) * 1988-03-29 1989-10-03 Daikin Ind Ltd 複合形真空ポンプ
JPH01247821A (ja) * 1988-03-30 1989-10-03 Osaka Shinku Kiki Seisakusho:Kk 高速回転装置の軸受装置
US4929151A (en) * 1988-07-27 1990-05-29 Societe Anonyme Dite: Alcatel Cit Vacuum pump
US5350275A (en) * 1992-06-05 1994-09-27 Zaidan Houjin Shinku Kagaku Kenkyujo Turbomolecular pump having vanes with ceramic and metallic surfaces
CN106064291A (zh) * 2015-04-21 2016-11-02 普发真空有限公司 制造真空泵的构件的方法、真空泵的构件和真空泵

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5160005A (enrdf_load_stackoverflow) * 1974-09-27 1976-05-25 Barutsuerusu Patento Unto Beta
JPS5612095A (en) * 1979-05-21 1981-02-05 Cambridge Thermionic Corp Turbo molecular vacuum pump

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5160005A (enrdf_load_stackoverflow) * 1974-09-27 1976-05-25 Barutsuerusu Patento Unto Beta
JPS5612095A (en) * 1979-05-21 1981-02-05 Cambridge Thermionic Corp Turbo molecular vacuum pump

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63306300A (ja) * 1987-06-04 1988-12-14 フォ−チュナ・ヴェルケ・マシネンファブリ−ク・ゲ−エムベ−ハ− 大量ガス循環用ブロ−ワ−
JPH01247794A (ja) * 1988-03-29 1989-10-03 Daikin Ind Ltd 複合形真空ポンプ
JPH01247821A (ja) * 1988-03-30 1989-10-03 Osaka Shinku Kiki Seisakusho:Kk 高速回転装置の軸受装置
US4929151A (en) * 1988-07-27 1990-05-29 Societe Anonyme Dite: Alcatel Cit Vacuum pump
US5350275A (en) * 1992-06-05 1994-09-27 Zaidan Houjin Shinku Kagaku Kenkyujo Turbomolecular pump having vanes with ceramic and metallic surfaces
CN106064291A (zh) * 2015-04-21 2016-11-02 普发真空有限公司 制造真空泵的构件的方法、真空泵的构件和真空泵

Also Published As

Publication number Publication date
JPH0251079B2 (enrdf_load_stackoverflow) 1990-11-06

Similar Documents

Publication Publication Date Title
US4579508A (en) Turbomolecular pump
US6343910B1 (en) Turbo-molecular pump
US5139396A (en) Ball bearing for use in vacuum and turbo-molecular pump incorporating same
JPH0379559B2 (enrdf_load_stackoverflow)
JPS5946394A (ja) タ−ボ分子ポンプ
JPS59168295A (ja) タ−ボ分子ポンプ
US20060140794A1 (en) Vacuum pumping arrangement
JPS59162396A (ja) タ−ボ分子ポンプ
EP1573205B1 (en) Vacuum pumping system and method of operating a vacuum pumping arrangement
US20060099094A1 (en) Vacuum pumping arrangement and method of operating same
JPS60135694A (ja) タ−ボ分子ポンプ
JP2525848Y2 (ja) 真空ポンプ
JPS59119094A (ja) タ−ボ分子ポンプ
JPS63227989A (ja) タ−ボ分子ポンプ
JPH02215977A (ja) ターボ分子ポンプ
JPS62282191A (ja) タ−ボ分子ポンプ
JPS61207892A (ja) タ−ボ分子ポンプ
JPS62111194A (ja) タ−ボ分子ポンプ
JPS63259191A (ja) タ−ボ分子ポンプ
JPH0710492U (ja) ターボ分子ポンプ
JPS63280894A (ja) タ−ボ分子ポンプを用いた排気系
JPH02248659A (ja) 高真空排気装置
JPS63255592A (ja) タ−ボ分子ポンプ
JPS5965592A (ja) タ−ボ分子ポンプ
JPS62279281A (ja) タ−ボ分子ポンプ