JPS5946022A - グロ−放電によるアモルフアスシリコン膜生成用ホツトウオ−ル成長装置の電極装置 - Google Patents

グロ−放電によるアモルフアスシリコン膜生成用ホツトウオ−ル成長装置の電極装置

Info

Publication number
JPS5946022A
JPS5946022A JP57156459A JP15645982A JPS5946022A JP S5946022 A JPS5946022 A JP S5946022A JP 57156459 A JP57156459 A JP 57156459A JP 15645982 A JP15645982 A JP 15645982A JP S5946022 A JPS5946022 A JP S5946022A
Authority
JP
Japan
Prior art keywords
electrode
glow discharge
amorphous silicon
silicon film
hot wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57156459A
Other languages
English (en)
Japanese (ja)
Other versions
JPS639744B2 (Direct
Inventor
Yoshihide Endo
遠藤　好英
Harushige Kurokawa
黒河　治重
Hironobu Miya
博信 宮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Kokusai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Co Ltd filed Critical Kokusai Electric Co Ltd
Priority to JP57156459A priority Critical patent/JPS5946022A/ja
Publication of JPS5946022A publication Critical patent/JPS5946022A/ja
Publication of JPS639744B2 publication Critical patent/JPS639744B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • H10P14/24—
    • H10P14/3411—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photovoltaic Devices (AREA)
  • Light Receiving Elements (AREA)
  • Chemical Vapour Deposition (AREA)
JP57156459A 1982-09-08 1982-09-08 グロ−放電によるアモルフアスシリコン膜生成用ホツトウオ−ル成長装置の電極装置 Granted JPS5946022A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57156459A JPS5946022A (ja) 1982-09-08 1982-09-08 グロ−放電によるアモルフアスシリコン膜生成用ホツトウオ−ル成長装置の電極装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57156459A JPS5946022A (ja) 1982-09-08 1982-09-08 グロ−放電によるアモルフアスシリコン膜生成用ホツトウオ−ル成長装置の電極装置

Publications (2)

Publication Number Publication Date
JPS5946022A true JPS5946022A (ja) 1984-03-15
JPS639744B2 JPS639744B2 (Direct) 1988-03-01

Family

ID=15628207

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57156459A Granted JPS5946022A (ja) 1982-09-08 1982-09-08 グロ−放電によるアモルフアスシリコン膜生成用ホツトウオ−ル成長装置の電極装置

Country Status (1)

Country Link
JP (1) JPS5946022A (Direct)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4820370A (en) * 1986-12-12 1989-04-11 Pacific Western Systems, Inc. Particle shielded R. F. connector for a plasma enhanced chemical vapor processor boat
JPH02175875A (ja) * 1988-12-27 1990-07-09 Tokyo Electron Ltd 反応管の洗浄方法及びその装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0561045U (ja) * 1991-09-20 1993-08-10 オオノ株式会社 提げ手付き合成樹脂製網袋

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4820370A (en) * 1986-12-12 1989-04-11 Pacific Western Systems, Inc. Particle shielded R. F. connector for a plasma enhanced chemical vapor processor boat
JPH02175875A (ja) * 1988-12-27 1990-07-09 Tokyo Electron Ltd 反応管の洗浄方法及びその装置

Also Published As

Publication number Publication date
JPS639744B2 (Direct) 1988-03-01

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