JPS5944799A - 中性粒子入射装置 - Google Patents

中性粒子入射装置

Info

Publication number
JPS5944799A
JPS5944799A JP57153925A JP15392582A JPS5944799A JP S5944799 A JPS5944799 A JP S5944799A JP 57153925 A JP57153925 A JP 57153925A JP 15392582 A JP15392582 A JP 15392582A JP S5944799 A JPS5944799 A JP S5944799A
Authority
JP
Japan
Prior art keywords
magnetic shield
neutralization cell
ion source
injection device
neutral particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57153925A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6355758B2 (enExample
Inventor
上出　泰生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57153925A priority Critical patent/JPS5944799A/ja
Publication of JPS5944799A publication Critical patent/JPS5944799A/ja
Publication of JPS6355758B2 publication Critical patent/JPS6355758B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
JP57153925A 1982-09-06 1982-09-06 中性粒子入射装置 Granted JPS5944799A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57153925A JPS5944799A (ja) 1982-09-06 1982-09-06 中性粒子入射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57153925A JPS5944799A (ja) 1982-09-06 1982-09-06 中性粒子入射装置

Publications (2)

Publication Number Publication Date
JPS5944799A true JPS5944799A (ja) 1984-03-13
JPS6355758B2 JPS6355758B2 (enExample) 1988-11-04

Family

ID=15573076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57153925A Granted JPS5944799A (ja) 1982-09-06 1982-09-06 中性粒子入射装置

Country Status (1)

Country Link
JP (1) JPS5944799A (enExample)

Also Published As

Publication number Publication date
JPS6355758B2 (enExample) 1988-11-04

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