JPS5942754A - 研削加工装置 - Google Patents

研削加工装置

Info

Publication number
JPS5942754A
JPS5942754A JP57152385A JP15238582A JPS5942754A JP S5942754 A JPS5942754 A JP S5942754A JP 57152385 A JP57152385 A JP 57152385A JP 15238582 A JP15238582 A JP 15238582A JP S5942754 A JPS5942754 A JP S5942754A
Authority
JP
Japan
Prior art keywords
ground
magnetic field
grinding
charged particles
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57152385A
Other languages
English (en)
Japanese (ja)
Other versions
JPS645747B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Toshizo Fujiwara
藤原　稔三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP57152385A priority Critical patent/JPS5942754A/ja
Publication of JPS5942754A publication Critical patent/JPS5942754A/ja
Publication of JPS645747B2 publication Critical patent/JPS645747B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
JP57152385A 1982-08-31 1982-08-31 研削加工装置 Granted JPS5942754A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57152385A JPS5942754A (ja) 1982-08-31 1982-08-31 研削加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57152385A JPS5942754A (ja) 1982-08-31 1982-08-31 研削加工装置

Publications (2)

Publication Number Publication Date
JPS5942754A true JPS5942754A (ja) 1984-03-09
JPS645747B2 JPS645747B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-01-31

Family

ID=15539361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57152385A Granted JPS5942754A (ja) 1982-08-31 1982-08-31 研削加工装置

Country Status (1)

Country Link
JP (1) JPS5942754A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4691640A (en) * 1984-12-27 1987-09-08 Tsubakimoto Chain Co. Automotive body, floor conveyor, having pivotal carriers
JPS6455394A (en) * 1987-08-26 1989-03-02 Nippon Mining Co Production of high-purity electrolytic copper

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4691640A (en) * 1984-12-27 1987-09-08 Tsubakimoto Chain Co. Automotive body, floor conveyor, having pivotal carriers
JPS6455394A (en) * 1987-08-26 1989-03-02 Nippon Mining Co Production of high-purity electrolytic copper

Also Published As

Publication number Publication date
JPS645747B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-01-31

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