JPS5942749A - 走査電子顕微鏡の自動焦点合わせ方法 - Google Patents

走査電子顕微鏡の自動焦点合わせ方法

Info

Publication number
JPS5942749A
JPS5942749A JP57152390A JP15239082A JPS5942749A JP S5942749 A JPS5942749 A JP S5942749A JP 57152390 A JP57152390 A JP 57152390A JP 15239082 A JP15239082 A JP 15239082A JP S5942749 A JPS5942749 A JP S5942749A
Authority
JP
Japan
Prior art keywords
automatic focusing
current
image
focusing method
electron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57152390A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0234420B2 (enExample
Inventor
Keisuke Suzuki
啓介 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP57152390A priority Critical patent/JPS5942749A/ja
Publication of JPS5942749A publication Critical patent/JPS5942749A/ja
Publication of JPH0234420B2 publication Critical patent/JPH0234420B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57152390A 1982-08-31 1982-08-31 走査電子顕微鏡の自動焦点合わせ方法 Granted JPS5942749A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57152390A JPS5942749A (ja) 1982-08-31 1982-08-31 走査電子顕微鏡の自動焦点合わせ方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57152390A JPS5942749A (ja) 1982-08-31 1982-08-31 走査電子顕微鏡の自動焦点合わせ方法

Publications (2)

Publication Number Publication Date
JPS5942749A true JPS5942749A (ja) 1984-03-09
JPH0234420B2 JPH0234420B2 (enExample) 1990-08-03

Family

ID=15539464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57152390A Granted JPS5942749A (ja) 1982-08-31 1982-08-31 走査電子顕微鏡の自動焦点合わせ方法

Country Status (1)

Country Link
JP (1) JPS5942749A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63307652A (ja) * 1987-06-08 1988-12-15 Nikon Corp 電子顕微鏡の焦点位置検出装置
JP2007182227A (ja) * 2007-02-13 2007-07-19 Honda Motor Co Ltd 電動駐車ブレーキ装置における凍結解除装置および凍結検出装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63307652A (ja) * 1987-06-08 1988-12-15 Nikon Corp 電子顕微鏡の焦点位置検出装置
JP2007182227A (ja) * 2007-02-13 2007-07-19 Honda Motor Co Ltd 電動駐車ブレーキ装置における凍結解除装置および凍結検出装置

Also Published As

Publication number Publication date
JPH0234420B2 (enExample) 1990-08-03

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