JPS5939163U - 研摩布クリ−ニング装置 - Google Patents

研摩布クリ−ニング装置

Info

Publication number
JPS5939163U
JPS5939163U JP1982134247U JP13424782U JPS5939163U JP S5939163 U JPS5939163 U JP S5939163U JP 1982134247 U JP1982134247 U JP 1982134247U JP 13424782 U JP13424782 U JP 13424782U JP S5939163 U JPS5939163 U JP S5939163U
Authority
JP
Japan
Prior art keywords
abrasive cloth
cleaning device
brush
cloth cleaning
surface plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1982134247U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6218369Y2 (enExample
Inventor
正治 木下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP1982134247U priority Critical patent/JPS5939163U/ja
Publication of JPS5939163U publication Critical patent/JPS5939163U/ja
Application granted granted Critical
Publication of JPS6218369Y2 publication Critical patent/JPS6218369Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP1982134247U 1982-09-06 1982-09-06 研摩布クリ−ニング装置 Granted JPS5939163U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982134247U JPS5939163U (ja) 1982-09-06 1982-09-06 研摩布クリ−ニング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982134247U JPS5939163U (ja) 1982-09-06 1982-09-06 研摩布クリ−ニング装置

Publications (2)

Publication Number Publication Date
JPS5939163U true JPS5939163U (ja) 1984-03-13
JPS6218369Y2 JPS6218369Y2 (enExample) 1987-05-12

Family

ID=30302552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982134247U Granted JPS5939163U (ja) 1982-09-06 1982-09-06 研摩布クリ−ニング装置

Country Status (1)

Country Link
JP (1) JPS5939163U (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002307292A (ja) * 2001-04-11 2002-10-23 Dowa Mining Co Ltd 研磨布のドレッシング装置およびドレッシング方法
JP2006289522A (ja) * 2005-04-06 2006-10-26 Speedfam Co Ltd 両面研磨装置における研磨パッド貼着用加圧ローラ及び加圧ローラによる研磨パッドの貼着方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002307292A (ja) * 2001-04-11 2002-10-23 Dowa Mining Co Ltd 研磨布のドレッシング装置およびドレッシング方法
JP2006289522A (ja) * 2005-04-06 2006-10-26 Speedfam Co Ltd 両面研磨装置における研磨パッド貼着用加圧ローラ及び加圧ローラによる研磨パッドの貼着方法

Also Published As

Publication number Publication date
JPS6218369Y2 (enExample) 1987-05-12

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