JPS5939042A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5939042A
JPS5939042A JP14892682A JP14892682A JPS5939042A JP S5939042 A JPS5939042 A JP S5939042A JP 14892682 A JP14892682 A JP 14892682A JP 14892682 A JP14892682 A JP 14892682A JP S5939042 A JPS5939042 A JP S5939042A
Authority
JP
Japan
Prior art keywords
glass film
silicate glass
substrate
film
patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14892682A
Other languages
English (en)
Japanese (ja)
Other versions
JPH049371B2 (enrdf_load_stackoverflow
Inventor
Tadashi Kirisako
桐迫　正
Toshihiko Fukuyama
福山　敏彦
Yoshinobu Monma
門馬　義信
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14892682A priority Critical patent/JPS5939042A/ja
Publication of JPS5939042A publication Critical patent/JPS5939042A/ja
Publication of JPH049371B2 publication Critical patent/JPH049371B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Formation Of Insulating Films (AREA)
  • Element Separation (AREA)
  • Bipolar Transistors (AREA)
JP14892682A 1982-08-27 1982-08-27 半導体装置の製造方法 Granted JPS5939042A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14892682A JPS5939042A (ja) 1982-08-27 1982-08-27 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14892682A JPS5939042A (ja) 1982-08-27 1982-08-27 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5939042A true JPS5939042A (ja) 1984-03-03
JPH049371B2 JPH049371B2 (enrdf_load_stackoverflow) 1992-02-20

Family

ID=15463747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14892682A Granted JPS5939042A (ja) 1982-08-27 1982-08-27 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5939042A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62162325A (ja) * 1986-01-13 1987-07-18 Sanyo Electric Co Ltd 半導体装置の製造方法
JPS62198120A (ja) * 1986-02-25 1987-09-01 Sanyo Electric Co Ltd 半導体装置の製造方法
JPH01134914A (ja) * 1987-11-20 1989-05-26 Fujitsu Ltd 半導体装置の製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10024934A1 (de) 2000-05-19 2001-11-22 Bayer Ag Wirkstoffkombinationen mit insektiziden akariziden Eigenschaften

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619107A (en) * 1979-07-26 1981-02-23 Mitsubishi Electric Corp Test unit for servo system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619107A (en) * 1979-07-26 1981-02-23 Mitsubishi Electric Corp Test unit for servo system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62162325A (ja) * 1986-01-13 1987-07-18 Sanyo Electric Co Ltd 半導体装置の製造方法
JPS62198120A (ja) * 1986-02-25 1987-09-01 Sanyo Electric Co Ltd 半導体装置の製造方法
JPH01134914A (ja) * 1987-11-20 1989-05-26 Fujitsu Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH049371B2 (enrdf_load_stackoverflow) 1992-02-20

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