JPS5938641A - ガス検知素子 - Google Patents

ガス検知素子

Info

Publication number
JPS5938641A
JPS5938641A JP57147788A JP14778882A JPS5938641A JP S5938641 A JPS5938641 A JP S5938641A JP 57147788 A JP57147788 A JP 57147788A JP 14778882 A JP14778882 A JP 14778882A JP S5938641 A JPS5938641 A JP S5938641A
Authority
JP
Japan
Prior art keywords
thin film
sensitivity
film
temperature
detection element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57147788A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6151262B2 (cs
Inventor
Masayuki Shiratori
白鳥　昌之
Masaki Katsura
桂　正樹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP57147788A priority Critical patent/JPS5938641A/ja
Priority to EP83108418A priority patent/EP0102067B1/en
Priority to DE8383108418T priority patent/DE3377738D1/de
Priority to KR1019830004019A priority patent/KR870001034B1/ko
Publication of JPS5938641A publication Critical patent/JPS5938641A/ja
Priority to US06/903,839 priority patent/US4792433A/en
Publication of JPS6151262B2 publication Critical patent/JPS6151262B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
    • G01N31/22—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using chemical indicators

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biophysics (AREA)
  • Molecular Biology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP57147788A 1982-08-27 1982-08-27 ガス検知素子 Granted JPS5938641A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP57147788A JPS5938641A (ja) 1982-08-27 1982-08-27 ガス検知素子
EP83108418A EP0102067B1 (en) 1982-08-27 1983-08-26 Co gas detecting device and circuit for driving the same
DE8383108418T DE3377738D1 (en) 1982-08-27 1983-08-26 Co gas detecting device and circuit for driving the same
KR1019830004019A KR870001034B1 (ko) 1982-08-27 1983-08-27 기체검출소자
US06/903,839 US4792433A (en) 1982-08-27 1986-09-04 CO gas detecting device and circuit for driving the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57147788A JPS5938641A (ja) 1982-08-27 1982-08-27 ガス検知素子

Publications (2)

Publication Number Publication Date
JPS5938641A true JPS5938641A (ja) 1984-03-02
JPS6151262B2 JPS6151262B2 (cs) 1986-11-07

Family

ID=15438209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57147788A Granted JPS5938641A (ja) 1982-08-27 1982-08-27 ガス検知素子

Country Status (2)

Country Link
JP (1) JPS5938641A (cs)
KR (1) KR870001034B1 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62126341A (ja) * 1985-11-27 1987-06-08 Toshiba Corp ガスセンサ
JPS6383650A (ja) * 1986-09-29 1988-04-14 Toshiba Corp ガスセンサの製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108120747B (zh) * 2017-11-30 2020-10-30 江苏智闻智能传感科技有限公司 二氧化锡基气敏元件的制备方法及一氧化碳气体传感器系统

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS547196A (en) * 1977-06-16 1979-01-19 Figaro Eng Gas detecting element
JPS5421397A (en) * 1977-07-18 1979-02-17 Fuji Electric Co Ltd Carbon monoxide detector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS547196A (en) * 1977-06-16 1979-01-19 Figaro Eng Gas detecting element
JPS5421397A (en) * 1977-07-18 1979-02-17 Fuji Electric Co Ltd Carbon monoxide detector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62126341A (ja) * 1985-11-27 1987-06-08 Toshiba Corp ガスセンサ
JPS6383650A (ja) * 1986-09-29 1988-04-14 Toshiba Corp ガスセンサの製造方法

Also Published As

Publication number Publication date
JPS6151262B2 (cs) 1986-11-07
KR870001034B1 (ko) 1987-05-25
KR840006075A (ko) 1984-11-21

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